IT948817B - Procedimento per la diffusione di un impurezza in un corpo semicon duttore - Google Patents
Procedimento per la diffusione di un impurezza in un corpo semicon duttoreInfo
- Publication number
- IT948817B IT948817B IT67054/72A IT6705472A IT948817B IT 948817 B IT948817 B IT 948817B IT 67054/72 A IT67054/72 A IT 67054/72A IT 6705472 A IT6705472 A IT 6705472A IT 948817 B IT948817 B IT 948817B
- Authority
- IT
- Italy
- Prior art keywords
- impurity
- diffusion
- procedure
- semicon ductor
- ductor body
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S252/00—Compositions
- Y10S252/95—Doping agent source material
- Y10S252/951—Doping agent source material for vapor transport
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB119371 | 1971-01-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
IT948817B true IT948817B (it) | 1973-06-11 |
Family
ID=9717791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT67054/72A IT948817B (it) | 1971-01-11 | 1972-01-08 | Procedimento per la diffusione di un impurezza in un corpo semicon duttore |
Country Status (5)
Country | Link |
---|---|
US (1) | US3755017A (it) |
DE (1) | DE2200623A1 (it) |
FR (1) | FR2121734B1 (it) |
GB (1) | GB1332994A (it) |
IT (1) | IT948817B (it) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49108969A (it) * | 1973-02-07 | 1974-10-16 | ||
JPS49114355A (it) * | 1973-02-28 | 1974-10-31 | ||
US4129090A (en) * | 1973-02-28 | 1978-12-12 | Hitachi, Ltd. | Apparatus for diffusion into semiconductor wafers |
JPS5325634B2 (it) * | 1973-04-04 | 1978-07-27 | ||
CA1244969A (en) * | 1986-10-29 | 1988-11-15 | Mitel Corporation | Method for diffusing p-type material using boron disks |
JPH0793277B2 (ja) * | 1989-02-28 | 1995-10-09 | インダストリアル・テクノロジー・リサーチ・インステイテユート | InP基板中へのCd拡散方法 |
US5033035A (en) * | 1989-09-27 | 1991-07-16 | Mondaine Watch Ltd. | Watertight watch |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL274819A (it) * | 1961-02-20 | 1900-01-01 | ||
US3215571A (en) * | 1962-10-01 | 1965-11-02 | Bell Telephone Labor Inc | Fabrication of semiconductor bodies |
US3649388A (en) * | 1968-11-04 | 1972-03-14 | Ibm | Method for making a semiconductor device having a shallow flat front diffusion layer |
US3615944A (en) * | 1968-12-13 | 1971-10-26 | Corning Glass Works | Method for the continuous doping of semiconductor materials |
JPS4915903B1 (it) * | 1969-08-18 | 1974-04-18 |
-
1971
- 1971-01-11 GB GB119371A patent/GB1332994A/en not_active Expired
-
1972
- 1972-01-07 DE DE19722200623 patent/DE2200623A1/de active Pending
- 1972-01-08 IT IT67054/72A patent/IT948817B/it active
- 1972-01-10 US US00216430A patent/US3755017A/en not_active Expired - Lifetime
- 1972-01-11 FR FR7200756A patent/FR2121734B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2121734B1 (it) | 1976-07-23 |
DE2200623A1 (de) | 1972-07-27 |
US3755017A (en) | 1973-08-28 |
FR2121734A1 (it) | 1972-08-25 |
GB1332994A (en) | 1973-10-10 |
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