IT1098966B - Procedimento e dispositivo per la deposizione di materiale semiconduttore - Google Patents

Procedimento e dispositivo per la deposizione di materiale semiconduttore

Info

Publication number
IT1098966B
IT1098966B IT28176/78A IT2817678A IT1098966B IT 1098966 B IT1098966 B IT 1098966B IT 28176/78 A IT28176/78 A IT 28176/78A IT 2817678 A IT2817678 A IT 2817678A IT 1098966 B IT1098966 B IT 1098966B
Authority
IT
Italy
Prior art keywords
deposition
procedure
semiconductive material
semiconductive
Prior art date
Application number
IT28176/78A
Other languages
English (en)
Other versions
IT7828176A0 (it
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of IT7828176A0 publication Critical patent/IT7828176A0/it
Application granted granted Critical
Publication of IT1098966B publication Critical patent/IT1098966B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/16—Controlling or regulating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
IT28176/78A 1977-09-29 1978-09-28 Procedimento e dispositivo per la deposizione di materiale semiconduttore IT1098966B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2743856A DE2743856C2 (de) 1977-09-29 1977-09-29 Vorrichtung zum Abscheiden von Halbleitermaterial

Publications (2)

Publication Number Publication Date
IT7828176A0 IT7828176A0 (it) 1978-09-28
IT1098966B true IT1098966B (it) 1985-09-18

Family

ID=6020225

Family Applications (1)

Application Number Title Priority Date Filing Date
IT28176/78A IT1098966B (it) 1977-09-29 1978-09-28 Procedimento e dispositivo per la deposizione di materiale semiconduttore

Country Status (3)

Country Link
JP (1) JPS5458351A (it)
DE (1) DE2743856C2 (it)
IT (1) IT1098966B (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4681652A (en) * 1980-06-05 1987-07-21 Rogers Leo C Manufacture of polycrystalline silicon

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3194863A (en) * 1961-07-24 1965-07-13 Eastman Kodak Co Compression rolling of multiple strips of organic polymers
DE1221612B (de) * 1962-09-15 1966-07-28 Siemens Ag Vorrichtung zum Konstanthalten der Temperatur eines bei einer pyrolitischen Zersetzung einer Halbleiterverbindung benutzten Traegers
GB1209580A (en) * 1969-03-17 1970-10-21 Hamco Mach & Elect Co Automatic control for crystal growing apparatus
JPS5311189B2 (it) * 1972-10-30 1978-04-19
DE2518853C3 (de) * 1975-04-28 1979-03-22 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum Abscheiden von elementarem Silicium aus einem Reaktionsgas

Also Published As

Publication number Publication date
DE2743856C2 (de) 1987-03-05
DE2743856A1 (de) 1979-04-12
JPS5458351A (en) 1979-05-11
IT7828176A0 (it) 1978-09-28

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