IT1072208B - Procedimento per la fabbricazione di un resistore di misura particolarmente per termometri a resistenza - Google Patents

Procedimento per la fabbricazione di un resistore di misura particolarmente per termometri a resistenza

Info

Publication number
IT1072208B
IT1072208B IT69947/76A IT6994776A IT1072208B IT 1072208 B IT1072208 B IT 1072208B IT 69947/76 A IT69947/76 A IT 69947/76A IT 6994776 A IT6994776 A IT 6994776A IT 1072208 B IT1072208 B IT 1072208B
Authority
IT
Italy
Prior art keywords
procedure
manufacture
measuring resistor
resistance thermometers
resistor particularly
Prior art date
Application number
IT69947/76A
Other languages
English (en)
Original Assignee
Degussa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Degussa filed Critical Degussa
Application granted granted Critical
Publication of IT1072208B publication Critical patent/IT1072208B/it

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Thermistors And Varistors (AREA)
  • Physical Vapour Deposition (AREA)
IT69947/76A 1975-12-24 1976-12-10 Procedimento per la fabbricazione di un resistore di misura particolarmente per termometri a resistenza IT1072208B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2558752A DE2558752C3 (de) 1975-12-24 1975-12-24 Verfahren zur Herstellung eines Schichrwiderstandes als Meßwiderstand für Widerstandsthermometer

Publications (1)

Publication Number Publication Date
IT1072208B true IT1072208B (it) 1985-04-10

Family

ID=5965682

Family Applications (1)

Application Number Title Priority Date Filing Date
IT69947/76A IT1072208B (it) 1975-12-24 1976-12-10 Procedimento per la fabbricazione di un resistore di misura particolarmente per termometri a resistenza

Country Status (6)

Country Link
US (1) US4072593A (it)
JP (1) JPS6037886B2 (it)
DE (1) DE2558752C3 (it)
FR (1) FR2336775A1 (it)
GB (1) GB1538948A (it)
IT (1) IT1072208B (it)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4129848A (en) * 1975-09-03 1978-12-12 Raytheon Company Platinum film resistor device
US4375056A (en) * 1980-02-29 1983-02-22 Leeds & Northrup Company Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture
GB2096645B (en) * 1981-03-24 1984-10-31 Rosemount Eng Co Ltd A method of producing a resistance element for a resistance thermometer
DE3146020C2 (de) * 1981-11-20 1985-11-07 Danfoss A/S, Nordborg Temperaturabhängiger Widerstand, insbesondere für Widerstandsthermometer
IN165267B (it) * 1984-07-31 1989-09-09 Rosemount Inc
CA1250155A (en) * 1984-07-31 1989-02-21 James A. Ruf Platinum resistance thermometer
US5089293A (en) * 1984-07-31 1992-02-18 Rosemount Inc. Method for forming a platinum resistance thermometer
JPS6140513A (ja) * 1984-08-01 1986-02-26 Hitachi Ltd 薄膜抵抗式空気流量検出装置及び薄膜抵抗式計測素子
DE3630393C2 (de) * 1985-09-10 1994-06-23 Sharp Kk Widerstandsthermometer
US4791398A (en) * 1986-02-13 1988-12-13 Rosemount Inc. Thin film platinum resistance thermometer with high temperature diffusion barrier
DE3906405A1 (de) * 1989-03-01 1990-09-06 Leybold Ag Verfahren zur herstellung eines schichtwiderstands
US5087297A (en) * 1991-01-17 1992-02-11 Johnson Matthey Inc. Aluminum target for magnetron sputtering and method of making same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3645783A (en) * 1970-06-03 1972-02-29 Infrared Ind Inc Thin film planar resistor
US3833410A (en) * 1971-12-30 1974-09-03 Trw Inc High stability thin film alloy resistors
US3845443A (en) * 1972-06-14 1974-10-29 Bailey Meter Co Thin film resistance thermometer

Also Published As

Publication number Publication date
JPS6037886B2 (ja) 1985-08-29
DE2558752B2 (de) 1978-03-09
JPS5282374A (en) 1977-07-09
US4072593A (en) 1978-02-07
FR2336775B1 (it) 1980-06-27
DE2558752A1 (de) 1977-07-07
DE2558752C3 (de) 1978-10-19
GB1538948A (en) 1979-01-24
FR2336775A1 (fr) 1977-07-22

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