IL326243A - יישור מקומי מבוסס למידה עבור מטרולוגיה של מיקום קצה - Google Patents

יישור מקומי מבוסס למידה עבור מטרולוגיה של מיקום קצה

Info

Publication number
IL326243A
IL326243A IL326243A IL32624326A IL326243A IL 326243 A IL326243 A IL 326243A IL 326243 A IL326243 A IL 326243A IL 32624326 A IL32624326 A IL 32624326A IL 326243 A IL326243 A IL 326243A
Authority
IL
Israel
Prior art keywords
learning
local alignment
edge placement
based local
placement metrology
Prior art date
Application number
IL326243A
Other languages
English (en)
Inventor
Maxim Pisarenco
Kraaij Markus Gerardus Martinus Maria Van
Lingling Pu
Original Assignee
Asml Netherlands Bv
Maxim Pisarenco
Kraaij Markus Gerardus Martinus Maria Van
Lingling Pu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv, Maxim Pisarenco, Kraaij Markus Gerardus Martinus Maria Van, Lingling Pu filed Critical Asml Netherlands Bv
Publication of IL326243A publication Critical patent/IL326243A/he

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/82—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using neural networks
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/30—Determination of transform parameters for the alignment of images, i.e. image registration
    • G06T7/33—Determination of transform parameters for the alignment of images, i.e. image registration using feature-based methods
    • G06T7/337—Determination of transform parameters for the alignment of images, i.e. image registration using feature-based methods involving reference images or patches

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Evolutionary Computation (AREA)
  • Artificial Intelligence (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Computing Systems (AREA)
  • Databases & Information Systems (AREA)
  • General Health & Medical Sciences (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Multimedia (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image Analysis (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
IL326243A 2023-08-22 2024-07-24 יישור מקומי מבוסס למידה עבור מטרולוגיה של מיקום קצה IL326243A (he)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202363534114P 2023-08-22 2023-08-22
PCT/EP2024/071028 WO2025040361A1 (en) 2023-08-22 2024-07-24 Learning-based local alignment for edge placement metrology

Publications (1)

Publication Number Publication Date
IL326243A true IL326243A (he) 2026-03-01

Family

ID=92106522

Family Applications (1)

Application Number Title Priority Date Filing Date
IL326243A IL326243A (he) 2023-08-22 2024-07-24 יישור מקומי מבוסס למידה עבור מטרולוגיה של מיקום קצה

Country Status (4)

Country Link
CN (1) CN121713214A (he)
IL (1) IL326243A (he)
TW (1) TW202529038A (he)
WO (1) WO2025040361A1 (he)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9691588B2 (en) 2015-03-10 2017-06-27 Hermes Microvision, Inc. Apparatus of plural charged-particle beams
US20170021541A1 (en) 2015-03-17 2017-01-26 Edward Smith Methods for cooling molds
CA2991143C (en) 2015-07-22 2020-01-21 iMFLUX Inc. Method of injection molding using one or more strain gauges as a virtual sensor
WO2019237072A1 (en) 2018-06-08 2019-12-12 Nvidia Corporation Virtualized intrusion detection and prevention in autonomous vehicles
EP3893057A1 (en) 2020-04-10 2021-10-13 ASML Netherlands B.V. Aligning a distorted image

Also Published As

Publication number Publication date
WO2025040361A1 (en) 2025-02-27
TW202529038A (zh) 2025-07-16
CN121713214A (zh) 2026-03-20

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