IT1101789B - ANULAR FIELD OPTICAL SYSTEM CONSTITUTING A POWER UNIT - Google Patents

ANULAR FIELD OPTICAL SYSTEM CONSTITUTING A POWER UNIT

Info

Publication number
IT1101789B
IT1101789B IT48011/78A IT4801178A IT1101789B IT 1101789 B IT1101789 B IT 1101789B IT 48011/78 A IT48011/78 A IT 48011/78A IT 4801178 A IT4801178 A IT 4801178A IT 1101789 B IT1101789 B IT 1101789B
Authority
IT
Italy
Prior art keywords
anular
optical system
power unit
field optical
system constituting
Prior art date
Application number
IT48011/78A
Other languages
Italian (it)
Other versions
IT7848011A0 (en
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of IT7848011A0 publication Critical patent/IT7848011A0/en
Application granted granted Critical
Publication of IT1101789B publication Critical patent/IT1101789B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0836—Catadioptric systems using more than three curved mirrors
    • G02B17/0844—Catadioptric systems using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
IT48011/78A 1977-02-11 1978-02-10 ANULAR FIELD OPTICAL SYSTEM CONSTITUTING A POWER UNIT IT1101789B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US76790677A 1977-02-11 1977-02-11

Publications (2)

Publication Number Publication Date
IT7848011A0 IT7848011A0 (en) 1978-02-10
IT1101789B true IT1101789B (en) 1985-10-07

Family

ID=25080934

Family Applications (1)

Application Number Title Priority Date Filing Date
IT48011/78A IT1101789B (en) 1977-02-11 1978-02-10 ANULAR FIELD OPTICAL SYSTEM CONSTITUTING A POWER UNIT

Country Status (7)

Country Link
JP (1) JPS53100230A (en)
CA (1) CA1103498A (en)
CH (1) CH625055A5 (en)
DE (1) DE2801882A1 (en)
FR (1) FR2380563A1 (en)
GB (2) GB1605161A (en)
IT (1) IT1101789B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4331390A (en) * 1979-10-09 1982-05-25 The Perkin-Elmer Corporation Monocentric optical systems
JPS5890610A (en) * 1981-11-24 1983-05-30 Matsushita Electric Ind Co Ltd Catadioptric optical system
US4469414A (en) * 1982-06-01 1984-09-04 The Perkin-Elmer Corporation Restrictive off-axis field optical system
JPS59144127A (en) * 1983-02-07 1984-08-18 Canon Inc Optical apparatus with adjustment of image
JPS6093410A (en) * 1983-10-27 1985-05-25 Canon Inc Reflective optical system
JPS6147916A (en) * 1984-08-14 1986-03-08 Canon Inc Reflecting optical system
US4747678A (en) * 1986-12-17 1988-05-31 The Perkin-Elmer Corporation Optical relay system with magnification
JP2565149B2 (en) * 1995-04-05 1996-12-18 キヤノン株式会社 Circuit manufacturing method and exposure apparatus
JP5196869B2 (en) * 2007-05-15 2013-05-15 キヤノン株式会社 Projection optical system, exposure apparatus, and device manufacturing method
CN102981255B (en) * 2011-09-07 2016-04-20 上海微电子装备有限公司 A kind of Large visual angle projection objective
JP2020052342A (en) * 2018-09-28 2020-04-02 キヤノン株式会社 Optical instrument

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2344756A (en) * 1941-01-06 1944-03-21 Taylor Taylor & Hobson Ltd Optical objective
US2682197A (en) * 1951-08-13 1954-06-29 American Optical Corp Folded reflecting optical system of the schmidt type
SU126911A1 (en) * 1959-03-30 1959-11-30 Н.Н. Петрушов Mirror-lens lens
US3748015A (en) * 1971-06-21 1973-07-24 Perkin Elmer Corp Unit power imaging catoptric anastigmat
US3821763A (en) * 1971-06-21 1974-06-28 Perkin Elmer Corp Annular field optical imaging system
US3951546A (en) * 1974-09-26 1976-04-20 The Perkin-Elmer Corporation Three-fold mirror assembly for a scanning projection system

Also Published As

Publication number Publication date
DE2801882C2 (en) 1988-02-04
IT7848011A0 (en) 1978-02-10
CH625055A5 (en) 1981-08-31
CA1103498A (en) 1981-06-23
FR2380563A1 (en) 1978-09-08
DE2801882A1 (en) 1978-08-17
GB1605161A (en) 1982-08-11
JPH0130125B2 (en) 1989-06-16
JPS53100230A (en) 1978-09-01
GB1605160A (en) 1982-08-11
FR2380563B1 (en) 1984-01-20

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