IN170263B - - Google Patents
Info
- Publication number
- IN170263B IN170263B IN22/MAS/88A IN22MA1988A IN170263B IN 170263 B IN170263 B IN 170263B IN 22MA1988 A IN22MA1988 A IN 22MA1988A IN 170263 B IN170263 B IN 170263B
- Authority
- IN
- India
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2602—Details
- H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
- H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19880300237 EP0324213A1 (en) | 1988-01-12 | 1988-01-12 | Scanning electron microscope for visualization of wet samples |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IN170263B true IN170263B (da) | 1992-03-07 |
Family
ID=8199917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IN22/MAS/88A IN170263B (da) | 1988-01-12 | 1988-01-13 |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP0324213A1 (da) |
| IN (1) | IN170263B (da) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2374723B (en) * | 2001-04-20 | 2005-04-20 | Leo Electron Microscopy Ltd | Scanning electron microscope |
| CN100511568C (zh) * | 2005-05-09 | 2009-07-08 | 东捷科技股份有限公司 | 在真空或低压环境中操作高压腔室且供观测的方法及装置 |
| CN1862250A (zh) * | 2005-05-09 | 2006-11-15 | 李炳寰 | 在真空或低压环境中操作液体且可供观测的方法及装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1477458A (en) * | 1974-10-28 | 1977-06-22 | Shah J | Specimen stages for electron beam instruments |
| US4720633A (en) * | 1986-01-17 | 1988-01-19 | Electro-Scan Corporation | Scanning electron microscope for visualization of wet samples |
| GB8604004D0 (en) * | 1986-02-18 | 1986-03-26 | Cambridge Instr Ltd | Specimen chamber |
-
1988
- 1988-01-12 EP EP19880300237 patent/EP0324213A1/en not_active Withdrawn
- 1988-01-13 IN IN22/MAS/88A patent/IN170263B/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP0324213A1 (en) | 1989-07-19 |