IT1244284B - Sistema ed apparecchiatura per microscopia elettronica in scansione in modalita' cosiddetta ddvc
- Google Patents
Sistema ed apparecchiatura per microscopia elettronica in scansione in modalita' cosiddetta ddvc
Info
Publication number
IT1244284B
IT1244284BIT02083090AIT2083090AIT1244284BIT 1244284 BIT1244284 BIT 1244284BIT 02083090 AIT02083090 AIT 02083090AIT 2083090 AIT2083090 AIT 2083090AIT 1244284 BIT1244284 BIT 1244284B
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telettra SpafiledCriticalTelettra Spa
Priority to IT02083090ApriorityCriticalpatent/IT1244284B/it
Publication of IT9020830A0publicationCriticalpatent/IT9020830A0/it
Publication of IT9020830A1publicationCriticalpatent/IT9020830A1/it
Application grantedgrantedCritical
Publication of IT1244284BpublicationCriticalpatent/IT1244284B/it
Method of producing clear potential contrast image through scanning with electron beam for diagnosis of semiconductor device and electron beam testing system used therein