IT1228864B - Processo di planarizzazione per matrici di celle di memoria eprom a tovaglia e semitovaglia. - Google Patents
Processo di planarizzazione per matrici di celle di memoria eprom a tovaglia e semitovaglia.Info
- Publication number
- IT1228864B IT1228864B IT8919884A IT1988489A IT1228864B IT 1228864 B IT1228864 B IT 1228864B IT 8919884 A IT8919884 A IT 8919884A IT 1988489 A IT1988489 A IT 1988489A IT 1228864 B IT1228864 B IT 1228864B
- Authority
- IT
- Italy
- Prior art keywords
- tablecloth
- semi
- memory cell
- planarization process
- eprom memory
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
- H01L21/31055—Planarisation of the insulating layers involving a dielectric removal step the removal being a chemical etching step, e.g. dry etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8919884A IT1228864B (it) | 1989-03-23 | 1989-03-23 | Processo di planarizzazione per matrici di celle di memoria eprom a tovaglia e semitovaglia. |
EP19900200555 EP0389028A3 (en) | 1989-03-23 | 1990-03-09 | Planarization process for eprom memory cell matrices with a table cloth and a half table cloth structure |
JP2068500A JPH02292862A (ja) | 1989-03-23 | 1990-03-20 | テーブルクロス型および半テーブルクロス型構造を有するepromメモリセルマトリックスの平坦化方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8919884A IT1228864B (it) | 1989-03-23 | 1989-03-23 | Processo di planarizzazione per matrici di celle di memoria eprom a tovaglia e semitovaglia. |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8919884A0 IT8919884A0 (it) | 1989-03-23 |
IT1228864B true IT1228864B (it) | 1991-07-05 |
Family
ID=11162055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8919884A IT1228864B (it) | 1989-03-23 | 1989-03-23 | Processo di planarizzazione per matrici di celle di memoria eprom a tovaglia e semitovaglia. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0389028A3 (it) |
JP (1) | JPH02292862A (it) |
IT (1) | IT1228864B (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0851470A1 (en) * | 1996-12-24 | 1998-07-01 | STMicroelectronics S.r.l. | Process for deposing a stratified dielectric for enhancing the planarity of semiconductor electronic devices |
-
1989
- 1989-03-23 IT IT8919884A patent/IT1228864B/it active
-
1990
- 1990-03-09 EP EP19900200555 patent/EP0389028A3/en not_active Withdrawn
- 1990-03-20 JP JP2068500A patent/JPH02292862A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0389028A2 (en) | 1990-09-26 |
IT8919884A0 (it) | 1989-03-23 |
JPH02292862A (ja) | 1990-12-04 |
EP0389028A3 (en) | 1990-10-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IT9067928A0 (it) | Caricatore per materiale in foglio | |
IT1235690B (it) | Procedimento di fabbricazione per una matrice di celle eprom organizzate a tovaglia. | |
IT8822848A0 (it) | Matrice di celle di memoria eprom con struttura a tovaglia con migliorato rapporto capacitivo e processo per la sua fabbricazione | |
IT1228864B (it) | Processo di planarizzazione per matrici di celle di memoria eprom a tovaglia e semitovaglia. | |
IT8820169A0 (it) | Matrice di memoria a tovaglia con celle eprom sfalsate. | |
DE3781920T2 (de) | Matrize zum extrudieren von keramischen gegenstaenden in honigwabenstruktur. | |
IT231121Y1 (it) | Coltello particolarmente per demolitori di manufatti in calcestruzzo | |
BR6901189U (pt) | Disposicao introduzida em calota | |
BR6902189U (pt) | Disposicao introduzida em calha luminosa | |
GB2237589B (en) | Improvements in fence posts | |
IT216571Z2 (it) | Lastra ondulata in materiale cementizio. | |
BR7000048U (pt) | Disposicao introduzida em calota | |
IT216527Z2 (it) | Box in lastra di materiale plastico. | |
BR6700115U (pt) | Disposicao introduzida em calota | |
BR6900351U (pt) | Disposicao introduzida em lapiseira | |
BR6800487U (pt) | Disposicao introduzida em moldura | |
ITMO920119A0 (it) | Macchina per smaltare piatti e vasellame in materiale ceramico. | |
BR6902551U (pt) | Disposicao introduzida em maquina caramelizadora | |
BR6801889U (pt) | Disposicao introduzida em maquina moldadora | |
IT8809417A0 (it) | Apparecchiatura per la formazionedi scritte in genere, di disegni osimili su una tessera in materiale plastico | |
BR6700095U (pt) | Disposicao introduzida em sub-solador | |
IT215706Z2 (it) | Quadrotto in materiale plastico per terrazze piane e pavimenti rialzati. | |
IT8421502V0 (it) | Portachiavi cavo in materiale plastico. | |
BR8805894A (pt) | Aperfeicoamento em celulas indutivas multiplas | |
BR6700950U (pt) | Disposicao introduzida em cabecote de extrusora |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970329 |