IT1261886B - PERFEZIONAMENTO AL METODO DI CONTROLLO DI VELOCITà DI CRESCITA EPITASSIALE IN REATTORI VERTICALI A SUSCETTORE ROTANTE - Google Patents

PERFEZIONAMENTO AL METODO DI CONTROLLO DI VELOCITà DI CRESCITA EPITASSIALE IN REATTORI VERTICALI A SUSCETTORE ROTANTE

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Publication number
IT1261886B
IT1261886B ITMI921598A ITMI921598A IT1261886B IT 1261886 B IT1261886 B IT 1261886B IT MI921598 A ITMI921598 A IT MI921598A IT MI921598 A ITMI921598 A IT MI921598A IT 1261886 B IT1261886 B IT 1261886B
Authority
IT
Italy
Prior art keywords
obstacles
growth
rotating
control
improved methods
Prior art date
Application number
ITMI921598A
Other languages
English (en)
Inventor
Vittorio Pozzetti
Original Assignee
Lpe
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lpe filed Critical Lpe
Priority to ITMI921598A priority Critical patent/IT1261886B/it
Publication of ITMI921598A0 publication Critical patent/ITMI921598A0/it
Publication of ITMI921598A1 publication Critical patent/ITMI921598A1/it
Application granted granted Critical
Publication of IT1261886B publication Critical patent/IT1261886B/it

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Abstract

per ridurre l'influenza dannosa di moti convettivi, dovuti a gradienti di temperatura, nella massa di gas reagenti circondante un suscettore rotante (32) di un reattore epitassiale (10) si impiegano ostacoli di lunghezza ridotta (76) disposti longitudinalmente su spigoli del suscettore rotante (32) ed ostacoli disposti trasversalmente rispetto a correnti di gas circolanti nel reattore epitassiale (10), gli ostacoli trasversali consistendo in almeno un disco (70) di materiale inerte rispetto ai gas reagenti posto sopra il suscettore (32) tra un distributore di ingresso (26) ed il medesimo suscettore rotante (32) ed eventualmente, in aggiunta, barriere o nervature (82, 84) disposte su facce (46) definite tra i medesimi spigoli.
ITMI921598A 1992-06-30 1992-06-30 PERFEZIONAMENTO AL METODO DI CONTROLLO DI VELOCITà DI CRESCITA EPITASSIALE IN REATTORI VERTICALI A SUSCETTORE ROTANTE IT1261886B (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ITMI921598A IT1261886B (it) 1992-06-30 1992-06-30 PERFEZIONAMENTO AL METODO DI CONTROLLO DI VELOCITà DI CRESCITA EPITASSIALE IN REATTORI VERTICALI A SUSCETTORE ROTANTE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI921598A IT1261886B (it) 1992-06-30 1992-06-30 PERFEZIONAMENTO AL METODO DI CONTROLLO DI VELOCITà DI CRESCITA EPITASSIALE IN REATTORI VERTICALI A SUSCETTORE ROTANTE

Publications (3)

Publication Number Publication Date
ITMI921598A0 ITMI921598A0 (it) 1992-06-30
ITMI921598A1 ITMI921598A1 (it) 1994-01-01
IT1261886B true IT1261886B (it) 1996-06-03

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI921598A IT1261886B (it) 1992-06-30 1992-06-30 PERFEZIONAMENTO AL METODO DI CONTROLLO DI VELOCITà DI CRESCITA EPITASSIALE IN REATTORI VERTICALI A SUSCETTORE ROTANTE

Country Status (1)

Country Link
IT (1) IT1261886B (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7153368B2 (en) 2001-09-07 2006-12-26 Lpe Spa Susceptor with epitaxial growth control devices and epitaxial reactor using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7153368B2 (en) 2001-09-07 2006-12-26 Lpe Spa Susceptor with epitaxial growth control devices and epitaxial reactor using the same

Also Published As

Publication number Publication date
ITMI921598A0 (it) 1992-06-30
ITMI921598A1 (it) 1994-01-01

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