IN2012DN01495A - - Google Patents

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Publication number
IN2012DN01495A
IN2012DN01495A IN1495DEN2012A IN2012DN01495A IN 2012DN01495 A IN2012DN01495 A IN 2012DN01495A IN 1495DEN2012 A IN1495DEN2012 A IN 1495DEN2012A IN 2012DN01495 A IN2012DN01495 A IN 2012DN01495A
Authority
IN
India
Prior art keywords
surrounding area
vacuum pump
outlet side
medium
pressure equalization
Prior art date
Application number
Other languages
English (en)
Inventor
Harry Fleig
Andre Johanning
Bertram Bauer
Hartmut Krueger
Harald Merz
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of IN2012DN01495A publication Critical patent/IN2012DN01495A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C14/00—Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations
    • F04C14/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C15/064—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston machines or pumps
    • F04C15/066—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston machines or pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
IN1495DEN2012 2009-08-24 2010-07-13 IN2012DN01495A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200910028831 DE102009028831A1 (de) 2009-08-24 2009-08-24 Unterdruckpumpe mit Druckausgleich
PCT/EP2010/060001 WO2011023448A1 (fr) 2009-08-24 2010-07-13 Pompe à vide à compensation de pression

Publications (1)

Publication Number Publication Date
IN2012DN01495A true IN2012DN01495A (fr) 2015-06-05

Family

ID=42751884

Family Applications (1)

Application Number Title Priority Date Filing Date
IN1495DEN2012 IN2012DN01495A (fr) 2009-08-24 2010-07-13

Country Status (5)

Country Link
EP (1) EP2470790A1 (fr)
JP (1) JP5383917B2 (fr)
DE (1) DE102009028831A1 (fr)
IN (1) IN2012DN01495A (fr)
WO (1) WO2011023448A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013104375A1 (de) * 2013-04-30 2014-10-30 Hella Kgaa Hueck & Co. Vakuumpumpe
DE102018203031A1 (de) 2018-03-01 2019-09-05 Robert Bosch Gmbh Drucksensor für einen Bremskraftverstärker
CN110654360B (zh) * 2018-06-28 2021-06-22 长城汽车股份有限公司 电子真空泵控制方法、装置、系统及机器可读存储介质
CN117203427A (zh) * 2021-04-27 2023-12-08 株式会社村田制作所 泵装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4412416A (en) * 1980-10-20 1983-11-01 General Motors Corporation Altitude compensated vacuum supply system and control
JPH08192737A (ja) * 1995-01-18 1996-07-30 Nabco Ltd 負圧供給装置
GB0326613D0 (en) * 2003-11-14 2003-12-17 Boc Group Plc Vacuum pump
GB2440542A (en) * 2006-07-31 2008-02-06 Boc Group Plc Vacuum pump gearbox purge gas arrangement
JP5350598B2 (ja) * 2007-03-28 2013-11-27 東京エレクトロン株式会社 排気ポンプ、連通管、排気システム及び基板処理装置

Also Published As

Publication number Publication date
JP2013502537A (ja) 2013-01-24
WO2011023448A1 (fr) 2011-03-03
EP2470790A1 (fr) 2012-07-04
DE102009028831A1 (de) 2011-03-03
JP5383917B2 (ja) 2014-01-08

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