IL327469A - מערכות ושיטות לקירור במערכות בדיקה - Google Patents

מערכות ושיטות לקירור במערכות בדיקה

Info

Publication number
IL327469A
IL327469A IL327469A IL32746926A IL327469A IL 327469 A IL327469 A IL 327469A IL 327469 A IL327469 A IL 327469A IL 32746926 A IL32746926 A IL 32746926A IL 327469 A IL327469 A IL 327469A
Authority
IL
Israel
Prior art keywords
systems
cooling
methods
inspection
inspection systems
Prior art date
Application number
IL327469A
Other languages
English (en)
Inventor
Dongchi Yu
Yi-Chen Lin
Shao-Wei Fu
Huan-Yu Chang
Yu Liu
Chenxi Fu
Original Assignee
Asml Netherlands B V
Dongchi Yu
Lin Yi Chen
Fu Shao Wei
Chang Huan Yu
Yu Liu
Chenxi Fu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands B V, Dongchi Yu, Lin Yi Chen, Fu Shao Wei, Chang Huan Yu, Yu Liu, Chenxi Fu filed Critical Asml Netherlands B V
Publication of IL327469A publication Critical patent/IL327469A/he

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/002Cooling arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001Maintaining constant desired temperature
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007Holding mechanisms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
IL327469A 2023-10-23 2024-10-16 מערכות ושיטות לקירור במערכות בדיקה IL327469A (he)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202363592540P 2023-10-23 2023-10-23
PCT/EP2024/079261 WO2025087776A1 (en) 2023-10-23 2024-10-16 Systems and methods for cooling in inspection systems

Publications (1)

Publication Number Publication Date
IL327469A true IL327469A (he) 2026-05-01

Family

ID=93213686

Family Applications (1)

Application Number Title Priority Date Filing Date
IL327469A IL327469A (he) 2023-10-23 2024-10-16 מערכות ושיטות לקירור במערכות בדיקה

Country Status (3)

Country Link
IL (1) IL327469A (he)
TW (1) TW202538799A (he)
WO (1) WO2025087776A1 (he)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12444571B2 (en) * 2023-10-25 2025-10-14 Applied Materials, Inc. Plasma source with a coolant leakage detection system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101037139B1 (ko) * 2008-09-10 2011-05-26 한국기초과학지원연구원 온도변화에 따른 다이나믹한 결정방위 측정장치
US10204761B2 (en) * 2014-10-09 2019-02-12 Hitachi High-Technologies Corporation Charged particle beam device, electron microscope and sample observation method

Also Published As

Publication number Publication date
WO2025087776A1 (en) 2025-05-01
TW202538799A (zh) 2025-10-01

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