IL83315A0 - Quartz vacuum chamber base for a chemical vapor deposition apparatus - Google Patents

Quartz vacuum chamber base for a chemical vapor deposition apparatus

Info

Publication number
IL83315A0
IL83315A0 IL83315A IL8331587A IL83315A0 IL 83315 A0 IL83315 A0 IL 83315A0 IL 83315 A IL83315 A IL 83315A IL 8331587 A IL8331587 A IL 8331587A IL 83315 A0 IL83315 A0 IL 83315A0
Authority
IL
Israel
Prior art keywords
vapor deposition
vacuum chamber
chemical vapor
deposition apparatus
chamber base
Prior art date
Application number
IL83315A
Original Assignee
Anicon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/528,193 external-priority patent/US4539933A/en
Application filed by Anicon Inc filed Critical Anicon Inc
Priority to IL83315A priority Critical patent/IL83315A0/en
Publication of IL83315A0 publication Critical patent/IL83315A0/en

Links

IL83315A 1983-08-31 1987-07-24 Quartz vacuum chamber base for a chemical vapor deposition apparatus IL83315A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL83315A IL83315A0 (en) 1983-08-31 1987-07-24 Quartz vacuum chamber base for a chemical vapor deposition apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US06/528,193 US4539933A (en) 1983-08-31 1983-08-31 Chemical vapor deposition apparatus
IL72796A IL72796A (en) 1983-08-31 1984-08-29 Chemical vapor deposition apparatus
IL83315A IL83315A0 (en) 1983-08-31 1987-07-24 Quartz vacuum chamber base for a chemical vapor deposition apparatus

Publications (1)

Publication Number Publication Date
IL83315A0 true IL83315A0 (en) 1987-12-31

Family

ID=27271051

Family Applications (1)

Application Number Title Priority Date Filing Date
IL83315A IL83315A0 (en) 1983-08-31 1987-07-24 Quartz vacuum chamber base for a chemical vapor deposition apparatus

Country Status (1)

Country Link
IL (1) IL83315A0 (en)

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