IT1318480B1 - Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support - Google Patents
Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous supportInfo
- Publication number
- IT1318480B1 IT1318480B1 IT2000MI000891A ITMI20000891A IT1318480B1 IT 1318480 B1 IT1318480 B1 IT 1318480B1 IT 2000MI000891 A IT2000MI000891 A IT 2000MI000891A IT MI20000891 A ITMI20000891 A IT MI20000891A IT 1318480 B1 IT1318480 B1 IT 1318480B1
- Authority
- IT
- Italy
- Prior art keywords
- compounds
- organometallic
- purification
- porous support
- involves contacting
- Prior art date
Links
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 title abstract 4
- 150000001875 compounds Chemical class 0.000 title abstract 4
- 239000003054 catalyst Substances 0.000 title abstract 2
- 229910052751 metal Inorganic materials 0.000 title abstract 2
- 239000002184 metal Substances 0.000 title abstract 2
- 125000002524 organometallic group Chemical group 0.000 title abstract 2
- 229910052763 palladium Inorganic materials 0.000 title abstract 2
- 238000000746 purification Methods 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- 150000002894 organic compounds Chemical class 0.000 abstract 1
- 150000002902 organometallic compounds Chemical class 0.000 abstract 1
Abstract
Purification of organometallic compounds or heteroatomic organic compounds from oxygen, water and from compounds derived from the reaction of water and oxygen involves contacting the organometallic or heteroatomic compound with a catalyst formed of metal palladium deposited on a porous support.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT2000MI000891A IT1318480B1 (en) | 2000-04-20 | 2000-04-20 | Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support |
AU52550/01A AU5255001A (en) | 2000-04-19 | 2001-04-13 | A process for the purification of organometallic compounds or heteroatomic organic compounds with a palladium-based catalyst |
PCT/IT2001/000186 WO2001078869A1 (en) | 2000-04-19 | 2001-04-13 | A process for the purification of organometallic compounds or heteroatomic organic compounds with a palladium-based catalyst |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT2000MI000891A IT1318480B1 (en) | 2000-04-20 | 2000-04-20 | Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI20000891A0 ITMI20000891A0 (en) | 2000-04-20 |
ITMI20000891A1 ITMI20000891A1 (en) | 2001-10-20 |
IT1318480B1 true IT1318480B1 (en) | 2003-08-25 |
Family
ID=11444904
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT2000MI000891A IT1318480B1 (en) | 2000-04-19 | 2000-04-20 | Purification of organometallic or heteroatomic compounds useful in semiconductor manufacture involves contacting the compounds with a catalyst formed of metal palladium deposited on a porous support |
Country Status (1)
Country | Link |
---|---|
IT (1) | IT1318480B1 (en) |
-
2000
- 2000-04-20 IT IT2000MI000891A patent/IT1318480B1/en active
Also Published As
Publication number | Publication date |
---|---|
ITMI20000891A1 (en) | 2001-10-20 |
ITMI20000891A0 (en) | 2000-04-20 |
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