IT1318481B1 - Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy - Google Patents

Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy

Info

Publication number
IT1318481B1
IT1318481B1 IT2000MI000892A ITMI20000892A IT1318481B1 IT 1318481 B1 IT1318481 B1 IT 1318481B1 IT 2000MI000892 A IT2000MI000892 A IT 2000MI000892A IT MI20000892 A ITMI20000892 A IT MI20000892A IT 1318481 B1 IT1318481 B1 IT 1318481B1
Authority
IT
Italy
Prior art keywords
compound
organometallic
purification
useful
comprises contacting
Prior art date
Application number
IT2000MI000892A
Other languages
Italian (it)
Inventor
Giorgio Vergani
Marco Succi
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Publication of ITMI20000892A0 publication Critical patent/ITMI20000892A0/en
Priority to IT2000MI000892A priority Critical patent/IT1318481B1/en
Priority to TW090108461A priority patent/TW550307B/en
Priority to CN01808355A priority patent/CN1425078A/en
Priority to CN018082920A priority patent/CN1218065C/en
Priority to PCT/IT2001/000185 priority patent/WO2001079587A1/en
Priority to AU52549/01A priority patent/AU5254901A/en
Priority to EP01925877A priority patent/EP1274879A1/en
Priority to JP2001576967A priority patent/JP2003531151A/en
Priority to KR1020027014012A priority patent/KR20030001435A/en
Priority to CA002404195A priority patent/CA2404195A1/en
Priority to MYPI20011828A priority patent/MY127172A/en
Publication of ITMI20000892A1 publication Critical patent/ITMI20000892A1/en
Priority to US10/273,862 priority patent/US6797182B2/en
Application granted granted Critical
Publication of IT1318481B1 publication Critical patent/IT1318481B1/en

Links

Abstract

Organometallic or heteroatomic organic compounds are purified from e.g. oxygen and water by contacting with a hydrogenated getter alloy.
IT2000MI000892A 2000-04-19 2000-04-20 Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy IT1318481B1 (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
IT2000MI000892A IT1318481B1 (en) 2000-04-20 2000-04-20 Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy
TW090108461A TW550307B (en) 2000-04-19 2001-04-09 A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
EP01925877A EP1274879A1 (en) 2000-04-19 2001-04-13 A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
CN018082920A CN1218065C (en) 2000-04-19 2001-04-13 Process for purification of organometallic compounds or heteroatomic getter alloys
PCT/IT2001/000185 WO2001079587A1 (en) 2000-04-19 2001-04-13 A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
AU52549/01A AU5254901A (en) 2000-04-19 2001-04-13 A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
CN01808355A CN1425078A (en) 2000-04-19 2001-04-13 Process for purification of organometallic compounds or heteroato mic organic compounds with a catalyst based on iron and manganese supported on zeolites
JP2001576967A JP2003531151A (en) 2000-04-19 2001-04-13 Method for purifying organometallic compounds or heteroatom compounds with hydrogenated getter alloys
KR1020027014012A KR20030001435A (en) 2000-04-19 2001-04-13 A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
CA002404195A CA2404195A1 (en) 2000-04-19 2001-04-13 A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
MYPI20011828A MY127172A (en) 2000-04-19 2001-04-17 A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
US10/273,862 US6797182B2 (en) 2000-04-19 2002-10-18 Process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2000MI000892A IT1318481B1 (en) 2000-04-20 2000-04-20 Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy

Publications (3)

Publication Number Publication Date
ITMI20000892A0 ITMI20000892A0 (en) 2000-04-20
ITMI20000892A1 ITMI20000892A1 (en) 2001-10-20
IT1318481B1 true IT1318481B1 (en) 2003-08-25

Family

ID=11444905

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2000MI000892A IT1318481B1 (en) 2000-04-19 2000-04-20 Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy

Country Status (1)

Country Link
IT (1) IT1318481B1 (en)

Also Published As

Publication number Publication date
ITMI20000892A0 (en) 2000-04-20
ITMI20000892A1 (en) 2001-10-20

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