IT8124331A0 - Metodo per creare una struttura a metallizzazione dielettrico. - Google Patents

Metodo per creare una struttura a metallizzazione dielettrico.

Info

Publication number
IT8124331A0
IT8124331A0 IT8124331A IT2433181A IT8124331A0 IT 8124331 A0 IT8124331 A0 IT 8124331A0 IT 8124331 A IT8124331 A IT 8124331A IT 2433181 A IT2433181 A IT 2433181A IT 8124331 A0 IT8124331 A0 IT 8124331A0
Authority
IT
Italy
Prior art keywords
creating
metallization structure
dielectric metallization
dielectric
metallization
Prior art date
Application number
IT8124331A
Other languages
English (en)
Other versions
IT1153991B (it
Inventor
Robert Nicholas Epifano
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Publication of IT8124331A0 publication Critical patent/IT8124331A0/it
Application granted granted Critical
Publication of IT1153991B publication Critical patent/IT1153991B/it

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
    • H10P14/412—Deposition of metallic or metal-silicide materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6342—Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
IT24331/81A 1980-10-29 1981-10-05 Metodo per creare una struttura a metallizzazione dielettrico IT1153991B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20176780A 1980-10-29 1980-10-29

Publications (2)

Publication Number Publication Date
IT8124331A0 true IT8124331A0 (it) 1981-10-05
IT1153991B IT1153991B (it) 1987-01-21

Family

ID=22747208

Family Applications (1)

Application Number Title Priority Date Filing Date
IT24331/81A IT1153991B (it) 1980-10-29 1981-10-05 Metodo per creare una struttura a metallizzazione dielettrico

Country Status (4)

Country Link
JP (1) JPS57102023A (it)
DE (1) DE3141680A1 (it)
IT (1) IT1153991B (it)
SE (1) SE8105918L (it)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925246A (ja) * 1982-08-02 1984-02-09 Nec Corp 半導体装置の製造方法
DE3231457A1 (de) * 1982-08-24 1984-03-01 Siemens AG, 1000 Berlin und 8000 München Verfahren zum erzeugen von strukturen fuer integrierte halbleiterschaltungen durch reaktives ionenaetzen
DE3234907A1 (de) * 1982-09-21 1984-03-22 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen einer monolithisch integrierten schaltung
JPS5955037A (ja) * 1982-09-24 1984-03-29 Hitachi Ltd 半導体装置
DE3328339A1 (de) * 1983-08-05 1985-02-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur metallisierung einer kunststoffoberflaeche
DE3429082A1 (de) * 1984-08-07 1986-02-27 Siemens AG, 1000 Berlin und 8000 München Steuerscheibe fuer gasentladungsanzeige
JPH0789551B2 (ja) * 1986-02-13 1995-09-27 日本電気株式会社 半導体装置
DE3615519A1 (de) * 1986-05-07 1987-11-12 Siemens Ag Verfahren zum erzeugen von kontaktloechern mit abgeschraegten flanken in zwischenoxidschichten
EP0540261B1 (en) * 1991-10-31 1997-05-28 STMicroelectronics, Inc. Process of removing polymers in semiconductor vias
DE4311807C2 (de) * 1993-04-03 1998-03-19 Atotech Deutschland Gmbh Verfahren zur Beschichtung von Metallen und Anwendung des Verfahrens in der Leiterplattentechnik
US5597983A (en) * 1994-02-03 1997-01-28 Sgs-Thomson Microelectronics, Inc. Process of removing polymers in semiconductor vias
US20040209190A1 (en) * 2000-12-22 2004-10-21 Yoshiaki Mori Pattern forming method and apparatus used for semiconductor device, electric circuit, display module, and light emitting device

Also Published As

Publication number Publication date
IT1153991B (it) 1987-01-21
JPS57102023A (en) 1982-06-24
DE3141680A1 (de) 1982-06-16
SE8105918L (sv) 1982-04-30

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