ITFI20080184A1 - SYSTEM FOR COATING, VACUUM TREATMENT OR IN CONTROLLED ATMOSPHERE OF MATERIALS IN THE FORM OF METALLIC, NON-METALLIC AND TEXTILE FLEXIBLE RIBBONS. - Google Patents

SYSTEM FOR COATING, VACUUM TREATMENT OR IN CONTROLLED ATMOSPHERE OF MATERIALS IN THE FORM OF METALLIC, NON-METALLIC AND TEXTILE FLEXIBLE RIBBONS. Download PDF

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Publication number
ITFI20080184A1
ITFI20080184A1 IT000184A ITFI20080184A ITFI20080184A1 IT FI20080184 A1 ITFI20080184 A1 IT FI20080184A1 IT 000184 A IT000184 A IT 000184A IT FI20080184 A ITFI20080184 A IT FI20080184A IT FI20080184 A1 ITFI20080184 A1 IT FI20080184A1
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IT
Italy
Prior art keywords
metallic
chamber
chambers
treatment
controlled atmosphere
Prior art date
Application number
IT000184A
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Italian (it)
Inventor
Marco Maltagliati
Original Assignee
Marco Maltagliati
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Filing date
Publication date
Application filed by Marco Maltagliati filed Critical Marco Maltagliati
Priority to IT000184A priority Critical patent/ITFI20080184A1/en
Publication of ITFI20080184A1 publication Critical patent/ITFI20080184A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemically Coating (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Vapour Deposition (AREA)

Description

DESCRIZIONE DI INVENZIONE INDUSTRIALE DESCRIPTION OF INDUSTRIAL INVENTION

Descrizione dell'invenzione industriale dal titolo Description of the industrial invention entitled

Apparato per rivestimento trattamento sottovuoto od in atmosfera controdata di materiali sotto forma di nastri flessibili metallici, non metallici e tessili. Apparatus for vacuum or counter-atmospheric coating treatment of materials in the form of flexible metallic, non-metallic and textile tapes.

L'invenzione riguarda un apparato per: trattamenti, (inclusi rivestimenti) sottovuoto o in atmosfera controllata di materiali metallici o non metallici in forma di nastri flessibili di p?ccolo spessore; trattamenti sottovuoto od in atmosfera controllata di materiali tessili (tessuti e non-tessuti). The invention relates to an apparatus for: treatments, (including coatings) under vacuum or in a controlled atmosphere, of metallic or non-metallic materials in the form of flexible tapes of a small thickness; vacuum or controlled atmosphere treatments of textile materials (fabrics and non-fabrics).

I trattamenti previsti comprendono, in particolare : rivestimenti di piccolo spessore;trattamenti al plasma. Si noti che nel seguito con la generica voce "trattamenti" si intendono indicare vari tipi di processi inclusi i processi d? rivestimento . The treatments envisaged include, in particular: thin coatings; plasma treatments. Note that in the following the generic entry "treatments" is intended to indicate various types of processes including processes d? coating.

-Stato deila tecnica -State of the technique

L?invenzione riguarda trattamenti per i quali ? richiesta l'assenza di gas atmosferici nella zona di processo e che prevedono comunque una fase di vuotatura o per operare sottovuoto o per operare con gas di processo non inquinati dai gas atmosferici. . The invention relates to treatments for which? the absence of atmospheric gases is required in the process area and which in any case provide for an emptying phase or to operate under vacuum or to operate with process gas not polluted by atmospheric gases. .

Gli attuali apparati per il trattamento in vuoto od in atmosfera controllata che prevedono comunque la fase di vuotatura possono essere suddivisi come segueiapparati discontinui monocamera o pluricamera;apparati continui aria-aria; apparati con camere pneumaticamente separabili.. The current apparatuses for the treatment in vacuum or in controlled atmosphere that foresee in any case the emptying phase can be divided as follows: discontinuous single-chamber or multi-chamber apparatuses: continuous air-air apparatuses; equipment with pneumatically separable chambers ..

- Apparati discontinui monocamera o plurieamera - Single-chamber or multi-chamber discontinuous equipment

Sono gli apparati pi? semplici. Apparati di questo tipo sono stati sviluppati dal 1930 ed hanno trovato varie applicazioni tra le quali la produzione di condensatori elettrici il brevetto GB492681 della ditta Robert Bosch, Are the apparatuses pi? simple. Apparatuses of this type have been developed since 1930 and have found various applications including the production of electric capacitors, the patent GB492681 of the Robert Bosch company,

Apparati continui aria-aria Continuous air-to-air systems

Negli apparati precedenti la produttivit? viene limitata dai "tempi morti" soprattutto per la necessit? di Interrompere il trattamento per cambiare le bobine (o le falde) di carico e scarico. In detti apparati il cambio bobine avviene riportando l'intero apparato in aria, e, una volta sostituite le bobine, vuotandolo di nuovo, Si tratta cio? di apparati a funzionamento discontinuo In the previous apparatuses the productivity? is limited by the "dead times" above all for the necessity? Stop the treatment to change the loading and unloading coils (or flaps). In these apparatuses, the reel change takes place by bringing the whole apparatus back into the air, and, once the reels have been replaced, emptying it again. of discontinuous operating equipment

Negli ultimi decenni sono stati sviluppati invece molti apparati continui aria-aria vedi ad esempio i brevetti EP0337369, DE2747061, JP11323553, EP0388811 ai quali si rimanda . In recent decades, many air-to-air continuous apparatuses have been developed, see for example patents EP0337369, DE2747061, JP11323553, EP0388811 to which reference should be made.

Apparati pluricamera con camere pneumaticamente separabili. Multi-chamber devices with pneumatically separable chambers.

Una soluzione alternativa alle precedenti si trova nel brevetto DE1911120 (del 1969) nel quale si parla di separazione tra camera di processo e camere delle bobine. An alternative solution to the previous ones is found in the patent DE1911120 (of 1969) which speaks of separation between the process chamber and the coil chambers.

Detta separazione in un apparato multicamera ? ottenuta tramite valvole a saracinesca di tipo noto. Said separation in a multi-chamber apparatus? obtained by means of gate valves of known type.

Utilizzando detta separazione a fine di ogni ciclo il cambio bobine pu? avvenire riportando a pressione atmosferica solo le camere delle bobine e non la zona di processo, riducendo cosi i tempi morti. Using this separation at the end of each cycle, the reel change can? take place by bringing back to atmospheric pressure only the coil chambers and not the process area, thus reducing downtime.

Scopo dell?invenzione Purpose of the invention

Si premette che nei trattamenti sottovuoto o in atmosfera controllata si desidera spesso evitare la presenza durante il processo non solo del gas atmosferici ma anche di altri gas in particolare di gas provenienti dalla degassazione del materiale la cui presenza pu? rendere impossibile il trattamento stesso. L?invenzione riguarda un apparato innovativo in grado di effettuare, in maniera discontinua, trattamenti che rispettino le suddette condizioni, detto apparato ? costituito da tre sezioni scollegabili ed allontanabili fra loro senza perdere mai la condizione di ermeticit? e tenuta, in modo che in ognuna di queste sezioni sia possibile allontanare i gas atmosferici e per contro si possa operare in presenza di gas di processo oppure sottovuoto. La prima di tali sezioni ? sostanzialmente costituita da una camera (camera di carico) a tenuta che contiene una bobina del materiale da trattare, la seconda sezione ? sostanzialmente costituita da una o pi? camere a tenuta equipaggiate con dispositivi per il trattamento, mentre la terza sezione ? sostanzialmente costituita da una camera (camera di scarico) a tenuta che contiene la bobina di materiale che ? stato trattato. It should be noted that in vacuum treatments or in controlled atmosphere it is often desired to avoid the presence during the process not only of atmospheric gases but also of other gases in particular of gases coming from the degassing of the material whose presence can? make the processing itself impossible. The invention relates to an innovative apparatus capable of performing, in a discontinuous manner, treatments that comply with the aforementioned conditions, said apparatus? consisting of three sections that can be disconnected and removed from each other without ever losing the hermetic condition? and sealing, so that in each of these sections it is possible to remove atmospheric gases and on the other hand it is possible to operate in the presence of process gas or under vacuum. The first of those sections? substantially constituted by a sealed chamber (loading chamber) which contains a coil of the material to be treated, the second section? substantially constituted by one or more? sealed chambers equipped with treatment devices, while the third section? substantially constituted by a sealed chamber (discharge chamber) which contains the coil of material which? been treated.

La prima e terza sezione oltre ad essere a tenuta stagna sono ambedue munite di raccordi e valvole di tipo noto e tramite questi dispositivi possono essere vuotate anche quando sono scollegate dall'apparato, e, almeno la prima sezione pu? essere anche eventualmente riempita di gas di processo in modo da impregnare con detto gas il materiale da trattare . The first and third sections, in addition to being watertight, are both equipped with fittings and valves of a known type and by means of these devices can be emptied even when they are disconnected from the apparatus, and, at least the first section can? also possibly be filled with process gas so as to impregnate the material to be treated with said gas.

Il predetto pre-trattamento pu? essere infatti un allontanamento dei gas atmosferici (vuotatura) ma anche una immissione di gas di trattamento, favorendo cos? la degassazione e l?eventuale impregnazione del materiale con gas di trattamento. Disponendo di una pluralit? di camere equipaggiate come detto si pu? allora effettuare detto trattamento senza rallentare la produttivit? dell'apparato. The aforementioned pre-treatment can? be in fact a removal of atmospheric gases (emptying) but also an injection of treatment gas, thus favoring? degassing and possible impregnation of the material with treatment gas. Having a plurality? of rooms equipped as mentioned, you can? then carry out this treatment without slowing down the productivity? of the apparatus.

Descrizione di una forma di attuazione dell'invenzione. Description of an embodiment of the invention.

L'invenzione verr? meglio compresa seguendo la descrizione e gli uniti disegni che mostrano una possibile forma di realizzazione non limitativa dell'apparato oggetto della presente invenzione. Will the invention come? better understood by following the description and the accompanying drawings which show a possible non-limiting embodiment of the apparatus object of the present invention.

Sia nei disegni che nelle descrizioni seguenti si omettono quelle parti che hanno funzioni e forme di attuazione ormai note e consuete. Both in the drawings and in the following descriptions those parts which have functions and embodiments by now known and usual are omitted.

L'apparato ? composto da tre sezioni mostrate sia nella Fig.1 che nella Fig.2. The apparatus? composed of three sections shown in both Fig.1 and Fig.2.

La prima sezione comprende un contenitore (6) a tenuta stagna per la bobina (8) da processare provvisto di un passaggio per il materiale in uscita, dotato di un sistema di chiusura/apertura e attacco rapido (7} che permette a detta sezione di essere connessa e disconnessa tramite l'analogo dispositivo (2) alla seconda sezione (1). The first section comprises a watertight container (6) for the reel (8) to be processed, provided with a passage for the outgoing material, equipped with a closing / opening and quick coupling system (7} which allows said section to be connected and disconnected through the similar device (2) to the second section (1).

La seconda sezione (1) ? in sostanza un contenitore a tenuta stagna che contiene tutti i dispositivi necessari all'esecuzione del trattamento. The second section (1)? essentially a watertight container that contains all the devices necessary for carrying out the treatment.

Tale sezione possiede due passaggi dotati di un sistema di chiusura/apertura e attacco rapido (2 e 3) che possono essere connessi e disconnessi agli analoghi dispositivi (7 e 11) presenti rispettivamente sui contenitori {6 e 10) . This section has two passages equipped with a closing / opening and quick coupling system (2 and 3) which can be connected and disconnected to the similar devices (7 and 11) present respectively on the containers {6 and 10).

La terza sezione comprende un altro contenitore (10) simile al contenitore (6) ma contenente la bobina (12) del materiale processato, provvisto di un passaggio per il materiale in uscita e dotato del dispositivo (11) analogo al dispositivo (7) che permette a detta sezione di essere connessa al dispositivo (3) presente nella sezione (1). In Fig.2 sono mostrati i lembi (4, 5, 9 e 13) del materiale in lavorazione nella fase in cui le sezioni (1, 6 e 10) sono separate tra foro, consentendo la sostituzione delle bobine (8 e 12). The third section comprises another container (10) similar to the container (6) but containing the reel (12) of the processed material, provided with a passage for the output material and equipped with the device (11) similar to the device (7) which allows said section to be connected to the device (3) present in section (1). Fig. 2 shows the edges (4, 5, 9 and 13) of the material being processed in the phase in which the sections (1, 6 and 10) are separated between the holes, allowing the replacement of the coils (8 and 12).

La Fig.1 rappresenta dunque la situazione al momento in cui si inizia il trattamento del materiale e la Fig.2 quella al momento in cui la lavorazione ? terminata ed il materiale avvolto nella bobina (8) in entrata ? stato trasferito nella bobina (12) in uscita dopo essere transitato nella camera di processo (1). Therefore Fig.1 represents the situation at the moment in which the treatment of the material is started and Fig.2 that at the moment in which the processing? finished and the material wound in the reel (8) at the entrance? been transferred to the output coil (12) after passing through the process chamber (1).

Nella figura 2 i lembi (4, 5, 9 e 13) del materiale, sono liberi perch? tagliati, scollati, o scuciti per rendere liberi i contenitori (6 e 10) contenenti le bobine (8 e 12). In figure 2 the edges (4, 5, 9 and 13) of the material are free why? cut, unglued, or unstitched to free the containers (6 and 10) containing the reels (8 and 12).

A questo punto il contenitore (6) vuoto, sar? sostituibile con un altro carico di materiale da trattare, che sar? ricollegato alla camera di processo (1) dal lato del dispositivo (2) dopo aver unito fra loro i lembi (4) e (9) del materiale, mentre il contenitore (10) in uscita sar? sostituito con uno vuoto, ma contenente una coda (13) di materiale da ricongiungere al lembo (5) uscente dalla camera di processo (1). At this point the container (6) empty, will be? replaceable with another load of material to be treated, which will be? reconnected to the process chamber (1) from the side of the device (2) after joining together the edges (4) and (9) of the material, while the container (10) at the outlet will be? replaced with an empty one, but containing a tail (13) of material to be rejoined with the flap (5) coming out of the process chamber (1).

Risulta evidente che i contenitori in sostituzione possono essere preparati fuori linea, con tutto il tempo necessario per effettuare il vuoto al loro interno ed eventualmente sostituire l'aria estratta con il gas di processo particolarmente nel caso del contenitore (6) che contiene il materiale da trattare. It is evident that the containers to be replaced can be prepared off-line, with all the time necessary to carry out the vacuum inside them and possibly replace the extracted air with the process gas, particularly in the case of the container (6) which contains the material to be to deal.

Il gas di processo rimasto a fine ciclo nei due contenitori pu?, se necessario essere recuperato o smaltito senza venire in contatto dell'atmosfera, aspetto questo interessante dal punto di vista ecologico per determinati trattamenti. The process gas remaining at the end of the cycle in the two containers can, if necessary, be recovered or disposed of without coming into contact with the atmosphere, an aspect that is interesting from an ecological point of view for certain treatments.

Claims (5)

RIVENDICAZIONI Le part? essenziali dei brevetto d'invenzione depositato il 29/09/2008 sono le seguenti: 1) Apparato pluricamere per trattamenti e/o rivestimenti, sottovuoto od in atmosfera controllata, di materiali flessibili metallici, non metallici e tessili, in forma di nastri avvolti in bobina o disposti in falde, contenente oltre alla camera o zona di trattamento/processo almeno una camera contenente la bobina carica del materiale da processare ed una camera contenente la bobina col materiale processato, caratterizzato dal fatto che dette camere contenenti le bobine sono distaccabili ed asportabili dall'apparato pluricamere stesso. CLAIMS The part? essentials of the invention patent filed on 29/09/2008 are the following: 1) Multi-chamber apparatus for treatments and / or coatings, vacuum-packed or in a controlled atmosphere, of flexible metallic, non-metallic and textile materials, in the form of tapes wound on reels or arranged in flaps, containing in addition to the treatment / process chamber or area at least a chamber containing the reel loaded with the material to be processed and a chamber containing the reel with the processed material, characterized in that said chambers containing the reels are detachable and removable from the multi-chamber apparatus itself. 2) Apparato come descritto nella rivendicazione precedente, caratterizzato dal fatto che dette camere asportabili sono a tenuta stagna. 2) Apparatus as described in the preceding claim, characterized in that said removable chambers are watertight. 3) Apparato, come descritto in una o pi? delle rivendicazioni precedenti, caratterizzato dal fatto che dette camere asportabili sono munite di dispositivi noti tramite i quali possono essere svuotate dall'aria e, successivamente, eventualmente riempite con gas di trattamento anche quando non sono connesse alla camera o zona di trattamento stessa. 3) Apparatus, as described in one or more? of the preceding claims, characterized in that said removable chambers are equipped with known devices by means of which they can be emptied of air and, subsequently, possibly filled with treatment gas even when they are not connected to the treatment chamber or zone itself. 4) Apparato, come descritto in una o pi? delle rivendicazioni precedenti, caratterizzato dal fatto che utilizzando dispositivi noti durante la separazione o la connessione delle camere tra loro, viene impedito il contatto del materiale con l'aria atmosferica. 4) Apparatus, as described in one or more? of the preceding claims, characterized in that by using known devices during the separation or connection of the chambers between them, contact of the material with atmospheric air is prevented. 5) Apparato, come descritto in una o pi? delle rivendicazioni precedenti, caratterizzato dal fatto che, utilizzando dispositivi noti, durante la separazione o la connessione delle camere viene impedito l?ingresso di aria atmosferica nella zona di trattamento 5) Apparatus, as described in one or more? of the preceding claims, characterized by the fact that, using known devices, during the separation or connection of the chambers the entry of atmospheric air into the treatment area is prevented
IT000184A 2008-09-29 2008-09-29 SYSTEM FOR COATING, VACUUM TREATMENT OR IN CONTROLLED ATMOSPHERE OF MATERIALS IN THE FORM OF METALLIC, NON-METALLIC AND TEXTILE FLEXIBLE RIBBONS. ITFI20080184A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT000184A ITFI20080184A1 (en) 2008-09-29 2008-09-29 SYSTEM FOR COATING, VACUUM TREATMENT OR IN CONTROLLED ATMOSPHERE OF MATERIALS IN THE FORM OF METALLIC, NON-METALLIC AND TEXTILE FLEXIBLE RIBBONS.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000184A ITFI20080184A1 (en) 2008-09-29 2008-09-29 SYSTEM FOR COATING, VACUUM TREATMENT OR IN CONTROLLED ATMOSPHERE OF MATERIALS IN THE FORM OF METALLIC, NON-METALLIC AND TEXTILE FLEXIBLE RIBBONS.

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ITFI20080184A1 true ITFI20080184A1 (en) 2010-03-29

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5522955A (en) * 1994-07-07 1996-06-04 Brodd; Ralph J. Process and apparatus for producing thin lithium coatings on electrically conductive foil for use in solid state rechargeable electrochemical cells
WO2004032189A2 (en) * 2002-09-30 2004-04-15 Miasolé Manufacturing apparatus and method for large-scale production of thin-film solar cells
US20070148329A1 (en) * 2005-12-28 2007-06-28 Superpower, Inc. Method of making a superconducting conductor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5522955A (en) * 1994-07-07 1996-06-04 Brodd; Ralph J. Process and apparatus for producing thin lithium coatings on electrically conductive foil for use in solid state rechargeable electrochemical cells
WO2004032189A2 (en) * 2002-09-30 2004-04-15 Miasolé Manufacturing apparatus and method for large-scale production of thin-film solar cells
US20070148329A1 (en) * 2005-12-28 2007-06-28 Superpower, Inc. Method of making a superconducting conductor

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