IT1226468B - Troncatrice per tagliare materiale semiconduttore - Google Patents

Troncatrice per tagliare materiale semiconduttore

Info

Publication number
IT1226468B
IT1226468B IT8821520A IT2152088A IT1226468B IT 1226468 B IT1226468 B IT 1226468B IT 8821520 A IT8821520 A IT 8821520A IT 2152088 A IT2152088 A IT 2152088A IT 1226468 B IT1226468 B IT 1226468B
Authority
IT
Italy
Prior art keywords
cutting
semiconductor material
machine
cutting machine
cutting semiconductor
Prior art date
Application number
IT8821520A
Other languages
English (en)
Other versions
IT8821520A0 (it
Inventor
Yutaka Kubotera
Kazunari Akiyama
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP19247587A external-priority patent/JP2623588B2/ja
Priority claimed from JP19247687A external-priority patent/JP2718032B2/ja
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Publication of IT8821520A0 publication Critical patent/IT8821520A0/it
Application granted granted Critical
Publication of IT1226468B publication Critical patent/IT1226468B/it

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0428Apparatus for mechanical treatment or grinding or cutting
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Program-control systems
    • G05B19/02Program-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/19Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
    • G05B19/23Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/024Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with the stock carried by a movable support for feeding stock into engagement with the cutting blade, e.g. stock carried by a pivoted arm or a carriage
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/35Nc in input of data, input till input file format
    • G05B2219/35459Knob, handle, handwheel delivers pulses, electronic handwheel, digipot
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/36Nc in input of data, input key till input tape
    • G05B2219/36383Manual input combined with input from computer or tape
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/50Machine tool, machine tool null till machine tool work handling
    • G05B2219/50084Keep position, setup parameters in memory

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
IT8821520A 1987-07-31 1988-07-27 Troncatrice per tagliare materiale semiconduttore IT1226468B (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19247587A JP2623588B2 (ja) 1987-07-31 1987-07-31 半導体単結晶棒の切断装置
JP19247687A JP2718032B2 (ja) 1987-07-31 1987-07-31 半導体単結晶棒の切断装置

Publications (2)

Publication Number Publication Date
IT8821520A0 IT8821520A0 (it) 1988-07-27
IT1226468B true IT1226468B (it) 1991-01-16

Family

ID=26507334

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8821520A IT1226468B (it) 1987-07-31 1988-07-27 Troncatrice per tagliare materiale semiconduttore

Country Status (3)

Country Link
US (1) US4903437A (it)
KR (1) KR940011178B1 (it)
IT (1) IT1226468B (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69501394T2 (de) * 1994-02-07 1998-07-16 Struers As Vorrichtung zum schneiden von materialproben von einem probenkörper
US6493934B2 (en) 1996-11-12 2002-12-17 Salman Akram Method for sawing wafers employing multiple indexing techniques for multiple die dimensions
US6250192B1 (en) 1996-11-12 2001-06-26 Micron Technology, Inc. Method for sawing wafers employing multiple indexing techniques for multiple die dimensions
US6718227B1 (en) * 1999-12-16 2004-04-06 Texas Instruments Incorporated System and method for determining a position error in a wafer handling device
US20020185121A1 (en) * 2001-06-06 2002-12-12 Farnworth Warren M. Group encapsulated dicing chuck
US7424377B2 (en) * 2002-11-04 2008-09-09 Neptune Technology Group, Inc. Power reduction method in an electronic counter
JP5260139B2 (ja) * 2008-05-22 2013-08-14 株式会社日進製作所 砥石接触感知方法およびその装置、ならびにホーニング加工方法およびホーニング盤
JP6183708B2 (ja) * 2013-12-17 2017-08-23 宇部興産機械株式会社 型締装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2856339C2 (de) * 1978-12-27 1985-12-05 Fortuna-Werke Maschinenfabrik Gmbh, 7000 Stuttgart Vorrichtung zum kontinuierlichen, automatischen Zustellen von Setzstockbacken zur Halterung eines Werkstückes auf einer Rundschleifmaschine
JPS55101369A (en) * 1979-01-30 1980-08-02 Toyoda Mach Works Ltd Sizing device corrected at measuring position responsive to boring diameter
JPS56126574A (en) * 1980-02-29 1981-10-03 Toyoda Mach Works Ltd Safety device for feeding movable mount

Also Published As

Publication number Publication date
US4903437A (en) 1990-02-27
IT8821520A0 (it) 1988-07-27
KR890002987A (ko) 1989-04-12
KR940011178B1 (ko) 1994-11-26

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970731