IN166497B - - Google Patents
Info
- Publication number
- IN166497B IN166497B IN992/MAS/85A IN992MA1985A IN166497B IN 166497 B IN166497 B IN 166497B IN 992MA1985 A IN992MA1985 A IN 992MA1985A IN 166497 B IN166497 B IN 166497B
- Authority
- IN
- India
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP85100892A EP0189498B1 (de) | 1985-01-29 | 1985-01-29 | Feldemissions-Auger-Rasterelektronenmikroskop |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IN166497B true IN166497B (de) | 1990-05-19 |
Family
ID=8193262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IN992/MAS/85A IN166497B (de) | 1985-01-29 | 1985-12-09 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4698502A (de) |
| EP (1) | EP0189498B1 (de) |
| JP (1) | JPS61176044A (de) |
| CN (1) | CN1009145B (de) |
| CA (1) | CA1236592A (de) |
| DE (1) | DE3570012D1 (de) |
| ES (1) | ES8705995A1 (de) |
| IN (1) | IN166497B (de) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0252745A3 (de) * | 1986-07-11 | 1990-01-24 | AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY MINISTRY OF INTERNATIONAL TRADE & INDUSTRY | Gerät zum Steuern relativer Verschiebungen |
| JPS63304103A (ja) * | 1987-06-05 | 1988-12-12 | Hitachi Ltd | 走査表面顕微鏡 |
| JPH0319961U (de) * | 1988-06-20 | 1991-02-27 | ||
| US5019707A (en) * | 1989-03-23 | 1991-05-28 | International Business Machines Corporation | High speed waveform sampling with a tunneling microscope |
| DE3918249C1 (de) * | 1989-06-05 | 1990-09-13 | Forschungszentrum Juelich Gmbh, 5170 Juelich, De | |
| US5047649A (en) * | 1990-10-09 | 1991-09-10 | International Business Machines Corporation | Method and apparatus for writing or etching narrow linewidth patterns on insulating materials |
| US5260577A (en) * | 1992-11-09 | 1993-11-09 | International Business Machines Corp. | Sample carriage for scanning probe microscope |
| JP3153366B2 (ja) * | 1992-12-04 | 2001-04-09 | 日本電子株式会社 | 走査トンネル顕微鏡 |
| WO1996020406A1 (fr) * | 1994-12-27 | 1996-07-04 | Research Development Corporation Of Japan | Procede d'analyse elementaire par microscope a sonde de balayage utilisant un procede d'application de haute tension a impulsions ultracourtes |
| JP2000106121A (ja) * | 1998-07-29 | 2000-04-11 | Jeol Ltd | 電子顕微鏡あるいはその類似装置 |
| GB0002367D0 (en) * | 2000-02-03 | 2000-03-22 | Limited | Spectrometer |
| SE0103781D0 (sv) * | 2001-11-12 | 2001-11-12 | Nanofactory Instruments Ab | Mätanordning för elektronmikroskop |
| CN101371326B (zh) * | 2005-12-02 | 2010-05-19 | 阿利斯公司 | 离子源、系统和方法 |
| CN102496541B (zh) * | 2011-12-08 | 2014-04-30 | 北京大学 | 一种场发射电子源发叉钨丝成型装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2151167C3 (de) * | 1971-10-14 | 1974-05-09 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis |
| US3809899A (en) * | 1972-08-17 | 1974-05-07 | Tektronix Inc | Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope |
| CH643397A5 (de) * | 1979-09-20 | 1984-05-30 | Ibm | Raster-tunnelmikroskop. |
| US4550257A (en) * | 1984-06-29 | 1985-10-29 | International Business Machines Corporation | Narrow line width pattern fabrication |
| US4618767A (en) * | 1985-03-22 | 1986-10-21 | International Business Machines Corporation | Low-energy scanning transmission electron microscope |
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1985
- 1985-01-29 DE DE8585100892T patent/DE3570012D1/de not_active Expired
- 1985-01-29 EP EP85100892A patent/EP0189498B1/de not_active Expired
- 1985-11-13 JP JP60253017A patent/JPS61176044A/ja active Granted
- 1985-11-15 CA CA000495484A patent/CA1236592A/en not_active Expired
- 1985-12-09 IN IN992/MAS/85A patent/IN166497B/en unknown
-
1986
- 1986-01-03 CN CN86100036A patent/CN1009145B/zh not_active Expired
- 1986-01-24 US US06/821,946 patent/US4698502A/en not_active Expired - Lifetime
- 1986-01-28 ES ES551308A patent/ES8705995A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE3570012D1 (en) | 1989-06-08 |
| ES8705995A1 (es) | 1987-05-16 |
| EP0189498B1 (de) | 1989-05-03 |
| CN1009145B (zh) | 1990-08-08 |
| JPH0445930B2 (de) | 1992-07-28 |
| US4698502A (en) | 1987-10-06 |
| EP0189498A1 (de) | 1986-08-06 |
| CA1236592A (en) | 1988-05-10 |
| JPS61176044A (ja) | 1986-08-07 |
| CN86100036A (zh) | 1986-07-23 |
| ES551308A0 (es) | 1987-05-16 |