ITRM910248A1 - INFRARED RADIATION DETECTOR AND RELATED MANUFACTURING METHOD - Google Patents

INFRARED RADIATION DETECTOR AND RELATED MANUFACTURING METHOD

Info

Publication number
ITRM910248A1
ITRM910248A1 IT1991RM000248A ITRM910248A ITRM910248A1 IT RM910248 A1 ITRM910248 A1 IT RM910248A1 IT 1991RM000248 A IT1991RM000248 A IT 1991RM000248A IT RM910248 A ITRM910248 A IT RM910248A IT RM910248 A1 ITRM910248 A1 IT RM910248A1
Authority
IT
Italy
Prior art keywords
infrared radiation
radiation detector
related manufacturing
manufacturing
detector
Prior art date
Application number
IT1991RM000248A
Other languages
Italian (it)
Inventor
D Eden Dayton
E William Case
R Thomas Schimert
Original Assignee
Ltv Aerospace & Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to CA002036874A priority Critical patent/CA2036874A1/en
Priority to DE4107331A priority patent/DE4107331B4/en
Application filed by Ltv Aerospace & Defence filed Critical Ltv Aerospace & Defence
Priority to IT1991RM000248A priority patent/IT1314365B1/en
Publication of ITRM910248A0 publication Critical patent/ITRM910248A0/it
Priority to FR9110580A priority patent/FR2803948B1/en
Priority to GB9119200A priority patent/GB2348539B/en
Priority to JP80000792A priority patent/JP2001318157A/en
Publication of ITRM910248A1 publication Critical patent/ITRM910248A1/en
Application granted granted Critical
Publication of IT1314365B1 publication Critical patent/IT1314365B1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0837Microantennas, e.g. bow-tie
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14665Imagers using a photoconductor layer
    • H01L27/14669Infrared imagers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14692Thin film technologies, e.g. amorphous, poly, micro- or nanocrystalline silicon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/006Selective devices having photonic band gap materials or materials of which the material properties are frequency dependent, e.g. perforated substrates, high-impedance surfaces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q21/00Antenna arrays or systems
    • H01Q21/06Arrays of individually energised antenna units similarly polarised and spaced apart
    • H01Q21/061Two dimensional planar arrays
    • H01Q21/062Two dimensional planar arrays using dipole aerials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
IT1991RM000248A 1991-02-22 1991-04-11 INFRARED RADIATION DETECTOR AND RELATED MANUFACTURING METHOD IT1314365B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CA002036874A CA2036874A1 (en) 1991-02-22 1991-02-22 Bandgap radiation detector and method of fabrication
DE4107331A DE4107331B4 (en) 1991-02-22 1991-03-07 Infrared radiation quantum detector
IT1991RM000248A IT1314365B1 (en) 1991-02-22 1991-04-11 INFRARED RADIATION DETECTOR AND RELATED MANUFACTURING METHOD
FR9110580A FR2803948B1 (en) 1991-02-22 1991-08-23 RADIATION DETECTOR, IN PARTICULAR INFRARED RADIATION, AND METHOD FOR THE PRODUCTION THEREOF
GB9119200A GB2348539B (en) 1991-02-22 1991-09-09 Bandgap radiation detector and method of fabrication
JP80000792A JP2001318157A (en) 1991-02-22 1992-04-20 Band-gap radiation detector

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
CA002036874A CA2036874A1 (en) 1991-02-22 1991-02-22 Bandgap radiation detector and method of fabrication
DE4107331A DE4107331B4 (en) 1991-02-22 1991-03-07 Infrared radiation quantum detector
IT1991RM000248A IT1314365B1 (en) 1991-02-22 1991-04-11 INFRARED RADIATION DETECTOR AND RELATED MANUFACTURING METHOD
FR9110580A FR2803948B1 (en) 1991-02-22 1991-08-23 RADIATION DETECTOR, IN PARTICULAR INFRARED RADIATION, AND METHOD FOR THE PRODUCTION THEREOF
GB9119200A GB2348539B (en) 1991-02-22 1991-09-09 Bandgap radiation detector and method of fabrication
JP80000792A JP2001318157A (en) 1991-02-22 1992-04-20 Band-gap radiation detector

Publications (3)

Publication Number Publication Date
ITRM910248A0 ITRM910248A0 (en) 1991-04-11
ITRM910248A1 true ITRM910248A1 (en) 1992-10-11
IT1314365B1 IT1314365B1 (en) 2002-12-09

Family

ID=28046955

Family Applications (1)

Application Number Title Priority Date Filing Date
IT1991RM000248A IT1314365B1 (en) 1991-02-22 1991-04-11 INFRARED RADIATION DETECTOR AND RELATED MANUFACTURING METHOD

Country Status (6)

Country Link
JP (1) JP2001318157A (en)
CA (1) CA2036874A1 (en)
DE (1) DE4107331B4 (en)
FR (1) FR2803948B1 (en)
GB (1) GB2348539B (en)
IT (1) IT1314365B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7923689B2 (en) * 2009-04-30 2011-04-12 Raytheon Company Multi-band sub-wavelength IR detector having frequency selective slots and method of making the same
US8053734B2 (en) * 2009-04-30 2011-11-08 Raytehon Company Nano-antenna for wideband coherent conformal IR detector arrays
CN114649428B (en) * 2022-03-23 2023-02-17 中国科学院半导体研究所 Novel two-dimensional/three-dimensional heterogeneous high-speed photoelectric detector and preparation method thereof

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445050A (en) * 1981-12-15 1984-04-24 Marks Alvin M Device for conversion of light power to electric power
DE3068571D1 (en) * 1979-05-01 1984-08-23 Secr Defence Brit Radiation detectors
GB2207801B (en) * 1979-07-30 1989-05-24 Secr Defence Thermal imaging devices
US4327291A (en) * 1980-06-16 1982-04-27 Texas Instruments Incorporated Infrared charge injection device imaging system
GB2095900B (en) * 1981-03-30 1985-01-09 Philips Electronic Associated Imaging devices and systems
DE3200853A1 (en) * 1982-01-14 1983-07-21 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt SEMICONDUCTOR ARRANGEMENT WITH AN IMAGE RECORDING UNIT AND WITH A READING UNIT AND METHOD FOR THEIR PRODUCTION
GB2207802B (en) * 1982-08-27 1989-06-01 Philips Electronic Associated Thermal-radiation imaging devices and systems,and the manufacture of such imaging devices
US5248884A (en) * 1983-10-11 1993-09-28 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Infrared detectors
US4888597A (en) * 1987-12-14 1989-12-19 California Institute Of Technology Millimeter and submillimeter wave antenna structure
GB2239555B (en) * 1989-03-01 1993-02-24 Philips Electronic Associated Infrared image-sensing devices and their manufacture
JPH0321078A (en) * 1989-06-19 1991-01-29 Fujitsu Ltd Infrared ray detector device
JP2773930B2 (en) * 1989-10-31 1998-07-09 三菱電機株式会社 Light detection device

Also Published As

Publication number Publication date
DE4107331B4 (en) 2005-11-17
JP2001318157A (en) 2001-11-16
DE4107331A1 (en) 2003-07-03
IT1314365B1 (en) 2002-12-09
FR2803948B1 (en) 2003-01-31
FR2803948A1 (en) 2001-07-20
ITRM910248A0 (en) 1991-04-11
GB2348539A (en) 2000-10-04
GB2348539B (en) 2001-02-21
CA2036874A1 (en) 2002-07-10
GB9119200D0 (en) 2000-08-23

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