ITMI931321A1 - PLASMA TREATMENT SYSTEM - Google Patents
PLASMA TREATMENT SYSTEMInfo
- Publication number
- ITMI931321A1 ITMI931321A1 IT001321A ITMI931321A ITMI931321A1 IT MI931321 A1 ITMI931321 A1 IT MI931321A1 IT 001321 A IT001321 A IT 001321A IT MI931321 A ITMI931321 A IT MI931321A IT MI931321 A1 ITMI931321 A1 IT MI931321A1
- Authority
- IT
- Italy
- Prior art keywords
- treatment system
- plasma treatment
- plasma
- treatment
- Prior art date
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4160599A JPH065386A (en) | 1992-06-19 | 1992-06-19 | Electronic cyclotron resonance device |
JP4345803A JPH06196412A (en) | 1992-12-25 | 1992-12-25 | Plasma treatment device |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI931321A0 ITMI931321A0 (en) | 1993-06-18 |
ITMI931321A1 true ITMI931321A1 (en) | 1994-12-18 |
IT1264852B1 IT1264852B1 (en) | 1996-10-17 |
Family
ID=26487059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT93MI1321 IT1264852B1 (en) | 1992-06-19 | 1993-06-18 | Plasma processing device for precision etching or sputtering or CVD - incorporates circularly polarised wave converter with angle regulation of circular polarisation converter |
Country Status (1)
Country | Link |
---|---|
IT (1) | IT1264852B1 (en) |
-
1993
- 1993-06-18 IT IT93MI1321 patent/IT1264852B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
ITMI931321A0 (en) | 1993-06-18 |
IT1264852B1 (en) | 1996-10-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69309164D1 (en) | Multi-electric plasma treatment device | |
ITMI930377A0 (en) | FILTER SYSTEM | |
NO933878D0 (en) | ULTRASONIC TREATMENT SYSTEM | |
DE69318480D1 (en) | Plasma processing device | |
ITMI932630A0 (en) | MODULAR ASSEMBLY SYSTEM | |
NO932649D0 (en) | KJOERETOEY-LOCATION SYSTEM | |
DE69318304T2 (en) | LOCATION SYSTEM | |
DE59306704D1 (en) | Vacuum processing system | |
BR9306983A (en) | Telecommunication system | |
IT230506Y1 (en) | CHANNEL SYSTEM | |
DK139492D0 (en) | EVACUATION SYSTEM | |
BR9401762A (en) | Telealarm system | |
BR9207069A (en) | Microscopy system | |
BR9407027A (en) | Evacuation system | |
ITBO920453A0 (en) | INSULATION SYSTEM. | |
ITTO930586A1 (en) | ANTI-THEFT SYSTEM FOR MEANS OF LOCOMATION | |
ITMI931321A1 (en) | PLASMA TREATMENT SYSTEM | |
ITRE920084A0 (en) | CONTROL SYSTEM FOR LOCKS | |
ITMI910669A1 (en) | PROCESSING SYSTEM | |
ITPV920016A0 (en) | EASYTAXI SYSTEM | |
NO934330D0 (en) | Jacuzzi cleaning system | |
BR9304948A (en) | TAMBOSI System | |
BR9301761A (en) | Flumenelectrogen system | |
BR9202039A (en) | DESIMETRIC ALARM SYSTEM | |
IT229996Y1 (en) | DIRECT VISUAL SYSTEM |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970628 |