IT1155031B - Vacuum vessel leak detection - Google Patents

Vacuum vessel leak detection

Info

Publication number
IT1155031B
IT1155031B IT24873/82A IT2487382A IT1155031B IT 1155031 B IT1155031 B IT 1155031B IT 24873/82 A IT24873/82 A IT 24873/82A IT 2487382 A IT2487382 A IT 2487382A IT 1155031 B IT1155031 B IT 1155031B
Authority
IT
Italy
Prior art keywords
vacuum pump
turbo vacuum
turbo
protrudes
fed
Prior art date
Application number
IT24873/82A
Other languages
Italian (it)
Other versions
IT8224873A1 (en
IT8224873A0 (en
Inventor
Hermann Mennenga
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Priority to IT24873/82A priority Critical patent/IT1155031B/en
Publication of IT8224873A0 publication Critical patent/IT8224873A0/en
Publication of IT8224873A1 publication Critical patent/IT8224873A1/en
Application granted granted Critical
Publication of IT1155031B publication Critical patent/IT1155031B/en

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Abstract

The detector for vacuum containers uses test gas which is fed in via leak points and a test gas detector (2) at the inlet of a turbo vacuum pump whose output is connected to a series pump (7). Gas from the vessel (9) is fed to the turbo vacuum pump (1) via a pipe (8) which protrudes into an intermediate stage of the turbo vacuum pump. The arrangement is more economical to produce than conventional arrangements since it enables the elimination of a high vacuum pump. The turbo vacuum pump has an annular channel (10) at the point at which the connecting pipe protrudes. The annular channel encloses the intermediate stage. Two disc sets with different compression characteristics may be mounted on a common shaft in the turbo vacuum pump housing. The pipe protrudes into the space between the discs.
IT24873/82A 1982-12-21 1982-12-21 Vacuum vessel leak detection IT1155031B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT24873/82A IT1155031B (en) 1982-12-21 1982-12-21 Vacuum vessel leak detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT24873/82A IT1155031B (en) 1982-12-21 1982-12-21 Vacuum vessel leak detection

Publications (3)

Publication Number Publication Date
IT8224873A0 IT8224873A0 (en) 1982-12-21
IT8224873A1 IT8224873A1 (en) 1984-06-21
IT1155031B true IT1155031B (en) 1987-01-21

Family

ID=11215000

Family Applications (1)

Application Number Title Priority Date Filing Date
IT24873/82A IT1155031B (en) 1982-12-21 1982-12-21 Vacuum vessel leak detection

Country Status (1)

Country Link
IT (1) IT1155031B (en)

Also Published As

Publication number Publication date
IT8224873A1 (en) 1984-06-21
IT8224873A0 (en) 1982-12-21

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Effective date: 19961230