GB9001921D0 - Focus-error detection using prism-enhanced spot size monitoring - Google Patents

Focus-error detection using prism-enhanced spot size monitoring

Info

Publication number
GB9001921D0
GB9001921D0 GB909001921A GB9001921A GB9001921D0 GB 9001921 D0 GB9001921 D0 GB 9001921D0 GB 909001921 A GB909001921 A GB 909001921A GB 9001921 A GB9001921 A GB 9001921A GB 9001921 D0 GB9001921 D0 GB 9001921D0
Authority
GB
United Kingdom
Prior art keywords
prism
focus
error detection
spot size
size monitoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB909001921A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to GB909001921A priority Critical patent/GB9001921D0/en
Publication of GB9001921D0 publication Critical patent/GB9001921D0/en
Priority to IN606DE1990 priority patent/IN177969B/en
Pending legal-status Critical Current

Links

GB909001921A 1990-01-27 1990-01-27 Focus-error detection using prism-enhanced spot size monitoring Pending GB9001921D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB909001921A GB9001921D0 (en) 1990-01-27 1990-01-27 Focus-error detection using prism-enhanced spot size monitoring
IN606DE1990 IN177969B (https=) 1990-01-27 1990-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB909001921A GB9001921D0 (en) 1990-01-27 1990-01-27 Focus-error detection using prism-enhanced spot size monitoring

Publications (1)

Publication Number Publication Date
GB9001921D0 true GB9001921D0 (en) 1990-03-28

Family

ID=10670032

Family Applications (1)

Application Number Title Priority Date Filing Date
GB909001921A Pending GB9001921D0 (en) 1990-01-27 1990-01-27 Focus-error detection using prism-enhanced spot size monitoring

Country Status (2)

Country Link
GB (1) GB9001921D0 (https=)
IN (1) IN177969B (https=)

Also Published As

Publication number Publication date
IN177969B (https=) 1997-03-01

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