IT1039690B - METHOD OF MANUFACTURING A SEMICONDUCTING DEVICE - Google Patents

METHOD OF MANUFACTURING A SEMICONDUCTING DEVICE

Info

Publication number
IT1039690B
IT1039690B IT25039/75A IT2503975A IT1039690B IT 1039690 B IT1039690 B IT 1039690B IT 25039/75 A IT25039/75 A IT 25039/75A IT 2503975 A IT2503975 A IT 2503975A IT 1039690 B IT1039690 B IT 1039690B
Authority
IT
Italy
Prior art keywords
manufacturing
semiconducting device
semiconducting
Prior art date
Application number
IT25039/75A
Other languages
Italian (it)
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Application granted granted Critical
Publication of IT1039690B publication Critical patent/IT1039690B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
IT25039/75A 1974-08-02 1975-07-02 METHOD OF MANUFACTURING A SEMICONDUCTING DEVICE IT1039690B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US49417874A 1974-08-02 1974-08-02

Publications (1)

Publication Number Publication Date
IT1039690B true IT1039690B (en) 1979-12-10

Family

ID=23963371

Family Applications (1)

Application Number Title Priority Date Filing Date
IT25039/75A IT1039690B (en) 1974-08-02 1975-07-02 METHOD OF MANUFACTURING A SEMICONDUCTING DEVICE

Country Status (7)

Country Link
JP (1) JPS5140757A (en)
BE (1) BE832064A (en)
DE (1) DE2533550A1 (en)
FR (1) FR2280976A1 (en)
IN (1) IN140598B (en)
IT (1) IT1039690B (en)
SE (1) SE7508447L (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2435818A1 (en) * 1978-09-08 1980-04-04 Ibm France PROCESS FOR INCREASING THE INTERNAL TRAPPING EFFECT OF SEMICONDUCTOR BODIES

Also Published As

Publication number Publication date
FR2280976A1 (en) 1976-02-27
BE832064A (en) 1975-12-01
SE7508447L (en) 1976-02-03
IN140598B (en) 1976-12-04
DE2533550A1 (en) 1976-02-19
JPS5140757A (en) 1976-04-05

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