ITTO20030691A1 - METHOD AND EQUIPMENT FOR FORMING A LAYER - Google Patents
METHOD AND EQUIPMENT FOR FORMING A LAYERInfo
- Publication number
- ITTO20030691A1 ITTO20030691A1 IT000691A ITTO20030691A ITTO20030691A1 IT TO20030691 A1 ITTO20030691 A1 IT TO20030691A1 IT 000691 A IT000691 A IT 000691A IT TO20030691 A ITTO20030691 A IT TO20030691A IT TO20030691 A1 ITTO20030691 A1 IT TO20030691A1
- Authority
- IT
- Italy
- Prior art keywords
- equipment
- forming
- layer
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0381—Processes for depositing or forming copper oxide superconductor layers by evaporation, e.g. MBE
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT000691A ITTO20030691A1 (en) | 2003-09-11 | 2003-09-11 | METHOD AND EQUIPMENT FOR FORMING A LAYER |
PCT/IB2004/002984 WO2005024965A1 (en) | 2003-09-11 | 2004-09-10 | A method and apparatus for making a layer of coating material on a tape substrate, in particular for making superconductive tapes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT000691A ITTO20030691A1 (en) | 2003-09-11 | 2003-09-11 | METHOD AND EQUIPMENT FOR FORMING A LAYER |
Publications (1)
Publication Number | Publication Date |
---|---|
ITTO20030691A1 true ITTO20030691A1 (en) | 2005-03-12 |
Family
ID=34260037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT000691A ITTO20030691A1 (en) | 2003-09-11 | 2003-09-11 | METHOD AND EQUIPMENT FOR FORMING A LAYER |
Country Status (2)
Country | Link |
---|---|
IT (1) | ITTO20030691A1 (en) |
WO (1) | WO2005024965A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7763114B2 (en) | 2005-12-28 | 2010-07-27 | 3M Innovative Properties Company | Rotatable aperture mask assembly and deposition system |
CN108015496B (en) * | 2017-12-01 | 2019-05-28 | 北京创昱科技有限公司 | The preparation method of vacuum chamber and vacuum chamber |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD82859A (en) * | ||||
FR1490596A (en) * | 1966-06-01 | 1967-08-04 | Thomson Houston Comp Francaise | Improvements in superconductors and their manufacturing processes |
US3866565A (en) * | 1973-12-21 | 1975-02-18 | David E U Ridout | Vapor deposition apparatus with rotating drum mask |
-
2003
- 2003-09-11 IT IT000691A patent/ITTO20030691A1/en unknown
-
2004
- 2004-09-10 WO PCT/IB2004/002984 patent/WO2005024965A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2005024965A1 (en) | 2005-03-17 |
WO2005024965A8 (en) | 2006-04-06 |
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