ITMI931321A1 - PLASMA TREATMENT SYSTEM - Google Patents

PLASMA TREATMENT SYSTEM

Info

Publication number
ITMI931321A1
ITMI931321A1 IT001321A ITMI931321A ITMI931321A1 IT MI931321 A1 ITMI931321 A1 IT MI931321A1 IT 001321 A IT001321 A IT 001321A IT MI931321 A ITMI931321 A IT MI931321A IT MI931321 A1 ITMI931321 A1 IT MI931321A1
Authority
IT
Italy
Prior art keywords
treatment system
plasma treatment
plasma
treatment
Prior art date
Application number
IT001321A
Other languages
Italian (it)
Inventor
Takashi Kinoshita
Tetsuya Nishizuka
Toshihisa Nozawa
Original Assignee
Kobe Seiko Sho Age Nte Anche Come Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4160599A external-priority patent/JPH065386A/en
Priority claimed from JP4345803A external-priority patent/JPH06196412A/en
Application filed by Kobe Seiko Sho Age Nte Anche Come Kk filed Critical Kobe Seiko Sho Age Nte Anche Come Kk
Publication of ITMI931321A0 publication Critical patent/ITMI931321A0/en
Publication of ITMI931321A1 publication Critical patent/ITMI931321A1/en
Application granted granted Critical
Publication of IT1264852B1 publication Critical patent/IT1264852B1/en

Links

IT93MI1321 1992-06-19 1993-06-18 Plasma processing device for precision etching or sputtering or CVD - incorporates circularly polarised wave converter with angle regulation of circular polarisation converter IT1264852B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4160599A JPH065386A (en) 1992-06-19 1992-06-19 Electronic cyclotron resonance device
JP4345803A JPH06196412A (en) 1992-12-25 1992-12-25 Plasma treatment device

Publications (3)

Publication Number Publication Date
ITMI931321A0 ITMI931321A0 (en) 1993-06-18
ITMI931321A1 true ITMI931321A1 (en) 1994-12-18
IT1264852B1 IT1264852B1 (en) 1996-10-17

Family

ID=26487059

Family Applications (1)

Application Number Title Priority Date Filing Date
IT93MI1321 IT1264852B1 (en) 1992-06-19 1993-06-18 Plasma processing device for precision etching or sputtering or CVD - incorporates circularly polarised wave converter with angle regulation of circular polarisation converter

Country Status (1)

Country Link
IT (1) IT1264852B1 (en)

Also Published As

Publication number Publication date
ITMI931321A0 (en) 1993-06-18
IT1264852B1 (en) 1996-10-17

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970628