IT1094628B - METHOD OF MANUFACTURE OF SEMICONDUCTIVE DEVICES - Google Patents

METHOD OF MANUFACTURE OF SEMICONDUCTIVE DEVICES

Info

Publication number
IT1094628B
IT1094628B IT23301/78A IT2330178A IT1094628B IT 1094628 B IT1094628 B IT 1094628B IT 23301/78 A IT23301/78 A IT 23301/78A IT 2330178 A IT2330178 A IT 2330178A IT 1094628 B IT1094628 B IT 1094628B
Authority
IT
Italy
Prior art keywords
manufacture
semiconductive devices
semiconductive
devices
Prior art date
Application number
IT23301/78A
Other languages
Italian (it)
Other versions
IT7823301A0 (en
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Publication of IT7823301A0 publication Critical patent/IT7823301A0/en
Application granted granted Critical
Publication of IT1094628B publication Critical patent/IT1094628B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Weting (AREA)
IT23301/78A 1977-06-06 1978-05-11 METHOD OF MANUFACTURE OF SEMICONDUCTIVE DEVICES IT1094628B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80372277A 1977-06-06 1977-06-06

Publications (2)

Publication Number Publication Date
IT7823301A0 IT7823301A0 (en) 1978-05-11
IT1094628B true IT1094628B (en) 1985-08-02

Family

ID=25187266

Family Applications (1)

Application Number Title Priority Date Filing Date
IT23301/78A IT1094628B (en) 1977-06-06 1978-05-11 METHOD OF MANUFACTURE OF SEMICONDUCTIVE DEVICES

Country Status (4)

Country Link
JP (1) JPS544074A (en)
DE (1) DE2823441A1 (en)
GB (1) GB1564679A (en)
IT (1) IT1094628B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6149432A (en) * 1984-08-18 1986-03-11 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3998662A (en) * 1975-12-31 1976-12-21 General Electric Company Migration of fine lines for bodies of semiconductor materials having a (100) planar orientation of a major surface

Also Published As

Publication number Publication date
GB1564679A (en) 1980-04-10
IT7823301A0 (en) 1978-05-11
JPS544074A (en) 1979-01-12
DE2823441A1 (en) 1978-12-14

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