IT988681B - Sistema di controllo per dispo sitivi emettitori di elettroni - Google Patents

Sistema di controllo per dispo sitivi emettitori di elettroni

Info

Publication number
IT988681B
IT988681B IT2457673A IT2457673A IT988681B IT 988681 B IT988681 B IT 988681B IT 2457673 A IT2457673 A IT 2457673A IT 2457673 A IT2457673 A IT 2457673A IT 988681 B IT988681 B IT 988681B
Authority
IT
Italy
Prior art keywords
emittering
electron
devices
control system
control
Prior art date
Application number
IT2457673A
Other languages
English (en)
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT988681B publication Critical patent/IT988681B/it

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current 
    • G05F1/46—Regulating voltage or current  wherein the variable actually regulated by the final control device is DC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Electron Beam Exposure (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Electron Sources, Ion Sources (AREA)
IT2457673A 1972-07-03 1973-05-25 Sistema di controllo per dispo sitivi emettitori di elettroni IT988681B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26828472A 1972-07-03 1972-07-03

Publications (1)

Publication Number Publication Date
IT988681B true IT988681B (it) 1975-04-30

Family

ID=23022270

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2457673A IT988681B (it) 1972-07-03 1973-05-25 Sistema di controllo per dispo sitivi emettitori di elettroni

Country Status (5)

Country Link
JP (1) JPS4959526A (enrdf_load_stackoverflow)
CA (1) CA982234A (enrdf_load_stackoverflow)
DE (1) DE2332604A1 (enrdf_load_stackoverflow)
FR (1) FR2191258B1 (enrdf_load_stackoverflow)
IT (1) IT988681B (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0077417B1 (de) * 1981-10-21 1987-01-07 DR.-ING. RUDOLF HELL GmbH Hochkonstanter Strahlerzeuger für geladene Teilchen
US7538477B2 (en) * 2006-11-27 2009-05-26 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Multi-layer transducers with annular contacts
US10129656B2 (en) 2009-01-30 2018-11-13 Avago Technologies International Sales Pte. Limited Active temperature control of piezoelectric membrane-based micro-electromechanical devices

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221138C (enrdf_load_stackoverflow) * 1971-04-30

Also Published As

Publication number Publication date
FR2191258A1 (enrdf_load_stackoverflow) 1974-02-01
CA982234A (en) 1976-01-20
DE2332604A1 (de) 1974-01-24
JPS4959526A (enrdf_load_stackoverflow) 1974-06-10
FR2191258B1 (enrdf_load_stackoverflow) 1976-05-28

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