IT1399664B1 - Assieme portacampioni e stub di un microscopio, in particolare un microscopio a scansione elettronica - Google Patents

Assieme portacampioni e stub di un microscopio, in particolare un microscopio a scansione elettronica

Info

Publication number
IT1399664B1
IT1399664B1 ITRM2010A000143A ITRM20100143A IT1399664B1 IT 1399664 B1 IT1399664 B1 IT 1399664B1 IT RM2010A000143 A ITRM2010A000143 A IT RM2010A000143A IT RM20100143 A ITRM20100143 A IT RM20100143A IT 1399664 B1 IT1399664 B1 IT 1399664B1
Authority
IT
Italy
Prior art keywords
stamp
microscope
assembly
electronic scanning
holders
Prior art date
Application number
ITRM2010A000143A
Other languages
English (en)
Inventor
Federica Paglietti
Original Assignee
Paglietti
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Paglietti filed Critical Paglietti
Priority to ITRM2010A000143A priority Critical patent/IT1399664B1/it
Publication of ITRM20100143A1 publication Critical patent/ITRM20100143A1/it
Application granted granted Critical
Publication of IT1399664B1 publication Critical patent/IT1399664B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/201—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20292—Means for position and/or orientation registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
ITRM2010A000143A 2010-03-30 2010-03-30 Assieme portacampioni e stub di un microscopio, in particolare un microscopio a scansione elettronica IT1399664B1 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ITRM2010A000143A IT1399664B1 (it) 2010-03-30 2010-03-30 Assieme portacampioni e stub di un microscopio, in particolare un microscopio a scansione elettronica

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITRM2010A000143A IT1399664B1 (it) 2010-03-30 2010-03-30 Assieme portacampioni e stub di un microscopio, in particolare un microscopio a scansione elettronica

Publications (2)

Publication Number Publication Date
ITRM20100143A1 ITRM20100143A1 (it) 2011-10-01
IT1399664B1 true IT1399664B1 (it) 2013-04-26

Family

ID=42692516

Family Applications (1)

Application Number Title Priority Date Filing Date
ITRM2010A000143A IT1399664B1 (it) 2010-03-30 2010-03-30 Assieme portacampioni e stub di un microscopio, in particolare un microscopio a scansione elettronica

Country Status (1)

Country Link
IT (1) IT1399664B1 (it)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4745297A (en) * 1987-02-17 1988-05-17 Hoechst Celanese Corporation Specimen holder for holding specimen stubs to be coated in an ion-beam sputter coating unit
SE457836B (sv) * 1987-08-21 1989-01-30 Jan Andersson Elektriskt ledande elektrod foer analys av multipla prover i ett svepelektronmikroskop
EP2041543B1 (en) * 2006-05-22 2012-12-19 Microscopy Innovations, LLC Device and methods for preparing microscopy samples

Also Published As

Publication number Publication date
ITRM20100143A1 (it) 2011-10-01

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