IT1318480B1 - Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support - Google Patents

Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support

Info

Publication number
IT1318480B1
IT1318480B1 IT2000MI000891A ITMI20000891A IT1318480B1 IT 1318480 B1 IT1318480 B1 IT 1318480B1 IT 2000MI000891 A IT2000MI000891 A IT 2000MI000891A IT MI20000891 A ITMI20000891 A IT MI20000891A IT 1318480 B1 IT1318480 B1 IT 1318480B1
Authority
IT
Italy
Prior art keywords
compounds
organometallic
purification
porous support
involves contacting
Prior art date
Application number
IT2000MI000891A
Other languages
Italian (it)
Inventor
Giorgio Vergani
Marco Succi
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Priority to IT2000MI000891A priority Critical patent/IT1318480B1/en
Publication of ITMI20000891A0 publication Critical patent/ITMI20000891A0/en
Priority to AU52550/01A priority patent/AU5255001A/en
Priority to PCT/IT2001/000186 priority patent/WO2001078869A1/en
Publication of ITMI20000891A1 publication Critical patent/ITMI20000891A1/en
Application granted granted Critical
Publication of IT1318480B1 publication Critical patent/IT1318480B1/en

Links

Abstract

Purification of organometallic compounds or heteroatomic organic compounds from oxygen, water and from compounds derived from the reaction of water and oxygen involves contacting the organometallic or heteroatomic compound with a catalyst formed of metal palladium deposited on a porous support.
IT2000MI000891A 2000-04-19 2000-04-20 Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support IT1318480B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT2000MI000891A IT1318480B1 (en) 2000-04-20 2000-04-20 Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support
AU52550/01A AU5255001A (en) 2000-04-19 2001-04-13 A process for the purification of organometallic compounds or heteroatomic organic compounds with a palladium-based catalyst
PCT/IT2001/000186 WO2001078869A1 (en) 2000-04-19 2001-04-13 A process for the purification of organometallic compounds or heteroatomic organic compounds with a palladium-based catalyst

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2000MI000891A IT1318480B1 (en) 2000-04-20 2000-04-20 Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support

Publications (3)

Publication Number Publication Date
ITMI20000891A0 ITMI20000891A0 (en) 2000-04-20
ITMI20000891A1 ITMI20000891A1 (en) 2001-10-20
IT1318480B1 true IT1318480B1 (en) 2003-08-25

Family

ID=11444904

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2000MI000891A IT1318480B1 (en) 2000-04-19 2000-04-20 Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support

Country Status (1)

Country Link
IT (1) IT1318480B1 (en)

Also Published As

Publication number Publication date
ITMI20000891A1 (en) 2001-10-20
ITMI20000891A0 (en) 2000-04-20

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