ITMI20060352A1 - Componenti micromeccanico e corrispondente procedimento di fabbricazione - Google Patents

Componenti micromeccanico e corrispondente procedimento di fabbricazione

Info

Publication number
ITMI20060352A1
ITMI20060352A1 ITMI20060352A ITMI20060352A1 IT MI20060352 A1 ITMI20060352 A1 IT MI20060352A1 IT MI20060352 A ITMI20060352 A IT MI20060352A IT MI20060352 A1 ITMI20060352 A1 IT MI20060352A1
Authority
IT
Italy
Prior art keywords
micro
manufacturing procedure
mechanical components
corresponding manufacturing
mechanical
Prior art date
Application number
Other languages
English (en)
Italian (it)
Inventor
Ando Feyh
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20060352A1 publication Critical patent/ITMI20060352A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Weting (AREA)
  • Pressure Sensors (AREA)
ITMI20060352 2005-03-02 2006-02-28 Componenti micromeccanico e corrispondente procedimento di fabbricazione ITMI20060352A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200510009422 DE102005009422B4 (de) 2005-03-02 2005-03-02 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren

Publications (1)

Publication Number Publication Date
ITMI20060352A1 true ITMI20060352A1 (it) 2006-09-03

Family

ID=36914520

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI20060352 ITMI20060352A1 (it) 2005-03-02 2006-02-28 Componenti micromeccanico e corrispondente procedimento di fabbricazione

Country Status (3)

Country Link
DE (1) DE102005009422B4 (de)
FR (1) FR2883275A1 (de)
IT (1) ITMI20060352A1 (de)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5155061A (en) * 1991-06-03 1992-10-13 Allied-Signal Inc. Method for fabricating a silicon pressure sensor incorporating silicon-on-insulator structures
KR100268878B1 (ko) * 1998-05-08 2000-10-16 김영환 반도체소자 및 그의 제조방법
DE10030352A1 (de) * 2000-06-21 2002-01-10 Bosch Gmbh Robert Mikromechanisches Bauelement, insbesondere Sensorelement, mit einer stabilisierten Membran und Verfahren zur Herstellung eines derartigen Bauelements
DE10138759A1 (de) * 2001-08-07 2003-03-06 Bosch Gmbh Robert Verfahren zur Herstellung eines Halbleiterbauelements sowie Halbleiterbauelement, insbesondere Membransensor
DE10323559A1 (de) * 2003-05-26 2004-12-30 Robert Bosch Gmbh Mikromechanische Vorrichtung, Drucksensor und Verfahren

Also Published As

Publication number Publication date
DE102005009422B4 (de) 2014-05-28
DE102005009422A1 (de) 2006-09-14
FR2883275A1 (fr) 2006-09-22

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