ITFI950019A0 - Procedimento perfezionato per la co-deposizione di ossidi metallici su un film plastico, relativo impianto e prodotto ottenuto - Google Patents

Procedimento perfezionato per la co-deposizione di ossidi metallici su un film plastico, relativo impianto e prodotto ottenuto

Info

Publication number
ITFI950019A0
ITFI950019A0 ITFI950019A ITFI950019A ITFI950019A0 IT FI950019 A0 ITFI950019 A0 IT FI950019A0 IT FI950019 A ITFI950019 A IT FI950019A IT FI950019 A ITFI950019 A IT FI950019A IT FI950019 A0 ITFI950019 A0 IT FI950019A0
Authority
IT
Italy
Prior art keywords
deposition
plastic film
product obtained
metal oxides
related system
Prior art date
Application number
ITFI950019A
Other languages
English (en)
Inventor
Andrea Fusi
Carlo Misiano
Francesco Staffetti
Original Assignee
Galileo Vacuum Tec Spa
Cetev Cent Tecnolog Vuoto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Galileo Vacuum Tec Spa, Cetev Cent Tecnolog Vuoto filed Critical Galileo Vacuum Tec Spa
Priority to IT95FI000019A priority Critical patent/IT1277813B1/it
Publication of ITFI950019A0 publication Critical patent/ITFI950019A0/it
Priority to DE69600530T priority patent/DE69600530T2/de
Priority to EP96830032A priority patent/EP0727505B1/en
Priority to JP8016554A priority patent/JPH08277463A/ja
Publication of ITFI950019A1 publication Critical patent/ITFI950019A1/it
Application granted granted Critical
Publication of IT1277813B1 publication Critical patent/IT1277813B1/it

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Insulating Materials (AREA)
  • Laminated Bodies (AREA)
IT95FI000019A 1995-02-01 1995-02-01 Procedimento perfezionato per la co-deposizione di ossidi metallici su un film plastico, relativo impianto e prodotto ottenuto IT1277813B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT95FI000019A IT1277813B1 (it) 1995-02-01 1995-02-01 Procedimento perfezionato per la co-deposizione di ossidi metallici su un film plastico, relativo impianto e prodotto ottenuto
DE69600530T DE69600530T2 (de) 1995-02-01 1996-01-26 Verfahren zur Zusammenbeschichtung von Kunststoffilmen mit Metalloxiden
EP96830032A EP0727505B1 (en) 1995-02-01 1996-01-26 Process for the codeposition of metallic oxides on a plastic film
JP8016554A JPH08277463A (ja) 1995-02-01 1996-02-01 誘電体蒸着物を有するプラスチックフィルムの製造方法と装置およびプラスチックフィルム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT95FI000019A IT1277813B1 (it) 1995-02-01 1995-02-01 Procedimento perfezionato per la co-deposizione di ossidi metallici su un film plastico, relativo impianto e prodotto ottenuto

Publications (3)

Publication Number Publication Date
ITFI950019A0 true ITFI950019A0 (it) 1995-02-01
ITFI950019A1 ITFI950019A1 (it) 1996-08-01
IT1277813B1 IT1277813B1 (it) 1997-11-12

Family

ID=11351085

Family Applications (1)

Application Number Title Priority Date Filing Date
IT95FI000019A IT1277813B1 (it) 1995-02-01 1995-02-01 Procedimento perfezionato per la co-deposizione di ossidi metallici su un film plastico, relativo impianto e prodotto ottenuto

Country Status (4)

Country Link
EP (1) EP0727505B1 (it)
JP (1) JPH08277463A (it)
DE (1) DE69600530T2 (it)
IT (1) IT1277813B1 (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1466997B1 (en) * 2003-03-10 2012-02-22 OSRAM Opto Semiconductors GmbH Method for forming and arrangement of barrier layers on a polymeric substrate
US20050253283A1 (en) * 2004-05-13 2005-11-17 Dcamp Jon B Getter deposition for vacuum packaging
TWI789930B (zh) * 2021-10-01 2023-01-11 南亞塑膠工業股份有限公司 食品包裝用的阻隔膜及其製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1156289B (de) * 1952-10-31 1963-10-24 Libbey Owens Ford Glass Co Verfahren zum Herstellen durchsichtiger und elektrisch leitender UEberzuege auf durchscheinenden Koerpern anorganischer oder organischer Art
US2907679A (en) * 1955-10-17 1959-10-06 Temescal Metallurgical Corp Corrosion- and abrasion-resistant coated metals
CA2040638A1 (en) * 1990-04-20 1991-10-21 Gedeon I. Deak Barrier materials useful for packaging
ITRM910687A1 (it) * 1991-09-13 1993-03-15 Consorzio Centro Delle Tecnolo Struttura multistrato a film sottile per trattamenti di barriera su film plastico.
DE69224808T2 (de) * 1991-12-26 1998-07-09 Toyo Boseki Gassperrfilm
EP0656430B2 (en) * 1993-11-09 2000-01-12 Galileo Vacuum Systems S.R.L. Process and apparatus for the codeposition of metallic oxides on plastic films.

Also Published As

Publication number Publication date
JPH08277463A (ja) 1996-10-22
DE69600530D1 (de) 1998-09-24
EP0727505A1 (en) 1996-08-21
EP0727505B1 (en) 1998-08-19
DE69600530T2 (de) 1999-04-15
IT1277813B1 (it) 1997-11-12
ITFI950019A1 (it) 1996-08-01

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19990225