IL83315A0 - Quartz vacuum chamber base for a chemical vapor deposition apparatus
- Google Patents
Quartz vacuum chamber base for a chemical vapor deposition apparatus
Info
Publication number
IL83315A0
IL83315A0IL83315AIL8331587AIL83315A0IL 83315 A0IL83315 A0IL 83315A0IL 83315 AIL83315 AIL 83315AIL 8331587 AIL8331587 AIL 8331587AIL 83315 A0IL83315 A0IL 83315A0
Authority
IL
Israel
Prior art keywords
vapor deposition
vacuum chamber
chemical vapor
deposition apparatus
chamber base
Prior art date
Application number
IL83315A
Original Assignee
Anicon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/528,193external-prioritypatent/US4539933A/en
Application filed by Anicon IncfiledCriticalAnicon Inc
Priority to IL83315ApriorityCriticalpatent/IL83315A0/en
Publication of IL83315A0publicationCriticalpatent/IL83315A0/en