IN177969B - - Google Patents

Info

Publication number
IN177969B
IN177969B IN606DE1990A IN177969B IN 177969 B IN177969 B IN 177969B IN 606DE1990 A IN606DE1990 A IN 606DE1990A IN 177969 B IN177969 B IN 177969B
Authority
IN
India
Application number
Other languages
English (en)
Inventor
Anthony George Dewey
Wilfried Lenth
Daniel Rugar
Original Assignee
Inernat Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inernat Business Machines Corp filed Critical Inernat Business Machines Corp
Publication of IN177969B publication Critical patent/IN177969B/en

Links

IN606DE1990 1990-01-27 1990-06-20 IN177969B (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB909001921A GB9001921D0 (en) 1990-01-27 1990-01-27 Focus-error detection using prism-enhanced spot size monitoring

Publications (1)

Publication Number Publication Date
IN177969B true IN177969B (https=) 1997-03-01

Family

ID=10670032

Family Applications (1)

Application Number Title Priority Date Filing Date
IN606DE1990 IN177969B (https=) 1990-01-27 1990-06-20

Country Status (2)

Country Link
GB (1) GB9001921D0 (https=)
IN (1) IN177969B (https=)

Also Published As

Publication number Publication date
GB9001921D0 (en) 1990-03-28

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