JP1624668S - - Google Patents
Info
- Publication number
- JP1624668S JP1624668S JPD2018-12651F JP2018012651F JP1624668S JP 1624668 S JP1624668 S JP 1624668S JP 2018012651 F JP2018012651 F JP 2018012651F JP 1624668 S JP1624668 S JP 1624668S
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2018-12651F JP1624668S (enExample) | 2018-06-08 | 2018-06-08 | |
| US29/671,716 USD911985S1 (en) | 2018-06-08 | 2018-11-29 | Gas introduction plate for plasma etching apparatus for etching semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2018-12651F JP1624668S (enExample) | 2018-06-08 | 2018-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1624668S true JP1624668S (enExample) | 2019-02-18 |
Family
ID=65358714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JPD2018-12651F Active JP1624668S (enExample) | 2018-06-08 | 2018-06-08 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD911985S1 (enExample) |
| JP (1) | JP1624668S (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD1005974S1 (en) * | 2022-05-19 | 2023-11-28 | Asm Ip Holding B.V. | Gas distributor for semiconductor manufacturing apparatus |
| USD1037778S1 (en) * | 2022-07-19 | 2024-08-06 | Applied Materials, Inc. | Gas distribution plate |
| USD1052548S1 (en) * | 2023-06-26 | 2024-11-26 | Applied Materials, Inc. | Gas diffuser |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6379466B1 (en) * | 1992-01-17 | 2002-04-30 | Applied Materials, Inc. | Temperature controlled gas distribution plate |
| USD363464S (en) * | 1992-08-27 | 1995-10-24 | Tokyo Electron Yamanashi Limited | Electrode for a semiconductor processing apparatus |
| USD411516S (en) * | 1996-03-15 | 1999-06-29 | Tokyo Electron Limited | Gas diffusion plate for electrode of semiconductor wafer processing apparatus |
| USD699816S1 (en) * | 2001-08-17 | 2014-02-18 | Neoperl Gmbh | Stream straightener for faucet |
| US7479304B2 (en) * | 2002-02-14 | 2009-01-20 | Applied Materials, Inc. | Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate |
| US20050252447A1 (en) * | 2004-05-11 | 2005-11-17 | Applied Materials, Inc. | Gas blocker plate for improved deposition |
| JP5044931B2 (ja) * | 2005-10-31 | 2012-10-10 | 東京エレクトロン株式会社 | ガス供給装置及び基板処理装置 |
| US20090159002A1 (en) * | 2007-12-19 | 2009-06-25 | Kallol Bera | Gas distribution plate with annular plenum having a sloped ceiling for uniform distribution |
| US8206506B2 (en) * | 2008-07-07 | 2012-06-26 | Lam Research Corporation | Showerhead electrode |
| US8402918B2 (en) * | 2009-04-07 | 2013-03-26 | Lam Research Corporation | Showerhead electrode with centering feature |
| SG169960A1 (en) * | 2009-09-18 | 2011-04-29 | Lam Res Corp | Clamped monolithic showerhead electrode |
| US8573152B2 (en) * | 2010-09-03 | 2013-11-05 | Lam Research Corporation | Showerhead electrode |
| USD654882S1 (en) * | 2010-10-21 | 2012-02-28 | Tokyo Electron Limited | Gas-separating plate for reactor for manufacturing semiconductor |
| USD655261S1 (en) * | 2010-10-21 | 2012-03-06 | Tokyo Electron Limited | Gas-separating plate for reactor for manufacturing semiconductor |
| USD655260S1 (en) * | 2010-10-21 | 2012-03-06 | Tokyo Electron Limited | Gas-separating plate for reactor for manufacturing semiconductor |
| JP1438745S (enExample) * | 2011-09-20 | 2015-04-06 | ||
| JP1438319S (enExample) * | 2011-09-20 | 2015-04-06 | ||
| USD733257S1 (en) * | 2014-02-14 | 2015-06-30 | Hansgrohe Se | Overhead shower |
| USD736348S1 (en) * | 2014-07-07 | 2015-08-11 | Jiangmen Triumph Rain Showers Co., LTD | Spray head for a shower |
| USD751176S1 (en) * | 2014-08-07 | 2016-03-08 | Hansgrohe Se | Overhead shower |
| USD787458S1 (en) * | 2015-11-18 | 2017-05-23 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
| TWD178424S (zh) * | 2016-01-08 | 2016-09-21 | Asm Ip Holding Bv | 用於半導體製造設備的氣流控制板 |
| USD880437S1 (en) * | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
-
2018
- 2018-06-08 JP JPD2018-12651F patent/JP1624668S/ja active Active
- 2018-11-29 US US29/671,716 patent/USD911985S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD911985S1 (en) | 2021-03-02 |
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