IT979178B - RESISTOR FOR INTEGRATED CIRCUIT DEVICES - Google Patents

RESISTOR FOR INTEGRATED CIRCUIT DEVICES

Info

Publication number
IT979178B
IT979178B IT7320473A IT2047373A IT979178B IT 979178 B IT979178 B IT 979178B IT 7320473 A IT7320473 A IT 7320473A IT 2047373 A IT2047373 A IT 2047373A IT 979178 B IT979178 B IT 979178B
Authority
IT
Italy
Prior art keywords
resistor
integrated circuit
circuit devices
devices
integrated
Prior art date
Application number
IT7320473A
Other languages
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT979178B publication Critical patent/IT979178B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H01L21/76205—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO in a region being recessed from the surface, e.g. in a recess, groove, tub or trench region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H01L21/743—Making of internal connections, substrate contacts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/40—Resistors
    • H10D1/43—Resistors having PN junctions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Element Separation (AREA)
IT7320473A 1972-05-11 1973-02-16 RESISTOR FOR INTEGRATED CIRCUIT DEVICES IT979178B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25244572A 1972-05-11 1972-05-11

Publications (1)

Publication Number Publication Date
IT979178B true IT979178B (en) 1974-09-30

Family

ID=22956030

Family Applications (1)

Application Number Title Priority Date Filing Date
IT7320473A IT979178B (en) 1972-05-11 1973-02-16 RESISTOR FOR INTEGRATED CIRCUIT DEVICES

Country Status (5)

Country Link
JP (1) JPS5317394B2 (en)
CA (1) CA985793A (en)
DE (1) DE2314747A1 (en)
FR (1) FR2183709A1 (en)
IT (1) IT979178B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112779A (en) * 1974-07-23 1976-01-31 Tokyo Shibaura Electric Co Handotaisochito sonoseizohoho
JPS52146578A (en) * 1976-05-28 1977-12-06 Texas Instruments Inc Method of producing resistance element and semiconductor device having same element
JPS54136279A (en) * 1978-04-14 1979-10-23 Nec Corp Semiconductor device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3404321A (en) * 1963-01-29 1968-10-01 Nippon Electric Co Transistor body enclosing a submerged integrated resistor
FR1547292A (en) * 1966-12-19 1968-11-22 Gen Electric Semiconductor device enhancements
NL170902C (en) * 1970-07-10 1983-01-03 Philips Nv SEMICONDUCTOR DEVICE, IN PARTICULAR MONOLITHICALLY INTEGRATED SEMICONDUCTOR CIRCUIT.
US3648125A (en) * 1971-02-02 1972-03-07 Fairchild Camera Instr Co Method of fabricating integrated circuits with oxidized isolation and the resulting structure

Also Published As

Publication number Publication date
DE2314747A1 (en) 1973-11-22
FR2183709B1 (en) 1976-05-28
CA985793A (en) 1976-03-16
JPS5317394B2 (en) 1978-06-08
FR2183709A1 (en) 1973-12-21
JPS4924373A (en) 1974-03-04

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