IL66762A - Apparatus for use in photo-exposing semiconductor wafers - Google Patents

Apparatus for use in photo-exposing semiconductor wafers

Info

Publication number
IL66762A
IL66762A IL66762A IL6676280A IL66762A IL 66762 A IL66762 A IL 66762A IL 66762 A IL66762 A IL 66762A IL 6676280 A IL6676280 A IL 6676280A IL 66762 A IL66762 A IL 66762A
Authority
IL
Israel
Prior art keywords
photo
semiconductor wafers
exposing semiconductor
exposing
wafers
Prior art date
Application number
IL66762A
Original Assignee
Electromask Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electromask Inc filed Critical Electromask Inc
Priority claimed from IL59629A external-priority patent/IL59629A/en
Publication of IL66762A publication Critical patent/IL66762A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
    • G03F9/7053—Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves
    • G03F9/7057—Gas flow, e.g. for focusing, leveling or gap setting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
IL66762A 1979-05-11 1980-03-14 Apparatus for use in photo-exposing semiconductor wafers IL66762A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US3834979A 1979-05-11 1979-05-11
IL59629A IL59629A (en) 1979-05-11 1980-03-14 Apparatus and process for photoexposing semiconductor wafers

Publications (1)

Publication Number Publication Date
IL66762A true IL66762A (en) 1983-03-31

Family

ID=26320834

Family Applications (2)

Application Number Title Priority Date Filing Date
IL66762A IL66762A (en) 1979-05-11 1980-03-14 Apparatus for use in photo-exposing semiconductor wafers
IL66762A IL66762A0 (en) 1979-05-11 1982-09-10 Apparatus for use in photo-exposing semiconductor wafers

Family Applications After (1)

Application Number Title Priority Date Filing Date
IL66762A IL66762A0 (en) 1979-05-11 1982-09-10 Apparatus for use in photo-exposing semiconductor wafers

Country Status (1)

Country Link
IL (2) IL66762A (en)

Also Published As

Publication number Publication date
IL66762A0 (en) 1982-12-31

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