JP1639766S - Substrate retaining ring - Google Patents
Substrate retaining ringInfo
- Publication number
- JP1639766S JP1639766S JP2018026887F JP2018026887F JP1639766S JP 1639766 S JP1639766 S JP 1639766S JP 2018026887 F JP2018026887 F JP 2018026887F JP 2018026887 F JP2018026887 F JP 2018026887F JP 1639766 S JP1639766 S JP 1639766S
- Authority
- JP
- Japan
- Prior art keywords
- retaining ring
- substrate retaining
- substrate
- polishing
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000005498 polishing Methods 0.000 abstract 2
Abstract
本物品は、ウエハ等の基板の面を研磨するために用いる基板研磨装置に用いられる基板保持リングである。This article is a substrate holding ring used in a substrate polishing apparatus for polishing the surface of a substrate such as a wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018026887F JP1639766S (en) | 2018-12-10 | 2018-12-10 | Substrate retaining ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018026887F JP1639766S (en) | 2018-12-10 | 2018-12-10 | Substrate retaining ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1639766S true JP1639766S (en) | 2019-08-26 |
Family
ID=82750108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018026887F Active JP1639766S (en) | 2018-12-10 | 2018-12-10 | Substrate retaining ring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1639766S (en) |
-
2018
- 2018-12-10 JP JP2018026887F patent/JP1639766S/en active Active
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