IL327469A - Systems and methods for cooling in inspection systems - Google Patents
Systems and methods for cooling in inspection systemsInfo
- Publication number
- IL327469A IL327469A IL327469A IL32746926A IL327469A IL 327469 A IL327469 A IL 327469A IL 327469 A IL327469 A IL 327469A IL 32746926 A IL32746926 A IL 32746926A IL 327469 A IL327469 A IL 327469A
- Authority
- IL
- Israel
- Prior art keywords
- systems
- cooling
- methods
- inspection
- inspection systems
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202363592540P | 2023-10-23 | 2023-10-23 | |
| PCT/EP2024/079261 WO2025087776A1 (en) | 2023-10-23 | 2024-10-16 | Systems and methods for cooling in inspection systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL327469A true IL327469A (en) | 2026-05-01 |
Family
ID=93213686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL327469A IL327469A (en) | 2023-10-23 | 2024-10-16 | Systems and methods for cooling in inspection systems |
Country Status (3)
| Country | Link |
|---|---|
| IL (1) | IL327469A (en) |
| TW (1) | TW202538799A (en) |
| WO (1) | WO2025087776A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12444571B2 (en) * | 2023-10-25 | 2025-10-14 | Applied Materials, Inc. | Plasma source with a coolant leakage detection system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101037139B1 (en) * | 2008-09-10 | 2011-05-26 | 한국기초과학지원연구원 | Dynamic crystal orientation measuring device according to temperature change |
| US10204761B2 (en) * | 2014-10-09 | 2019-02-12 | Hitachi High-Technologies Corporation | Charged particle beam device, electron microscope and sample observation method |
-
2024
- 2024-10-07 TW TW113138028A patent/TW202538799A/en unknown
- 2024-10-16 IL IL327469A patent/IL327469A/en unknown
- 2024-10-16 WO PCT/EP2024/079261 patent/WO2025087776A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2025087776A1 (en) | 2025-05-01 |
| TW202538799A (en) | 2025-10-01 |
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