ITRM930695A1 - Procedimento per la deposizione di uno strato di polisilicio su dischi di silicio. - Google Patents

Procedimento per la deposizione di uno strato di polisilicio su dischi di silicio.

Info

Publication number
ITRM930695A1
ITRM930695A1 IT000695A ITRM930695A ITRM930695A1 IT RM930695 A1 ITRM930695 A1 IT RM930695A1 IT 000695 A IT000695 A IT 000695A IT RM930695 A ITRM930695 A IT RM930695A IT RM930695 A1 ITRM930695 A1 IT RM930695A1
Authority
IT
Italy
Prior art keywords
polysilicio
deposition
procedure
layer
silicon discs
Prior art date
Application number
IT000695A
Other languages
English (en)
Inventor
Fabrizio Fama
Maurizio Mazzer
Original Assignee
Consorzio Eagle
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consorzio Eagle filed Critical Consorzio Eagle
Priority to IT93RM000695A priority Critical patent/IT1266502B1/it
Publication of ITRM930695A0 publication Critical patent/ITRM930695A0/it
Publication of ITRM930695A1 publication Critical patent/ITRM930695A1/it
Application granted granted Critical
Publication of IT1266502B1 publication Critical patent/IT1266502B1/it

Links

IT93RM000695A 1993-10-15 1993-10-15 Procedimento per la deposizione di uno strato di polisilicio su dischi di silicio. IT1266502B1 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT93RM000695A IT1266502B1 (it) 1993-10-15 1993-10-15 Procedimento per la deposizione di uno strato di polisilicio su dischi di silicio.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT93RM000695A IT1266502B1 (it) 1993-10-15 1993-10-15 Procedimento per la deposizione di uno strato di polisilicio su dischi di silicio.

Publications (3)

Publication Number Publication Date
ITRM930695A0 ITRM930695A0 (it) 1993-10-15
ITRM930695A1 true ITRM930695A1 (it) 1995-04-15
IT1266502B1 IT1266502B1 (it) 1996-12-30

Family

ID=11402011

Family Applications (1)

Application Number Title Priority Date Filing Date
IT93RM000695A IT1266502B1 (it) 1993-10-15 1993-10-15 Procedimento per la deposizione di uno strato di polisilicio su dischi di silicio.

Country Status (1)

Country Link
IT (1) IT1266502B1 (it)

Also Published As

Publication number Publication date
IT1266502B1 (it) 1996-12-30
ITRM930695A0 (it) 1993-10-15

Similar Documents

Publication Publication Date Title
ID22434A (id) Pembentukan suatu film semikonduktor kristalin diatas substrat gelas
DE59403364D1 (de) Metallbeschichtetes Substrat
DE69017287D1 (de) Durchsichtiges Substrat.
DE69604132D1 (de) Beschichtetes Substrat
DE69426971D1 (de) Mikrolinsensubstrat
DE69407574D1 (de) Tintenstrahlaufzeichnungsschicht
IT1291199B1 (it) Substrato rivestito per un insieme trasparente ad alta selettivita'.
SG47636A1 (en) Control of the properties of a film deposited on a semiconductor wafer
FI932599A0 (fi) Foerfarande foer modifiering av ytorna av foerformade substrat genom ymppolymerisation
DE69430494D1 (de) Magnetplattensubstrat und Magnetplatte unter Verwendung desselben
DE69111487D1 (de) Beschichtete Substrate.
TR25673A (tr) SERT YüZEYLER üZERINDE BIRIKEN KIREC TABAKASININ GIDERILMESINE MAHSUS TEMIZLEYICI BILESIM.
DE69620177D1 (de) Reflektierende halbleitersubstrate
DE69318124D1 (de) Aufzeichnungsschicht
FR2702088B1 (fr) Nacelle pour plaquettes de silicium.
NL1002945C2 (nl) Gecoat substraat.
EP0598230A3 (en) Method of cleaning the surface of a silicon substrate.
FR2673633B1 (fr) Revetement multicouche pour substrat polycarbonate.
NO980918D0 (no) Substrat fastgjöringsapparat
DE69300698D1 (de) Kühlkörpermontage für Substrat.
FR2695521B1 (fr) Actionneur piezo-electrique.
ITMI930071A0 (it) Procedimento per fissare corpi semiconduttori su un substrato
FI951667A0 (fi) Liuosviljelykasvualusta
KR950700716A (ko) 장애자용 차의자(wheelchatr for the handicapped)
ITRM930695A1 (it) Procedimento per la deposizione di uno strato di polisilicio su dischi di silicio.

Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19961016