IN171716B - - Google Patents

Info

Publication number
IN171716B
IN171716B IN538/MAS/88A IN538MA1988A IN171716B IN 171716 B IN171716 B IN 171716B IN 538MA1988 A IN538MA1988 A IN 538MA1988A IN 171716 B IN171716 B IN 171716B
Authority
IN
India
Application number
IN538/MAS/88A
Other languages
English (en)
Inventor
Chen Chang Chih
Original Assignee
Moore Products Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Moore Products Co filed Critical Moore Products Co
Publication of IN171716B publication Critical patent/IN171716B/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605Measuring capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
IN538/MAS/88A 1987-08-10 1988-07-27 IN171716B (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/083,781 US4794320A (en) 1987-08-10 1987-08-10 Multi-frequency capacitance sensor

Publications (1)

Publication Number Publication Date
IN171716B true IN171716B (no) 1992-12-19

Family

ID=22180661

Family Applications (1)

Application Number Title Priority Date Filing Date
IN538/MAS/88A IN171716B (no) 1987-08-10 1988-07-27

Country Status (6)

Country Link
US (1) US4794320A (no)
EP (1) EP0303442B1 (no)
JP (1) JPS6471211A (no)
CA (1) CA1281073C (no)
DE (1) DE3887593T2 (no)
IN (1) IN171716B (no)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI84666C (fi) * 1990-02-07 1991-12-27 Vaisala Oy Maetkoppling foer smao kapasitanser.
DE4039006C1 (no) * 1990-12-06 1992-03-12 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
US5088325A (en) * 1991-02-11 1992-02-18 Bindicator Company System for indicating a condition of material
DE4107366C1 (no) * 1991-03-08 1992-04-23 Leica Heerbrugg Ag, Heerbrugg, Ch
US5539323A (en) * 1993-05-07 1996-07-23 Brooks Automation, Inc. Sensor for articles such as wafers on end effector
JP2932454B2 (ja) * 1993-05-20 1999-08-09 三菱化学ビーエーエスエフ株式会社 複合成形体及びその製造方法
US5594353A (en) * 1995-05-11 1997-01-14 Elsag International N.V. Method and apparatus for measuring the change in capacitance values in dual capacitors
US5663506A (en) * 1995-08-21 1997-09-02 Moore Products Co. Capacitive temperature and pressure transducer
DE19648048C2 (de) * 1995-11-21 2001-11-29 Fuji Electric Co Ltd Detektorvorrichtung zur Druckmessung basierend auf gemessenen Kapazitätswerten
US5672808A (en) * 1996-06-11 1997-09-30 Moore Products Co. Transducer having redundant pressure sensors
JP2006071629A (ja) * 2004-09-02 2006-03-16 Ad Semicondutor Co Ltd 静電容量変化検出方法及び検出集積回路
KR100828128B1 (ko) * 2006-07-20 2008-05-09 에이디반도체(주) 시분할 복수 주파수를 이용하는 정전용량 검출방법 및검출장치
EP2657713B1 (de) * 2012-04-24 2018-08-01 VEGA Grieshaber KG Vorrichtung und Verfahren zur Bestimmung einer Messkapazität

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2937369A (en) * 1955-12-29 1960-05-17 Honeywell Regulator Co Electrical signal measuring apparatus
US3716782A (en) * 1971-06-03 1973-02-13 J Henry Capacitance gage for measuring small distances
GB2006970B (en) * 1977-09-23 1982-03-31 Testut Aequitas Capacitance measuring device
FI54664C (fi) * 1977-10-14 1979-01-10 Vaisala Oy Elektronisk omkopplingstroemstaellare i synnerhet foer telemeteranvaendning i sonder
US4193063A (en) * 1978-05-15 1980-03-11 Leeds & Northrup Company Differential capacitance measuring circuit
US4295091B1 (en) * 1978-10-12 1995-08-15 Vaisala Oy Circuit for measuring low capacitances
FR2454083A1 (fr) * 1979-04-09 1980-11-07 Facom Dispositif de mesure de la position relative de deux objets
AT367211B (de) * 1979-08-29 1982-06-11 List Hans Kapazitiver messwandler
JPS56108970A (en) * 1980-02-01 1981-08-28 Yokogawa Hokushin Electric Corp Extraction of square root type impedance change detector
DE3143114A1 (de) * 1980-11-07 1982-07-15 Mestra AG, 4153 Reinach Verfahren und schaltung zur messung von kapazitaeten
US4558274A (en) * 1983-09-14 1985-12-10 Johnson Service Company Apparatus and method determining the value of a capacitance
FI70753C (fi) * 1984-05-31 1987-01-07 Vaisala Oy Foerfarande foer maetning av kapacitanser, speciellt smao kapacitanser.
NO852169L (no) * 1984-05-31 1985-12-02 Vaisala Oy Fremgangsmaate for maaling av kapasiteter, saerlig av lav verdi.
US4633168A (en) * 1984-11-30 1986-12-30 Borg-Warner Corporation Measuring system for determining the reactance ratio of a pair of reactive devices

Also Published As

Publication number Publication date
US4794320A (en) 1988-12-27
JPS6471211A (en) 1989-03-16
DE3887593T2 (de) 1994-08-18
CA1281073C (en) 1991-03-05
EP0303442A2 (en) 1989-02-15
EP0303442A3 (en) 1990-07-25
EP0303442B1 (en) 1994-02-02
DE3887593D1 (de) 1994-03-17

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