IT8148391A0 - Soluzione di sviluppo per pellicole fotosensibili contenenti uno strato di photoresist su un substrato rivestito con alluminio e procedimento di impiego - Google Patents
Soluzione di sviluppo per pellicole fotosensibili contenenti uno strato di photoresist su un substrato rivestito con alluminio e procedimento di impiegoInfo
- Publication number
- IT8148391A0 IT8148391A0 IT8148391A IT4839181A IT8148391A0 IT 8148391 A0 IT8148391 A0 IT 8148391A0 IT 8148391 A IT8148391 A IT 8148391A IT 4839181 A IT4839181 A IT 4839181A IT 8148391 A0 IT8148391 A0 IT 8148391A0
- Authority
- IT
- Italy
- Prior art keywords
- photoresist
- aluminum
- procedure
- layer
- film containing
- Prior art date
Links
- 229920002120 photoresistant polymer Polymers 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/322—Aqueous alkaline compositions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/146,642 US4314022A (en) | 1980-05-05 | 1980-05-05 | Photoresist developers and process |
Publications (1)
Publication Number | Publication Date |
---|---|
IT8148391A0 true IT8148391A0 (it) | 1981-05-04 |
Family
ID=22518305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8148391A IT8148391A0 (it) | 1980-05-05 | 1981-05-04 | Soluzione di sviluppo per pellicole fotosensibili contenenti uno strato di photoresist su un substrato rivestito con alluminio e procedimento di impiego |
Country Status (8)
Country | Link |
---|---|
US (1) | US4314022A (it) |
EP (1) | EP0051627A4 (it) |
JP (1) | JPS57500530A (it) |
BE (1) | BE888666A (it) |
BR (1) | BR8108583A (it) |
CA (1) | CA1166507A (it) |
IT (1) | IT8148391A0 (it) |
WO (1) | WO1981003231A1 (it) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4330614A (en) * | 1980-10-14 | 1982-05-18 | International Business Machines Corporation | Process for forming a patterned resist mask |
US4366224A (en) * | 1981-08-06 | 1982-12-28 | American Hoechst Corporation | Inorganic lithium developer composition |
JPS58190952A (ja) * | 1982-04-30 | 1983-11-08 | Fuji Photo Film Co Ltd | 感光性印刷版の現像液 |
US4436807A (en) | 1982-07-15 | 1984-03-13 | American Hoechst Corporation | Developer composition with sodium, lithium and/or potassium salts for developing negative working imaged photographic material |
JPS59121336A (ja) * | 1982-12-28 | 1984-07-13 | Fuji Photo Film Co Ltd | 感光性平版印刷版の現像液 |
US4708920A (en) * | 1985-09-16 | 1987-11-24 | Minnesota Mining And Manufacturing Company | Microlens sheet containing directional half-tone images and method for making the same |
US4758368A (en) * | 1986-07-21 | 1988-07-19 | Motorola Inc. | Method for etching silicon wafers using a potassium hydroxide and water etching solution |
DE69430960T2 (de) * | 1993-04-28 | 2003-02-20 | Toray Industries | Entwickler für positiv arbeitenden Elektronenstrahlresist |
US5445911A (en) * | 1993-07-28 | 1995-08-29 | Hewlett-Packard Company | Chelating positive charge director for liquid electrographic toner |
US5589311A (en) * | 1994-11-28 | 1996-12-31 | Hewlett-Packard Company | Cage complexes for charge direction in liquid toners |
DE69527494T2 (de) * | 1994-12-06 | 2002-11-07 | Fuji Photo Film Co Ltd | Entwickler für ein lichtempfindliches lithographisches Druckmaterial |
US5952050A (en) | 1996-02-27 | 1999-09-14 | Micron Technology, Inc. | Chemical dispensing system for semiconductor wafer processing |
US20120129093A1 (en) * | 2010-11-18 | 2012-05-24 | Moshe Levanon | Silicate-free developer compositions |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1572153B2 (de) * | 1966-06-27 | 1971-07-22 | E I Du Pont de Nemours and Co , Wilmington, Del (V St A ) | Fotopolymerisierbares aufzeichnungsmaterial |
US3615480A (en) * | 1969-02-24 | 1971-10-26 | Du Pont | Developer solutions for photopolymerized layers |
US4193797A (en) * | 1971-03-22 | 1980-03-18 | E. I. Dupont De Nemours And Company | Method for making photoresists |
US3957553A (en) * | 1972-08-09 | 1976-05-18 | Pennwalt Corporation | Non-chromated alkaline etching bath and etching process for aluminum |
JPS5821257B2 (ja) * | 1974-04-25 | 1983-04-28 | 富士写真フイルム株式会社 | キンゾクガゾウケイセイザイリヨウ |
US3980587A (en) * | 1974-08-16 | 1976-09-14 | G. T. Schjeldahl Company | Stripper composition |
US3957583A (en) * | 1974-12-02 | 1976-05-18 | Mcdonnell Douglas Corporation | Apparatus and process for determining the susceptibility of microorganisms to antibiotics |
US4028205A (en) * | 1975-09-29 | 1977-06-07 | Kaiser Aluminum & Chemical Corporation | Surface treatment of aluminum |
JPS5299103A (en) * | 1976-02-16 | 1977-08-19 | Fuji Photo Film Co Ltd | Method of reducing strength of dot image |
US4078102A (en) * | 1976-10-29 | 1978-03-07 | International Business Machines Corporation | Process for stripping resist layers from substrates |
DE2846256A1 (de) * | 1977-10-24 | 1979-04-26 | Fuji Photo Film Co Ltd | Verfahren zur entwicklung positiv wirkender lichtempfindlicher planographischer druckplatten |
DE3201241A1 (de) * | 1982-01-16 | 1983-07-28 | Continental Gummi-Werke Ag, 3000 Hannover | Laufstreifenerneuerter guertelreifen |
-
1980
- 1980-05-05 US US06/146,642 patent/US4314022A/en not_active Expired - Lifetime
-
1981
- 1981-04-01 BR BR8108583A patent/BR8108583A/pt unknown
- 1981-04-01 WO PCT/US1981/000447 patent/WO1981003231A1/en not_active Application Discontinuation
- 1981-04-01 JP JP56501703A patent/JPS57500530A/ja active Pending
- 1981-04-01 EP EP19810901229 patent/EP0051627A4/en not_active Withdrawn
- 1981-04-03 CA CA000374669A patent/CA1166507A/en not_active Expired
- 1981-05-04 BE BE0/204680A patent/BE888666A/fr not_active IP Right Cessation
- 1981-05-04 IT IT8148391A patent/IT8148391A0/it unknown
Also Published As
Publication number | Publication date |
---|---|
US4314022A (en) | 1982-02-02 |
WO1981003231A1 (en) | 1981-11-12 |
EP0051627A4 (en) | 1983-02-04 |
EP0051627A1 (en) | 1982-05-19 |
BE888666A (fr) | 1981-11-04 |
CA1166507A (en) | 1984-05-01 |
BR8108583A (pt) | 1982-04-06 |
JPS57500530A (it) | 1982-03-25 |
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