IL326243A - Learning-based local alignment for edge placement metrology - Google Patents
Learning-based local alignment for edge placement metrologyInfo
- Publication number
- IL326243A IL326243A IL326243A IL32624326A IL326243A IL 326243 A IL326243 A IL 326243A IL 326243 A IL326243 A IL 326243A IL 32624326 A IL32624326 A IL 32624326A IL 326243 A IL326243 A IL 326243A
- Authority
- IL
- Israel
- Prior art keywords
- learning
- local alignment
- edge placement
- based local
- placement metrology
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
- G06V10/82—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using neural networks
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/30—Determination of transform parameters for the alignment of images, i.e. image registration
- G06T7/33—Determination of transform parameters for the alignment of images, i.e. image registration using feature-based methods
- G06T7/337—Determination of transform parameters for the alignment of images, i.e. image registration using feature-based methods involving reference images or patches
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Evolutionary Computation (AREA)
- Artificial Intelligence (AREA)
- Health & Medical Sciences (AREA)
- Quality & Reliability (AREA)
- Computing Systems (AREA)
- Databases & Information Systems (AREA)
- General Health & Medical Sciences (AREA)
- Medical Informatics (AREA)
- Software Systems (AREA)
- Multimedia (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Image Analysis (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202363534114P | 2023-08-22 | 2023-08-22 | |
| PCT/EP2024/071028 WO2025040361A1 (en) | 2023-08-22 | 2024-07-24 | Learning-based local alignment for edge placement metrology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL326243A true IL326243A (en) | 2026-03-01 |
Family
ID=92106522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL326243A IL326243A (en) | 2023-08-22 | 2024-07-24 | Learning-based local alignment for edge placement metrology |
Country Status (4)
| Country | Link |
|---|---|
| CN (1) | CN121713214A (en) |
| IL (1) | IL326243A (en) |
| TW (1) | TW202529038A (en) |
| WO (1) | WO2025040361A1 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9691588B2 (en) | 2015-03-10 | 2017-06-27 | Hermes Microvision, Inc. | Apparatus of plural charged-particle beams |
| US20170021541A1 (en) | 2015-03-17 | 2017-01-26 | Edward Smith | Methods for cooling molds |
| CA2991143C (en) | 2015-07-22 | 2020-01-21 | iMFLUX Inc. | Method of injection molding using one or more strain gauges as a virtual sensor |
| WO2019237072A1 (en) | 2018-06-08 | 2019-12-12 | Nvidia Corporation | Virtualized intrusion detection and prevention in autonomous vehicles |
| EP3893057A1 (en) | 2020-04-10 | 2021-10-13 | ASML Netherlands B.V. | Aligning a distorted image |
-
2024
- 2024-07-24 IL IL326243A patent/IL326243A/en unknown
- 2024-07-24 CN CN202480052654.0A patent/CN121713214A/en active Pending
- 2024-07-24 WO PCT/EP2024/071028 patent/WO2025040361A1/en active Pending
- 2024-08-07 TW TW113129498A patent/TW202529038A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2025040361A1 (en) | 2025-02-27 |
| TW202529038A (en) | 2025-07-16 |
| CN121713214A (en) | 2026-03-20 |
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