IN166497B - - Google Patents

Info

Publication number
IN166497B
IN166497B IN992/MAS/85A IN992MA1985A IN166497B IN 166497 B IN166497 B IN 166497B IN 992MA1985 A IN992MA1985 A IN 992MA1985A IN 166497 B IN166497 B IN 166497B
Authority
IN
India
Application number
IN992/MAS/85A
Other languages
English (en)
Inventor
Georg Bednorz Johannes
Kazimierz Gimzewski James
Reihl Bruno
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IN166497B publication Critical patent/IN166497B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
IN992/MAS/85A 1985-01-29 1985-12-09 IN166497B (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP85100892A EP0189498B1 (fr) 1985-01-29 1985-01-29 Microscope électronique Auger à balayage à émission de champ

Publications (1)

Publication Number Publication Date
IN166497B true IN166497B (fr) 1990-05-19

Family

ID=8193262

Family Applications (1)

Application Number Title Priority Date Filing Date
IN992/MAS/85A IN166497B (fr) 1985-01-29 1985-12-09

Country Status (8)

Country Link
US (1) US4698502A (fr)
EP (1) EP0189498B1 (fr)
JP (1) JPS61176044A (fr)
CN (1) CN1009145B (fr)
CA (1) CA1236592A (fr)
DE (1) DE3570012D1 (fr)
ES (1) ES8705995A1 (fr)
IN (1) IN166497B (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0252745A3 (fr) * 1986-07-11 1990-01-24 AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY MINISTRY OF INTERNATIONAL TRADE & INDUSTRY Dispositif de commande de déplacement relatif
JPS63304103A (ja) * 1987-06-05 1988-12-12 Hitachi Ltd 走査表面顕微鏡
JPH0319961U (fr) * 1988-06-20 1991-02-27
US5019707A (en) * 1989-03-23 1991-05-28 International Business Machines Corporation High speed waveform sampling with a tunneling microscope
DE3918249C1 (fr) * 1989-06-05 1990-09-13 Forschungszentrum Juelich Gmbh, 5170 Juelich, De
US5047649A (en) * 1990-10-09 1991-09-10 International Business Machines Corporation Method and apparatus for writing or etching narrow linewidth patterns on insulating materials
US5260577A (en) * 1992-11-09 1993-11-09 International Business Machines Corp. Sample carriage for scanning probe microscope
JP3153366B2 (ja) * 1992-12-04 2001-04-09 日本電子株式会社 走査トンネル顕微鏡
US5898176A (en) * 1994-12-27 1999-04-27 Japan Science And Technology Corp. Element analyzing method with a scanning type probe microscope and super short high voltage pulse applying method using the element analyzing method
JP2000106121A (ja) * 1998-07-29 2000-04-11 Jeol Ltd 電子顕微鏡あるいはその類似装置
GB0002367D0 (en) * 2000-02-03 2000-03-22 Limited Spectrometer
SE0103781D0 (sv) * 2001-11-12 2001-11-12 Nanofactory Instruments Ab Mätanordning för elektronmikroskop
CN101366095B (zh) * 2005-12-02 2010-11-10 阿利斯公司 离子源、系统和方法
CN102496541B (zh) * 2011-12-08 2014-04-30 北京大学 一种场发射电子源发叉钨丝成型装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2151167C3 (de) * 1971-10-14 1974-05-09 Siemens Ag, 1000 Berlin Und 8000 Muenchen Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis
US3809899A (en) * 1972-08-17 1974-05-07 Tektronix Inc Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
US4550257A (en) * 1984-06-29 1985-10-29 International Business Machines Corporation Narrow line width pattern fabrication
US4618767A (en) * 1985-03-22 1986-10-21 International Business Machines Corporation Low-energy scanning transmission electron microscope

Also Published As

Publication number Publication date
CN86100036A (zh) 1986-07-23
DE3570012D1 (en) 1989-06-08
ES8705995A1 (es) 1987-05-16
CA1236592A (fr) 1988-05-10
JPH0445930B2 (fr) 1992-07-28
EP0189498A1 (fr) 1986-08-06
ES551308A0 (es) 1987-05-16
US4698502A (en) 1987-10-06
EP0189498B1 (fr) 1989-05-03
CN1009145B (zh) 1990-08-08
JPS61176044A (ja) 1986-08-07

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