IT1113683B - Apparecchiatura per formare tracciati su substrati fotosensibili - Google Patents
Apparecchiatura per formare tracciati su substrati fotosensibiliInfo
- Publication number
- IT1113683B IT1113683B IT29567/77A IT2956777A IT1113683B IT 1113683 B IT1113683 B IT 1113683B IT 29567/77 A IT29567/77 A IT 29567/77A IT 2956777 A IT2956777 A IT 2956777A IT 1113683 B IT1113683 B IT 1113683B
- Authority
- IT
- Italy
- Prior art keywords
- equipment
- forming tracks
- photosensitive substrates
- photosensitive
- substrates
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/750,292 US4110594A (en) | 1976-12-13 | 1976-12-13 | Pattern mask generating method and apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
IT1113683B true IT1113683B (it) | 1986-01-20 |
Family
ID=25017260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT29567/77A IT1113683B (it) | 1976-12-13 | 1977-11-11 | Apparecchiatura per formare tracciati su substrati fotosensibili |
Country Status (6)
Country | Link |
---|---|
US (1) | US4110594A (it) |
JP (1) | JPS5942974B2 (it) |
DE (1) | DE2752942A1 (it) |
FR (1) | FR2373815A1 (it) |
GB (1) | GB1539305A (it) |
IT (1) | IT1113683B (it) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4205216A (en) * | 1978-09-26 | 1980-05-27 | Western Electric Company, Inc. | Laser welding system and method |
US4316074A (en) * | 1978-12-20 | 1982-02-16 | Quantronix Corporation | Method and apparatus for laser irradiating semiconductor material |
US4317021A (en) * | 1980-02-22 | 1982-02-23 | The United States Of America As Represented By The United States Department Of Energy | Laser cutting apparatus for nuclear core fuel subassembly |
US4633058A (en) * | 1982-01-21 | 1986-12-30 | Preci-Spark Limited | Laser machining apparatus |
US4638144A (en) * | 1985-04-24 | 1987-01-20 | Automated Industrial Systems | Indexing laser marker |
JPS61251032A (ja) * | 1985-04-30 | 1986-11-08 | Toshiba Mach Co Ltd | レ−ザ描画装置 |
KR920002820B1 (ko) * | 1987-05-27 | 1992-04-04 | 마쯔시다덴기산교 가부시기가이샤 | 주사형 투영 노광장치 |
US6986559B1 (en) | 2001-04-20 | 2006-01-17 | Elesys, Inc. | Position information apparatus and methods for radial printing |
US6910750B2 (en) | 2000-06-02 | 2005-06-28 | Elesys, Inc. | Low-profile ink head cartridge with integrated movement mechanism and service station |
US6786563B1 (en) | 2001-04-18 | 2004-09-07 | Elesys, Inc. | Interleaving apparatus and methods for radial printing |
US7284804B2 (en) * | 2001-04-18 | 2007-10-23 | Elesys, Inc. | Interleaving apparatus and methods for radial printing |
US7497534B2 (en) * | 2000-03-21 | 2009-03-03 | Elesys, Inc. | Enhancing angular position information for a radial printing system |
US6264295B1 (en) | 1998-04-17 | 2001-07-24 | Elesys, Inc. | Radial printing system and methods |
US6854841B1 (en) | 1998-04-17 | 2005-02-15 | Elesys, Inc. | Point-of-incidence ink-curing mechanisms for radial printing |
US6030154A (en) * | 1998-06-19 | 2000-02-29 | International Business Machines Corporation | Minimum error algorithm/program |
US6252241B1 (en) * | 1998-12-28 | 2001-06-26 | Creo, Ltd. | Rotational scanning image recording system having both a large format and high resolution |
DE10004022A1 (de) | 2000-01-31 | 2001-08-02 | Focke & Co | Verfahren und Vorrichtung zum Anbringen von Codierungen an (Zigaretten-)Packungen |
US8189902B1 (en) | 2007-12-21 | 2012-05-29 | Doug Carson & Associates | Creating an XY image pattern on a rotating substrate |
JP5226557B2 (ja) * | 2008-04-22 | 2013-07-03 | 富士フイルム株式会社 | レーザ露光方法、フォトレジスト層の加工方法およびパターン成形品の製造方法 |
JP5751935B2 (ja) * | 2011-06-06 | 2015-07-22 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び試料作製方法 |
CN108873624A (zh) * | 2018-09-29 | 2018-11-23 | 深圳市先地图像科技有限公司 | 一种无掩膜极坐标旋转扫描曝光成像装置及其使用方法 |
CN114002921A (zh) * | 2021-11-09 | 2022-02-01 | 深圳市先地图像科技有限公司 | 一种激光成像设备以及激光成像方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3438050A (en) * | 1965-01-06 | 1969-04-08 | Itek Corp | Laser data recorder |
FR2030468A5 (it) * | 1969-01-29 | 1970-11-13 | Thomson Brandt Csf | |
US3622742A (en) * | 1970-05-27 | 1971-11-23 | Bell Telephone Labor Inc | Laser machining method and apparatus |
US3834613A (en) * | 1971-03-01 | 1974-09-10 | Int Equipment Co | Centrifuge rotor with sample holding means and means for balancing the same |
US4028732A (en) * | 1973-03-02 | 1977-06-07 | Lucien Salter | Apparatus and method for display of images |
US3825323A (en) * | 1973-05-17 | 1974-07-23 | Teletype Corp | Rotary disc recording and readout system having capacitance controlled lens positioning means |
US4032743A (en) * | 1975-06-27 | 1977-06-28 | Marvel Engineering Company | Laser microperforator |
-
1976
- 1976-12-13 US US05/750,292 patent/US4110594A/en not_active Expired - Lifetime
-
1977
- 1977-10-18 FR FR7732163A patent/FR2373815A1/fr active Granted
- 1977-11-11 IT IT29567/77A patent/IT1113683B/it active
- 1977-11-15 JP JP52136360A patent/JPS5942974B2/ja not_active Expired
- 1977-11-26 DE DE19772752942 patent/DE2752942A1/de not_active Withdrawn
- 1977-12-01 GB GB50157/77A patent/GB1539305A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2373815B1 (it) | 1980-12-19 |
DE2752942A1 (de) | 1978-06-15 |
JPS5942974B2 (ja) | 1984-10-18 |
JPS5374380A (en) | 1978-07-01 |
GB1539305A (en) | 1979-01-31 |
US4110594A (en) | 1978-08-29 |
FR2373815A1 (fr) | 1978-07-07 |
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