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Publication date
Application filed by Electroscan CorpfiledCriticalElectroscan Corp
Publication of IN170263BpublicationCriticalpatent/IN170263B/en
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
H01J2237/26—Electron or ion microscopes
H01J2237/2602—Details
H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)