ITMI20091083A1 - MICROMECHANICAL ACCELERATION SENSOR WITH OPEN SEISMIC MASS - Google Patents

MICROMECHANICAL ACCELERATION SENSOR WITH OPEN SEISMIC MASS

Info

Publication number
ITMI20091083A1
ITMI20091083A1 IT001083A ITMI20091083A ITMI20091083A1 IT MI20091083 A1 ITMI20091083 A1 IT MI20091083A1 IT 001083 A IT001083 A IT 001083A IT MI20091083 A ITMI20091083 A IT MI20091083A IT MI20091083 A1 ITMI20091083 A1 IT MI20091083A1
Authority
IT
Italy
Prior art keywords
acceleration sensor
seismic mass
micromechanical acceleration
open
open seismic
Prior art date
Application number
IT001083A
Other languages
Italian (it)
Inventor
Dietrich Schubert
Heiko Stahl
Lars Tebje
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20091083A1 publication Critical patent/ITMI20091083A1/en
Application granted granted Critical
Publication of IT1394725B1 publication Critical patent/IT1394725B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
ITMI2009A001083A 2008-06-24 2009-06-19 MICROMECHANICAL ACCELERATION SENSOR WITH OPEN SEISMIC MASS IT1394725B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008002606.9A DE102008002606B4 (en) 2008-06-24 2008-06-24 Micromechanical acceleration sensor with open seismic mass

Publications (2)

Publication Number Publication Date
ITMI20091083A1 true ITMI20091083A1 (en) 2009-12-25
IT1394725B1 IT1394725B1 (en) 2012-07-13

Family

ID=41360337

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A001083A IT1394725B1 (en) 2008-06-24 2009-06-19 MICROMECHANICAL ACCELERATION SENSOR WITH OPEN SEISMIC MASS

Country Status (4)

Country Link
US (1) US8393215B2 (en)
DE (1) DE102008002606B4 (en)
FR (1) FR2932891B1 (en)
IT (1) IT1394725B1 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008043788A1 (en) * 2008-11-17 2010-05-20 Robert Bosch Gmbh Micromechanical component
DE102010030878B4 (en) 2010-07-02 2023-08-17 Robert Bosch Gmbh Micromechanical sensor device for measuring an acceleration, a pressure and the like
DE102010039293B4 (en) * 2010-08-13 2018-05-24 Robert Bosch Gmbh Micromechanical component and production method for a micromechanical component
GB201020722D0 (en) 2010-12-07 2011-01-19 Atlantic Inertial Systems Ltd Accelerometer
US9927459B2 (en) 2013-11-06 2018-03-27 Analog Devices, Inc. Accelerometer with offset compensation
US10203351B2 (en) * 2014-10-03 2019-02-12 Analog Devices, Inc. MEMS accelerometer with Z axis anchor tracking
TWI607955B (en) 2015-03-05 2017-12-11 立錡科技股份有限公司 Mirco-electro-mechanical system device
JP6558110B2 (en) * 2015-07-10 2019-08-14 セイコーエプソン株式会社 Physical quantity sensor, electronic device and mobile object
JP6657626B2 (en) * 2015-07-10 2020-03-04 セイコーエプソン株式会社 Physical quantity sensors, electronic devices and moving objects
DE102015216806A1 (en) 2015-09-02 2017-03-02 Robert Bosch Gmbh Sensor device and method for calibrating a sensor device
TWI570054B (en) * 2015-12-28 2017-02-11 財團法人工業技術研究院 Micro-electromechanical apparatus having central anchor
US10203352B2 (en) * 2016-08-04 2019-02-12 Analog Devices, Inc. Anchor tracking apparatus for in-plane accelerometers and related methods
CN107782916B (en) * 2016-08-27 2021-07-09 深迪半导体(绍兴)有限公司 Three-axis accelerometer
US10261105B2 (en) 2017-02-10 2019-04-16 Analog Devices, Inc. Anchor tracking for MEMS accelerometers
JP6922594B2 (en) * 2017-09-22 2021-08-18 セイコーエプソン株式会社 Physical quantity sensors, physical quantity sensor devices, electronic devices, portable electronic devices and mobiles
JP2020016557A (en) 2018-07-26 2020-01-30 セイコーエプソン株式会社 Physical quantity sensor, electronic apparatus, and movable body
US11415595B2 (en) * 2019-06-28 2022-08-16 Analog Devices, Inc. Multiple anchor high frequency accelerometer
JP7188311B2 (en) 2019-07-31 2022-12-13 セイコーエプソン株式会社 Gyro sensors, electronic devices, and mobile objects
US11377346B2 (en) 2019-09-11 2022-07-05 Murata Manufacturing Co., Ltd. Low-noise multi axis MEMS accelerometer
EP3792637B1 (en) 2019-09-11 2023-05-03 Murata Manufacturing Co., Ltd. Low-noise multi-axis mems accelerometer

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
DE19639946B4 (en) * 1996-09-27 2006-09-21 Robert Bosch Gmbh Micromechanical component
DE19817357B4 (en) * 1998-04-18 2008-10-30 Robert Bosch Gmbh Micromechanical component
DE19930779B4 (en) * 1999-07-03 2010-05-06 Robert Bosch Gmbh Micromechanical component
DE19949605A1 (en) * 1999-10-15 2001-04-19 Bosch Gmbh Robert Acceleration sensor for car air bag control has micromachined stop bars prevents misfunction due to perpendicular acceleration
DE60311281T2 (en) 2002-07-19 2007-11-15 Analog Devices Inc., Norwood REDUCING THE OFFSET OF A ACCELERATOR
EP1626283B1 (en) 2004-08-13 2011-03-23 STMicroelectronics Srl Micro-electromechanical structure, in particular accelerometer, with improved insensitivity to thermomechanical stresses
US7328604B2 (en) * 2005-09-22 2008-02-12 Teledyne Licensing, Llc Microelectromechanical (MEM) fluid health sensing device and fabrication method
DE102006059928A1 (en) * 2006-12-19 2008-08-21 Robert Bosch Gmbh Accelerometer with comb electrodes
DE102008001863A1 (en) 2008-05-19 2009-11-26 Robert Bosch Gmbh Accelerometer with encompassing seismic mass

Also Published As

Publication number Publication date
DE102008002606A1 (en) 2009-12-31
FR2932891B1 (en) 2019-07-05
DE102008002606B4 (en) 2020-03-12
US20090314085A1 (en) 2009-12-24
IT1394725B1 (en) 2012-07-13
FR2932891A1 (en) 2009-12-25
US8393215B2 (en) 2013-03-12

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