IT1112616B - Air film for transporting semiconductor wafers - is disrupted by air jets in track plate grooves - Google Patents

Air film for transporting semiconductor wafers - is disrupted by air jets in track plate grooves

Info

Publication number
IT1112616B
IT1112616B IT2042278A IT2042278A IT1112616B IT 1112616 B IT1112616 B IT 1112616B IT 2042278 A IT2042278 A IT 2042278A IT 2042278 A IT2042278 A IT 2042278A IT 1112616 B IT1112616 B IT 1112616B
Authority
IT
Italy
Prior art keywords
disrupted
air
semiconductor wafers
track
grooves
Prior art date
Application number
IT2042278A
Other languages
Italian (it)
Other versions
IT7820422A0 (en
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/772,394 external-priority patent/US4165132A/en
Application filed by Ibm filed Critical Ibm
Publication of IT7820422A0 publication Critical patent/IT7820422A0/en
Application granted granted Critical
Publication of IT1112616B publication Critical patent/IT1112616B/en

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Horizontal transfer track (14) carries semiconductor wafers by means of an air film. The flat track is provided with grooves (26) which run in the direction of transport. A sensor in the centre of the track detects the arrival of a wafer at a given position. This produces a signal which controls a number of nozzles (32) which are located in the track grooves (26). The nozzles then blow air jets along the grooves (26) and this causes the air film above to be disrupted. When that happens, the transfer movement of the semiconductor wafer stops.
IT2042278A 1977-02-28 1978-02-21 Air film for transporting semiconductor wafers - is disrupted by air jets in track plate grooves IT1112616B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US77239377A 1977-02-28 1977-02-28
US05/772,394 US4165132A (en) 1977-02-28 1977-02-28 Pneumatic control of the motion of objects suspended on an air film

Publications (2)

Publication Number Publication Date
IT7820422A0 IT7820422A0 (en) 1978-02-21
IT1112616B true IT1112616B (en) 1986-01-20

Family

ID=27118599

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2042278A IT1112616B (en) 1977-02-28 1978-02-21 Air film for transporting semiconductor wafers - is disrupted by air jets in track plate grooves

Country Status (1)

Country Link
IT (1) IT1112616B (en)

Also Published As

Publication number Publication date
IT7820422A0 (en) 1978-02-21

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