IL79446A - Cryopump with exhaust filter - Google Patents

Cryopump with exhaust filter

Info

Publication number
IL79446A
IL79446A IL79446A IL7944686A IL79446A IL 79446 A IL79446 A IL 79446A IL 79446 A IL79446 A IL 79446A IL 7944686 A IL7944686 A IL 7944686A IL 79446 A IL79446 A IL 79446A
Authority
IL
Israel
Prior art keywords
cryopump
exhaust filter
exhaust
filter
Prior art date
Application number
IL79446A
Other languages
English (en)
Other versions
IL79446A0 (en
Original Assignee
Helix Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25045958&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IL79446(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Helix Tech Corp filed Critical Helix Tech Corp
Publication of IL79446A0 publication Critical patent/IL79446A0/xx
Publication of IL79446A publication Critical patent/IL79446A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
IL79446A 1985-07-19 1986-07-17 Cryopump with exhaust filter IL79446A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/757,003 US4655046A (en) 1985-07-19 1985-07-19 Cryopump with exhaust filter

Publications (2)

Publication Number Publication Date
IL79446A0 IL79446A0 (en) 1986-10-31
IL79446A true IL79446A (en) 1990-12-23

Family

ID=25045958

Family Applications (1)

Application Number Title Priority Date Filing Date
IL79446A IL79446A (en) 1985-07-19 1986-07-17 Cryopump with exhaust filter

Country Status (7)

Country Link
US (1) US4655046A (ja)
EP (1) EP0232325B1 (ja)
JP (1) JPH0786351B2 (ja)
CA (1) CA1252300A (ja)
DE (1) DE3669189D1 (ja)
IL (1) IL79446A (ja)
WO (1) WO1987000586A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0466776B1 (en) * 1989-04-07 1994-01-12 Helix Technology Corporation Pressure relief valve and cryopump utilizing the same
WO1993005859A1 (en) * 1991-09-19 1993-04-01 The United States Of America, As Represented By The Secretary Of The Department Of Health And Human Services Miniature cryosorption vacuum pump
US5228299A (en) * 1992-04-16 1993-07-20 Helix Technology Corporation Cryopump water drain
US5974809A (en) * 1998-01-21 1999-11-02 Helix Technology Corporation Cryopump with an exhaust filter
JP5178926B2 (ja) * 2010-02-08 2013-04-10 株式会社日立ハイテクノロジーズ 荷電粒子顕微鏡及びイオン顕微鏡
JP5822747B2 (ja) * 2012-02-02 2015-11-24 住友重機械工業株式会社 クライオポンプ
US10113793B2 (en) * 2012-02-08 2018-10-30 Quantum Design International, Inc. Cryocooler-based gas scrubber
US9186601B2 (en) 2012-04-20 2015-11-17 Sumitomo (Shi) Cryogenics Of America Inc. Cryopump drain and vent
US20170119205A1 (en) * 2015-10-29 2017-05-04 General Electric Company Water filter assembly with protective check valve screen
WO2018112670A1 (en) * 2016-12-23 2018-06-28 Westport Power Inc. Apparatus and method for filtering cryogenic fluid

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
FR1549434A (ja) * 1967-10-20 1968-12-13
JPS51118464A (en) * 1975-04-10 1976-10-18 Yaskawa Electric Mfg Co Ltd Multi-functional detector of position, velocity and direction
US4311023A (en) * 1980-05-15 1982-01-19 Watral James P Air conditioning servicing apparatus
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4446702A (en) * 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump

Also Published As

Publication number Publication date
US4655046A (en) 1987-04-07
EP0232325A1 (en) 1987-08-19
JPH0786351B2 (ja) 1995-09-20
WO1987000586A1 (en) 1987-01-29
JPS63500318A (ja) 1988-02-04
CA1252300A (en) 1989-04-11
DE3669189D1 (de) 1990-04-05
IL79446A0 (en) 1986-10-31
EP0232325B1 (en) 1990-02-28

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Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees