IL324955A - Monitoring for unexpected impurities in liquids - Google Patents

Description

WO 2024/254132 PCT / US2024 / 0325 MONITORING FOR UNEXPECTED IMPURITIES IN LIQUIDS CLAIM OF PRIORITY [ 0000 ] This application claims the priority benefit to U.S. Provisional Patent Application Serial No. 63 / 471,114 , filed on 5 June 2023 , and entitled " UNEXPECTED IMPURITIES MONITORING IN LIQUIDS , " which is incorporated by reference herein in its entirety .

TECHNICAL FIELD [ 0001 ] The subject matter disclosed herein relates generally , but not by way of limitation , to monitoring a liquid for unexpected impurities based on , for example , particle content or other unexpected impurities .

BACKGROUND [ 0002 ] Monitoring a liquid for contaminants ( e.g. , particulates and / or biological components ) is an important part of many commercial and industrial processes . For example , in the semiconductor fabrication industry , ultra - pure water is monitored for contaminants that can impair yields . Other monitoring examples can be found in the pharmaceutical industry , the food industry , and many other commercial sectors . [ 0003 ] Impurities are frequently always present in a liquid at some baseline level . However , unexpected impurities above a baseline can indicate a potential major failure in a purification step . The failure can relate to exhaustion of resin capacity , contamination of the liquid feed , channeling within the media , bed upsets , and mechanical defects . [ 0004 ] Impurities can be monitored by measuring resistivity ( or conductivity ) , a potential of hydrogen ( pH levels ) , however such technologies are typically low resolution . In addition , impurities can be monitored by measuring total dissolved solids or ion concentration , however these methods rely on principles of chemistry and require replenishing consumable materials . Consequently , these methods cannot be implemented easily or they cannot provide rapid monitoring results . 1 WO 2024/254132 PCT / US2024 / 0325 [ 0005 ] For example , a Mettler Toledo 2850Si silica analyzer operates using grab sample measurements at a rate of six samples per hour and requires a consumable . Similarly , a Sievers UPW Boron Analyzer operates using samples taken at a rate of 10 per hour and also requires a consumable material , such as a reagent . [ 0006 ] Various known - methods discuss forming an aerosol from a liquid sample to be analyzed , evaporating formed droplets in the aerosol to dryness , and detecting particles , either by particle size and / or particle concentration per unit volume . The methods also refer to an apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulates . Apparatuses to perform such methods may include a droplet former , a dryer communicatively connected to the droplet former , and a detector communicatively connected to the evaporator for detecting particles . However , none of the known methods can operate continuously to provide results in substantially real - time . Nor can any of the known methods be configured to monitor from one or more various sample points within a water system and without the use of consumables , such as reagents . [ 0007 ] Therefore , in various embodiments described herein , the disclosed subject - matter describes a system to monitor for unexpected impurities emanating from various sample points in an ultra - pure water system , in a substantially real - time monitoring fashion , while not requiring chemicals such as reagents . In various embodiments , a high - sensitivity liquid - particle counter is used to monitor for unexpected impurities in the form of particulates in ultra - pure liquids . In various embodiments , the system to monitor for unexpected impurities can also include , in addition to or instead of the high - sensitivity liquid - particle counter , a biological - component detection system . 21 WO 2024/254132 PCT / US2024 / 0325 [ 0008 ] The information described in this section is provided to offer a person of ordinary skill in the art a context for the following disclosed subject- matter and should not be considered as admitted prior art .

SUMMARY [ 0009 ] In one exemplary embodiment , the disclosed subject - matter describes a system to detect impurities in liquids . The system includes a liquid particle - detection system having an atomizer coupled fluidically to a plurality of operable valves and at least one particle counter . Each of the plurality of operable valves is to be coupled downstream from a separate one of a plurality of processing stages in an ultra - pure water - processing system . The atomizer is to produce a spray of liquid from a selected and opened one of the plurality of operable valves through which a water sample is provided . The at least one particle counter is arranged to provide at least one parameter , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled . [ 00010 ] In another exemplary embodiment , the disclosed subject - matter describes a method for monitoring an ultra - pure water ( UPW ) system . The method includes selecting and opening one of a plurality of operable valves , where respective ones of each of the plurality of operable valves are coupled downstream from one of a plurality of processing stages within the UPW system ; obtaining a water sample from the selected one of the plurality of operable valves ; atomizing the sampled water ; and providing at least one parameter from the atomized water by a particle detector , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled during a time period in which the water sample is provided . [ 00011 ] In another exemplary embodiment , the disclosed subject - matter describes a computer - readable medium containing instructions that , when executed by a machine , cause the machine to perform operations for 3 WO 2024/254132 PCT / US2024 / 0325 monitoring an ultra - pure water ( UPW ) system , where the operations include selecting and opening one of a plurality of operable valves , respective ones of each of the plurality of operable valves coupled downstream from one of a plurality of processing stages within the UPW system ; obtaining a water sample from the selected one of the plurality of operable valves ; atomizing the sampled water ; and providing at least one parameter from the atomized water by a particle detector , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled during a time period in which the water sample is provided . 4 WO 2024/254132 PCT / US2024 / 0325 BRIEF DESCRIPTION OF FIGURES [ 00012 ] Various ones of the appended drawings merely illustrate examples of various implementations of the disclosed subject - matter and should not be considered as limiting its scope . [ 00013 ] FIG . 1 shows an exemplary embodiment of a system to monitor , for example , particulate counts and / or particulate concentrations from an ultra- pure water ( UPW ) system , in accordance with various embodiments of the disclosed subject - matter ; [ 00014 ] FIG . 2 shows an example of a graph of particle count as a function of time that depicts an onset of a breakthrough condition in at least one of a plurality of stages in the UPW system of FIG . 1 ; [ 00015 ] FIG . 3 shows an example of a graph of particle count and total organic carbon ( TOC ) , both as a function of time , indicating electrical resistivity and TOC levels both before the breakthrough event and near saturation of FIG . 2 ; [ 00016 ] FIG . 4 shows a graph of particle concentration as a function of particle diameter that depicts both the particle concentration after a breakthrough event and a typical UPW baseline particle concentration ; [ 00017 ] FIG . 5 shows an example of a graph of particle count as a function of time that depicts an onset of a breakthrough condition in one of a plurality of stages in the UPW system of FIG . 1 ; [ 00018 ] FIG . 6 shows an example of a method to monitor and detect a breakthrough event from a UPW system ; and [ 00019 ] FIG . 7 shows a block diagram of an example comprising a machine upon which any one or more of the techniques ( e.g. , methods , analysis , or methodologies ) discussed herein may be performed .

WO 2024/254132 PCT / US2024 / 0325 DETAILED DESCRIPTION [ 00020 ] The following description includes a discussion of figures having illustrations given by way of examples of implementations of the disclosed subject - matter . The drawings should be understood by way of example , and not by way of limitation . As used herein , references to one or more " embodiments " are understood to be describing a particular feature , structure , or characteristic included in at least one implementation of the disclosed subject - matter . Thus , phrases such as " in one embodiment , " " in an exemplary embodiment , " or " in an alternative embodiment " appearing herein describe various embodiments and implementations of the disclosed subject- matter , and do not necessarily all refer to the same embodiment . However , the embodiments are also not necessarily mutually exclusive from one another . To identify easily the discussion of any particular element or act , the most significant digit or digits in a reference number ( e.g. , element number ) refer to the figure ( " FIG . " ) number in which that element or act is first introduced . [ 00021 ] In various embodiments described herein , the disclosed subject- matter describes a system to monitor for unexpected impurities emanating from various stages in an ultra - pure water system . In various embodiments , a high - sensitivity liquid - particle counter is used to monitor for unexpected impurities in the form of particulates in ultra - pure liquids . The liquid - particle counter includes a droplet atomizer and a condensation particle counter . In various embodiments , the system to monitor for unexpected impurities can also include , in addition to or instead of the high - sensitivity liquid - particle counter , a biological - component detection system . The biological - component detection system can be in parallel with or is series with the high - sensitivity liquid - particle counter . Direct detection ( e.g. , counting ) of unexpected nanoparticles or biological components can indicate the presence of excess impurities in the ultra - pure liquids . 6 WO 2024/254132 PCT / US2024 / 0325 [ 00022 ] In various examples , the detection system ( e.g. , particulates and / or biological components ) is configured to detect a breakthrough of , for example , ion - exchange resins in a mixed - media filter bed , such as that commonly used in ultra - pure water treatment . A breakthrough can also be considered as a mechanical failure from one of a plurality of filtration ( i.e. , filter ) stages , as described herein . A " breakthrough " can therefore be considered to be a time- wise exponential increase in nanoparticle concentration or biological concentration in the water being monitored . In addition to breakthrough detection , various embodiments can be configured for monitoring a filter rinse - down process . [ 00023 ] In various embodiments described herein , liquid can be sampled from various locations ( e.g. , at different filtration stages ) in a purification process and monitored using one or more embodiments of the disclosed subject - matter . Monitoring for particulates can be conducted using an aerosol methodology conducted substantially in near real - time without resort to processing using a chemistry - based technology ( e.g. , such as reagents ) . Monitoring for biological components can be conducted using , for example , a fluorescence detector . Additionally , monitoring of sampled water can be conducted at any stage of the liquid - processing system . [ 00024 ] Each of these non - limiting embodiments described herein can stand on its own , or can be combined in various permutations or combinations with one or more of the other embodiments . [ 00025 ] The disclosed subject - matter will now be described in detail with reference to a few general and specific embodiments as illustrated in various ones of the accompanying drawings . In the following description , numerous specific details are set forth in order to provide a thorough understanding of the disclosed subject - matter . It will be apparent , however , to a person of ordinary skill in the art upon reading and understanding the disclosed subject - matter , that the disclosed subject - matter may be practiced without some or all of these specific details . In other instances , well - known process 7 WO 2024/254132 PCT / US2024 / 0325 steps , construction techniques , or structures have not been described in detail so as not to obscure the disclosed subject - matter . [ 00026 ] FIG . 1 shows an exemplary embodiment of a system 100 to monitor , for example , particulate counts and / or particulate concentrations from an ultra - pure water ( UPW ) processing system 110 , in accordance with various embodiments of the disclosed subject - matter . The inlet - water supply ( i.e. , water in ) for the UPW system 110 shown can include a municipal water supply . When the water is processed by the system shown , a supply of ultra- pure water is provided at the outlet - water supply ( i.e. , UPW out ) . [ 00027 ] The UPW system 110 of FIG . 1 represents a typical system found in industry and is shown to include a deionizer stage 111 , an ultra - violet ( UV ) purifier stage 113 , a mixed - bed ion - exchange stage 115 , a pre - filter stage 117 , and a final - filter stage 119. Each of the water - processing stages 111 through 119 , is shown to have an operable valve 101 through 109A fluidically ( or hydraulically ) coupled downstream and thereto . Each valve can be manipulated or controlled ( e.g. , opened ) to provide a supply of sample water to , for example , a liquid - particle counter ( LPC ) system 120 , described below . Depending on the industry in which the UPW system 110 is used , the number of stages , and possible replication of stages , may vary depending on a level of water purity used within that industry . [ 00028 ] The deionizer stage 111 uses ion exchange to separate the water from molecules having either a positive - electrical charge or a negative- electrical charge from the inlet - water supply . The deionizer stage 111 thereby allows removal of ionic - dissolved salts and minerals from the inlet - water supply . [ 00029 ] The UV purifier stage 113 exposes biological components ( such as , for example , living organisms such as viruses and bacteria ) to a germicidal UV wavelength , thereby helping to disinfect the water . 00 WO 2024/254132 PCT / US2024 / 0325 [ 00030 ] The mixed - bed ion - exchange stage 115 is typically a single - vessel ion exchanger containing both cations and anion resins . The mixed - bed ion- exchange stage 115 is used to produce demineralized water . [ 00031 ] Each of the pre - filter stage 117 and the final - filter stage 119 may include different levels of semipermeable filters having differing pore sizes . For example , the pre - filter stage 117 may have filters with a pore size of microns or smaller . The final - filter stage 119 may have filters with a pore size of 0.001 micron ( 1 nanometer ) or smaller . A selection of pore size is based on the industry in which the UPW system 110 is used , and a level of water purity used within that industry . [ 00032 ] As noted , the UPW system 110 may include only a portion of the stages shown , or may contain additional stages ( or replications of stages shown ) . Each of the stages may be arranged in a series configuration , as shown , or in a parallel configuration , or in a series - parallel configuration based , at least partially , on a level of water purification used within a given industry . [ 00033 ] With continuing reference to the system 100 of FIG . 1 , the LPC system 120 is shown to include an atomizer 121 , a bypass reservoir 123 , a droplet separator 125 , a waste reservoir 127 for larger droplets , and an optional droplet drier 129. Instead of or in addition to the waste reservoir 127 , particles and / or droplets may be collected for later chemical and / or biological analysis . Such collection techniques may include impaction of droplets onto an impaction plate , collection of droplets onto a filter , or direct impaction of particles onto an impaction plate . In a similar fashion , in addition to or instead to the optional droplet drier 129 , particles and / or droplets may be collected for later chemical and / or biological analysis . Particles ( e.g. , nanoparticles ) within water sampled from the UPW system 110 , may be detected by a particle counter 131 , such as a condensation particle counter ( CPC ) . 9 WO 2024/254132 PCT / US2024 / 0325 [ 00034 ] In various embodiments , the particle counter 131 may comprise , for example , a differential - mobility analyzer ( DMA ) or a scanning - mobility particle - sizer ( SMPS ) having an integrated DMA . A suitably - configured DMA allows for a selection of particles having particular dimensional or electrical- charge characteristics and these particles can be counted and analyzed to monitor unintended impurities in a UPW system . [ 00035 ] A differential - mobility analyzer can classify particles using a vertical arrangement of coaxial electrodes between which an electric field and a fluid flow directs movements of a particle . A scanning mobility particle sizer can classify particles into ranges of sizes . Having classified the particles of interest , a CPC can be configured to provide a particle count and or concentration ( number per unit volume ) of the particles . [ 00036 ] Data corresponding to particle counts and / or particle concentrations ( which may be industry or use specific ) of interest can be analyzed to detect unintended impurities . For example , a fluid filter in a system can be monitored using one configuration of the present subject matter . The filter can be monitored for contaminants in a rinse down operation . [ 00037 ] In various applications ( such as an ultra - high purity system used in the integrated circuit industry ) , the CPC may be used to detect particles down to 2 nm , or smaller . The CPC can also detect particle concentrations of up to 100,000 particles per cubic centimeter ( cc ) , or much higher on extended- concentration modes . In general , the CPC condenses a working fluid onto a particle to enlarge the particle size thereby facilitating detection of the particle using an interrupted - laser light as sensed by a photo - sensitive detector . In other applications for which ultra - small ( e.g. , nanoparticles ) do not need to be detected , various other types of , for example , laser - based optical particle detectors or aerodynamic - based particle detectors may be used .

WO 2024/254132 PCT / US2024 / 0325 [ 00038 ] The atomizer 121 produces a fine spray of liquid from the water sampled from the UPW system 110. The fine spray of liquid contains particles substantially in the same proportions ( e.g. , concentrations ) and sizes as is found in the UPW system 110 ( depending on the stage from which the water is sampled ( e.g. , such as at the outlet of the final filter stage 119 , in which case only the final - filter valve 109A is opened for sampling ) . Sample flow rates are discussed below . If , for example , an end - user should choose not to sample the UPW system 110 continuously , or should the end - user choose to change the stage from which the water is sampled ( e.g. , from downstream of the final filter stage 119 to an outlet of ( i.e. , downstream from ) the UV purifier stage 113 , through the UV - purifier valve 103 , an excess of sampled water may temporarily be redirected to the bypass reservoir 123 . [ 00039 ] The droplet separator 125 serves to remove larger water droplets from the output of the atomizer 121 to prevent excess water from proceeding to the particle counter 131. The droplet separator 125 may function to remove the larger droplets by mechanisms such as a mechanical impaction by inertial forces acting on the larger droplets and impacting the droplets on , for example , impaction plates or vanes . The smaller droplets then follow fluid streamlines past the droplet separator 125 to the optional droplet drier 129 or directly into the particle counter 131. The larger droplets are then directed to the waste reservoir 127. Both of the bypass reservoir 123 and the waste reservoir 127 may both be fluidly coupled to a facility drain ( not shown ) . To accelerate a measurement , a portion of the sampled water may continuously be directed to the bypass reservoir through a valve 109B until measurement data are taken . Therefore , the sampled water flow can also be at a greater volumetric flowrate than would typically be used by , for example , the particle counter 131 . [ 00040 ] Although not shown explicitly , the system 100 may also include an optional biological - component detection system . A biological - component detection system may , for example , take the place of , or be placed in parallel 11 WO 2024/254132 PCT / US2024 / 0325 with , the particle counter 131 , as well as to select only the smallest droplets for analysis in order to reduce or minimize effects of dissolved content that may be present in the UPW system 110. Various other components ( e.g. , the atomizer 121 and the droplet separator 125 ) shown within the LPC system 120 may not be needed by the biological - component detection system . Such a biological - component detection system may overall be placed in parallel or in series with the LPC system 120 and is described in more detail , below . [ 00041 ] In an exemplary embodiment , the biological - component detection system may be a fluorescence - based system , known in the relevant art . Fluorescence is used , for example , in the life sciences generally as a non- destructive way of detecting , tracking , and / or analyzing biological components ( e.g. , biological molecules ) . [ 00042 ] In various embodiments of the UPW system 110 of FIG . 1 , the water can be sampled continuously since only a very small percentage of water is sample compared with the total amount of water is purified and / or filter by the UPW system . For example , the UPW system may produce 3liters of water per minute ( approximately 100 gallons per minute ) . However , the LPC system , such as the LPC system 120 of FIG . 1 , may use only approximately a few milliliters per hour . Therefore , the sampling rate may be pre - determined based on , for example , a sampling rate of the particle- detection system , such as the particle counter 131 of FIG . 1 , or a sampling rate of a biological - detection system , such as a fluorescence detector as described above with reference to FIG . 1. Further , unlike systems of the prior art , the sampling of the water can occur in substantially real - time while requiring no reagents or other compounds that are used to create a chemical reaction . [ 00043 ] One example of performance data corresponding to the system 1as shown in FIG . 1 is depicted with reference to FIG . 2. FIG . 2 shows an example of a graph 200 of particle count 201 as a function of time that depicts an onset of a breakthrough condition 203 in at least one of a plurality of 12 WO 2024/254132 PCT / US2024 / 0325 stages in the UPW system 110 of FIG . 1. The data of FIG . 2 depict an example of onset of the breakthrough condition 203 , as detected by the LPC system 120 of FIG . 1. The vertical axis of the graph 200 indicates counts per second derived from a CPC over several orders of magnitude . The horizontal axis indicates date and time . The inflection point of the breakthrough condition 203 indicated corresponds to an excursion from a range of expected counts . The excursion , in this case , from a count of less than 10 particles per second to nearly 100,000 particles per second , illustrates a breakthrough which may correlate with a change in filter performance , a change in the liquid content supplied to the system , or other phenomena occurring in one or more of the stages of the UPW system 110 , and / or a change in the inlet - water supply . As described in detail below with reference to FIG . 6 , various ones of the valves 101 through 109A may be accessed to determine a stage in which the breakthrough 203 occurred . Further , as described with reference to FIG . above , instead of or in addition to the waste reservoir 127 and the optional droplet drier 129 , particles and / or droplets may be collected in a collection device for later chemical and / or biological analysis after the breakthrough 2for later , or near - real time , chemical and / or biological analysis . Such collection techniques may include impaction of droplets onto an impaction plate , collection of droplets onto a filter , or direct impaction of particles onto an impaction plate . Also , wastewater may be collected for additional chemical and / or biological analysis as described with reference to FIG . 2 , below . [ 00044 ] FIG . 3 shows an example of a graph 300 of particle count 301 and total organic carbon ( TOC , in parts per billion ) levels 305 , both as a function of time , indicating electrical resistivity levels both before the breakthrough condition 203 of FIG . 2 and near the particle saturation level ( e.g. , approximately 100,000 particles per second ) indicated by FIG . 2. The discontinuity 303 indicates a two - bed deionizer replacement when the UPW supply was temporarily shut off and then turned back on . As indicated by the graph 300 , TOC levels 305 may not be detected by , for example , the particle counter 131 of FIG . 1 , as indicated by the TOC level 305 dropping while the 13 WO 2024/254132 PCT / US2024 / 0325 level of the particle count 301 continues to increase . Therefore , TOC levels may be separate from particle count levels . [ 00045 ] FIG . 4 shows a graph 400 of particle concentration as a function of particle diameter ( Dp ) that depicts both the particle concentration 403 ( in number per cc ) after a breakthrough condition ( e.g. , the breakthrough condition 203 of FIG . 2 ) and a typical ( e.g. , expected concentration level ) UPW baseline particle concentration 401. The particle concentration as a function of the particle diameter was determined using an SMPS , as described above . [ 00046 ] FIG . 5 shows an example of a graph 500 of particle count 501 as a function of time that depicts an onset of a breakthrough condition ( e.g. , the breakthrough condition 203 of FIG . 2 ) in one of a plurality of stages in the UPW system 110 of FIG . 1. The discontinuity 503 indicates a two - bed deionizer replacement when the UPW supply was temporarily shut off and then turned back on . [ 00047 ] In the example of performance data shown in FIG . 5 , the water was sampled near saturation , and the water was assayed for contamination content . Of interest here , breakthrough particles were mainly smaller than nm ( as determined by a filter pore size ) and the breakthrough water had high contents of boron ( 7500 ppt ) and dissolved silica ( 1800 ppb , both as expected , based on concentrations of the boron and dissolved silica of the inlet - water supply ) . [ 00048 ] Further , assuming linear relationships between the particle counts and either boron concentration , dissolved silica concentration , or electrical resistivity , the LPC system 120 of FIG . 1 appears to be more sensitive at detecting breakthrough conditions earlier as compared to other existing methods , and doing so in substantially real - time without requiring consumables , such as reagents . For example , assuming a linear relationship between counts per second and contaminant concentration , if 40,000 counts per second corresponds to 1800 ppb of silica and 7500 ppt of boron , then a 14 WO 2024/254132 PCT / US2024 / 0325 baseline of 7 counts per second corresponds to approximately 0.3 ppb of silica and approximately 1.3 ppt of boron . In addition , the observed change from approximately 7 counts per second to approximately 10 counts per second corresponds to a change of approximately 0.14 ppb of silica and approximately 0.56 ppt of boron . [ 00049 ] FIG . 6 shows an example of a method 600 to monitor and detect a breakthrough condition ( e.g. , an event ) from a UPW system , such as the UPW system 110 of FIG . 1. At operation 601 , water is sampled from the UPW system output . The water may be sampled periodically or continuously . In an exemplary embodiment , the water is sampled continuously since only a very small percentage of water is sample compared with the total amount of water is purified and / or filter by the UPW system . For example , the UPW system may produce 380 liters of water per minute ( approximately 100 gallons per minute ) . However , the LPC system , such as the LPC system 120 of FIG . 1 , may use only approximately a few milliliters per hour . Therefore , the sampling rate may be pre - determined based on , for example , a sampling rate of the particle - detection system , such as the particle counter 131 of FIG . 1 , or a sampling rate of a biological - detection system , such as a fluorescence detector as described above with reference to FIG . 1. Further , unlike systems of the prior art , the sampling of the water can occur in substantially real - time while requiring no reagents or other compounds that are used to create a chemical reaction . [ 00050 ] At operation 640 , the LPC system uses a sample of the water from the UPW system to determine the presence of particles , including measuring the number of particles as a function of particle diameter , and / or determining the presence of particles as a concentration measurement ( e.g. , number of particles per cubic centimeter of water ) . The detection of particles may include atomizing the water sample into water droplets , at operation 641 , and preparing the atomized water droplets , from the atomizer at operation 643 . The preparation of atomized droplets may include , for example , separating WO 2024/254132 PCT / US2024 / 0325 the droplets into small droplet sizes and large droplet sizes , and drying the droplets , as described above with reference to FIG . 1. After the droplets are prepared at operation 643 , an output from the droplet preparation step may be input into a particle detection device , such as the particle counter 131 of FIG . 1 . [ 00051 ] A pre - determined threshold level may be applied , at operation 645 , to the particle detection step at operation 647. The pre - determined threshold level may be determined based on , for example , a total particle concentration and / or a number of particles ( e.g. , at a given particle diameter ) that are considered within parameters for a selected stage of the UPW system . For example , the selected stage for monitoring may be as measured at least one of an output of the UPW system , or after the deionizer stage 111 , the UV purifier stage 113 , or one or more of the mixed - bed ion - exchange stage 115 or at one of the filtration stages 117 , 119 in the UPW system 110. The total particle concentration and / or a number of particles may be determined based on a level of cleanliness of the UPW system for a given application . For example , a UPW system used in the integrated circuit industry , where the integrated circuits have nanometer - scale design rules may require a much higher level of water purity than the purity level required in a flat - panel display ( FPD ) fabrication facility , where the design rules for the FPDs are at a micron - scale design rules . [ 00052 ] If a determination is made at operation 607 that a particle event is detected ( e.g. , a level of the particle event exceeding the pre - determined threshold for a particle concentration and / or a number of particles ) , the method 600 allows an end - user ( or an automated system as described below with reference to FIG . 7 ) to select , at operation 611 , one or more additional or different points ( e.g. , stages ) from which to select a sample or samples of water . The sampling point may be selected to be the output of the UPW system , as noted at operation 601 , or may include one or more additional 16 WO 2024/254132 PCT / US2024 / 0325 sample points from , for example , one or more of the stages 111 through 119 as described above with reference to FIG . 1 . [ 00053 ] If a determination is made at operation 607 that a particle event is not detected , the method 600 may simply loop back , at operation 609 , to again sample or continue sampling water from the UPW system output . [ 00054 ] At operation 620 , an optional biological system uses a sample of the water from the UPW system to determine a presence of biological components . Upon reading and understanding the disclosed subject - matter , a person of ordinary skill in the art will recognize that the biological components may also be detected by the LPC system , depending at least . partially on the lower - level of particle diameter from which the particle detector is set . The detection of biological components may include preparing droplets from the sampled water , at operation 621. After the droplets are prepared at operation 621 , an output from the droplet preparation step may be input into a biological component detection device , at operation 625 , as described above with reference to FIG . 1 . [ 00055 ] A pre - determined threshold level may be applied , at operation 623 , to the biological detection step at operation 625. The pre - determined threshold level may be determined based on , for example , biological components that are considered within parameters for a selected stage of the UPW system . For example , the selected stage for monitoring may be as measured at least one of an output of the UPW system , or after the deionizer stage 111 , the UV purifier stage 113 , or one or more of the mixed - bed ion- exchange stage 115 or filtration stages 117 , 119 in the UPW system 110. The total level of biological components may be determined based on a level of cleanliness of the UPW system for a given application . For example , a UPW system used in the integrated circuit industry , where the integrated circuits have nanometer - scale design rules may require a much higher level of water purity than the purity level required in a flat - panel display ( FPD ) fabrication facility , where the design rules for the FPDs are at a micron - scale design 17 WO 2024/254132 PCT / US2024 / 0325 rules , or in a sterile environment , such as may be used in pharmaceutical- testing facilities . [ 00056 ] If a determination is made at operation 603 that a biological component is detected ( e.g. , a level of the biological component exceeding the pre - determined threshold for selected biological components ) , the method 6allows an end - user ( or an automated system as described below with reference to FIG . 7 ) to select one or more additional or different points ( e.g. , stages ) from which to select a sample or samples of water , such as at an output of the UV purifier stage 113 of FIG . 1. Additionally , the sampling point may be selected to be the output of the UPW system , as noted at operation 601 , or may include one or more additional sample points from , for example , one or more of the stages 111 through 119 as described above with reference to FIG . 1 . [ 00057 ] If a determination is made at operation 603 that a biological component is not detected , the method 600 may simply loop back , at operation 605 , to again sample or continue sampling water from the UPW system output . [ 00058 ] The techniques shown and described herein can be performed using a portion or an entirety of the system to monitor , for example , particulate counts and / or particulate concentrations from an ultra - pure water ( UPW ) system 100 of FIG . 1 , or the method 600 to monitor and detect a breakthrough event from a UPW system as described in FIG . 6 , by using a machine 700 , as discussed below in relation to FIG . 7 . [ 00059 ] FIG . 7 shows an exemplary block diagram comprising a machine 700 upon which any one or more of the techniques ( e.g. , methods , analysis , or methodologies ) discussed herein may be performed herein may be performed . In various examples , the machine 700 may operate as a standalone device or may be connected ( e.g. , networked ) to other machines . In a networked deployment , the machine 700 may operate in the capacity of a server 18 WO 2024/254132 PCT / US2024 / 0325 machine , a client machine , or both in server - client network environments . In various embodiments , the machine 700 may act in a supervisory control and data acquisition ( SCADA ) architecture . In an example , the machine 700 may act as a peer machine in peer - to - peer ( P2P ) ( or other distributed ) network environment . The machine 700 may be a personal computer ( PC ) , a tablet device , a set - top box ( STB ) , a personal digital assistant ( PDA ) , a mobile telephone , a web appliance , a network router , switch or bridge , or any machine capable of executing instructions ( sequential or otherwise ) that specify actions to be taken by that machine . Further , while only a single machine is illustrated , the term " machine " shall also be taken to include any collection of machines that individually or jointly execute a set ( or multiple sets ) of instructions to perform any one or more of the methodologies discussed herein , such as cloud computing , software as a service ( SaaS ) , other computer cluster configurations . [ 00060 ] Examples , as described herein , may include , or may operate by , logic or a number of components , or mechanisms . Circuitry is a collection of circuits implemented in tangible entities that include hardware ( e.g. , simple circuits , gates , logic , etc. ) . Circuitry membership may be flexible over time and underlying hardware variability . Circuitries include members that may , alone or in combination , perform specified operations when operating . In an example , hardware of the circuitry may be immutably designed to carry out a specific operation ( e.g. , hardwired ) . In an example , the hardware comprising the circuitry may include variably connected physical components ( e.g. , execution units , transistors , simple circuits , etc. ) including a computer- readable medium physically modified ( e.g. , magnetically , electrically , such as via a change in physical state or transformation of another physical characteristic , etc. ) to encode instructions of the specific operation . In connecting the physical components , the underlying electrical properties of a hardware constituent may be changed , for example , from an insulating characteristic to a conductive characteristic or vice versa . The instructions enable embedded hardware ( e.g. , the execution units or a loading mechanism ) 19 WO 2024/254132 PCT / US2024 / 0325 to create members of the circuitry in hardware via the variable connections to carry out portions of the specific operation when in operation . Accordingly , the computer - readable medium is communicatively coupled to the other components of the circuitry when the device is operating . In an example , any of the physical components may be used in more than one member of more than one circuitry . For example , under operation , execution units may be used in a first circuit of a first circuitry at one point in time and reused by a second circuit in the first circuitry , or by a third circuit in a second circuitry at a different time . [ 00061 ] The machine 700 ( e.g. , computer system ) may include a hardware processor 701 ( e.g. , a central processing unit ( CPU ) , a graphics processing unit ( GPU ) , a hardware processor core , or any combination thereof ) , a main memory 703 and a static memory 705 , some or all of which may communicate with each other via an interlink 730 ( e.g. , a bus ) . The machine 700 may further include a display device 709 , an input device 711 ( e.g. , an alphanumeric keyboard ) , and a user interface ( UI ) navigation device 713 ( e.g. , a mouse ) . In an example , the display device 709 , the input device 711 , and the UI navigation device 713 may comprise at least portions of a touch screen display . The machine 700 may additionally include a storage device 720 ( e.g. , a drive unit ) , a signal generation device 717 ( e.g. , a speaker ) , a network interface device 750 , and one or more sensors 715 , such as a global positioning system ( GPS ) sensor , compass , accelerometer , or other type of sensor . The machine 700 may include an output controller 719 , such as a serial controller or interface ( e.g. , a universal serial bus ( USB ) ) , a parallel controller or interface , or other wired or wireless ( e.g. , infrared ( IR ) controllers or interfaces , near field communication ( NFC ) , etc. , coupled to communicate or control one or more peripheral devices ( e.g. , a printer , a card reader , etc. ) . [ 00062 ] The storage device 720 may include a machine - readable medium on which is stored one or more sets of data structures or instructions 724 ( e.g. , WO 2024/254132 PCT / US2024 / 0325 software or firmware ) embodying or utilized by any one or more of the techniques or functions described herein . The instructions 724 may also reside , completely or at least partially , within a main memory 703 , within a static memory 705 , within a mass storage device 707 , or within the hardware- based processor 701 during execution thereof by the machine 700. In an example , one or any combination of the hardware - based processor 701 , the main memory 703 , the static memory 705 , or the storage device 720 may constitute machine readable media . [ 00063 ] While the machine - readable medium is considered as a single medium , the term " machine - readable medium " may include a single medium or multiple media ( e.g. , a centralized or distributed database , and / or associated caches and servers ) configured to store the one or more instructions 724 . [ 00064 ] The term " machine - readable medium " may include any medium that is capable of storing , encoding , or carrying instructions for execution by the machine 700 and that cause the machine 700 to perform any one or more of the techniques of the present disclosure , or that is capable of storing , encoding or carrying data structures used by or associated with such instructions . Non - limiting machine - readable medium examples may include solid - state memories , and optical and magnetic media . Accordingly , machine- readable media are not transitory propagating signals . Specific examples of massed machine - readable media may include : non - volatile memory , such as semiconductor memory devices ( e.g. , Electrically Programmable Read - Only Memory ( EPROM ) , Electrically Erasable Programmable Read - Only Memory ( EEPROM ) ) and flash memory devices ; magnetic or other phase - change or state - change memory circuits ; magnetic disks , such as internal hard disks and removable disks ; magneto - optical disks ; and CD - ROM and DVD - ROM disks . [ 00065 ] The instructions 724 may further be transmitted or received over a communications network 721 using a transmission medium via the network 21 WO 2024/254132 PCT / US2024 / 0325 interface device 750 utilizing any one of a number of transfer protocols ( e.g. , frame relay , internet protocol ( IP ) , transmission control protocol ( TCP ) , user datagram protocol ( UDP ) , hypertext transfer protocol ( HTTP ) , etc. ) . Example communication networks may include a local area network ( LAN ) , a wide area network ( WAN ) , a packet data network ( e.g. , the Internet ) , mobile telephone networks ( e.g. , cellular networks ) , Plain Old Telephone ( POTS ) networks , and wireless data networks ( e.g. , the Institute of Electrical and Electronics Engineers ( IEEE ) 802.22 family of standards known as Wi - ®iF , the IEEE 802.26 family of standards known as ®xaMiW ) , the IEEE 802.25.family of standards , peer - to - peer ( P2P ) networks , among others . In an example , the network interface device 750 may include one or more physical jacks ( e.g. , Ethernet , coaxial , or phone jacks ) or one or more antennas to connect to the communications network 721. In an example , the network interface device 750 may include a plurality of antennas to wirelessly communicate using at least one of single - input multiple - output ( SIMO ) , multiple - input multiple - output ( MIMO ) , or multiple - input single - output ( MISO ) techniques . The term " transmission medium " shall be taken to include any intangible medium that is capable of storing , encoding or carrying instructions for execution by the machine 700 , and includes digital or analog communications signals or other intangible medium to facilitate communication of such software . [ 00066 ] In the context of the disclosed subject - matter contained herein . an example of an unexpected impurity can be associated with a failure of a filter or a screen . Other failure mechanisms can be associated with depletion of media in a filter bed or media with an improper pore size . A failure can also be associated with channeling through a filter media . Further , the description provided herein includes references to the accompanying drawings , which form a part of the detailed description . The drawings show , by way of illustration , specific embodiments in which the invention can be practiced . These embodiments are also referred to herein as " examples . " Such examples can include elements in addition to those shown or described . However , the 22 WO 2024/254132 PCT / US2024 / 0325 present inventors also contemplate examples in which only those elements shown or described are provided . Moreover , the present inventors also contemplate examples using any combination or permutation of those elements shown or described ( or one or more aspects thereof ) , either with respect to a particular example ( or one or more aspects thereof ) , or with respect to other examples ( or one or more aspects thereof ) shown or described herein . ﻭﻭ [ 00067 ] In the event of inconsistent usages between this document and any documents so incorporated by reference , the usage in this document controls . Moreover , in this document , the terms " a " or " an " are used , as is common in patent documents , to include one or more than one , independent of any other instances or usages of " at least one " or " one or more . " In this document , the term " or " is used to refer to a nonexclusive or , such that " A or B " includes " A but not B , " " B but not A , " and " A and B , " unless otherwise indicated . In this document , the terms " including " and " in which " are used as the plain - English equivalents of the respective terms " comprising " and " wherein . " Also , in the following claims , the terms " including " and " comprising " are open - ended , that is , a system , device , article , composition , formulation , or process that includes elements in addition to those listed after such a term in a claim are still deemed to fall within the scope of that claim . Moreover , in the following claims , the terms " first , " " second , " and " third , " etc. are used merely as labels , and are not intended to impose numerical requirements on their objects . [ 00068 ] Geometric terms , such as " parallel , " " perpendicular , " " round , " or " square , " are not intended to require absolute mathematical precision , unless the context indicates otherwise . Instead , such geometric terms allow for variations due to manufacturing or equivalent functions . For example , if an element is described as " round " or " generally round , " a component that is not precisely circular ( e.g. , one that is slightly oblong or is a many - sided polygon ) is still encompassed by this description . 23 WO 2024/254132 PCT / US2024 / 0325 [ 00069 ] As used herein , the term " or " may be construed in an inclusive or exclusive sense . Further , other embodiments will be understood by a person of ordinary skill in the art upon reading and understanding the disclosure provided . Further , upon reading and understanding the disclosure provided herein , the person of ordinary skill in the art will readily understand that various combinations of the techniques and examples provided herein may all be applied in various configurations . [ 00070 ] Although various embodiments are discussed separately , these separate embodiments are not intended to be considered as independent techniques or designs . As indicated above , each of the various portions may be inter - related and each may be used separately or in combination with other embodiments discussed herein . For example , although various embodiments of methods , operations , and processes have been described , these methods , operations , and processes may be used either separately or in various combinations . [ 00071 ] Consequently , many modifications and variations can be made , as will be apparent to a person of ordinary skill in the art upon reading and understanding the disclosure provided herein . Further , functionally equivalent methods and devices within the scope of the disclosure , in addition to those enumerated herein , will be apparent to the skilled artisan from the foregoing descriptions . Portions and features of some embodiments , materials , and construction techniques may be included in , or substituted for , those of others . Such modifications and variations are intended to fall within a scope of the appended claims . Therefore , the present disclosure is to be limited only by the terms of the appended claims , along with the full scope of equivalents to which such claims are entitled . It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting . [ 00072 ] The Abstract of the Disclosure is provided to allow the reader to quickly ascertain the nature of the technical disclosure . The abstract is 24 WO 2024/254132 PCT / US2024 / 0325 submitted with the understanding that it will not be used to interpret or limit the claims . In addition , in the foregoing Detailed Description , it may be seen that various features may be grouped together in a single embodiment for the purpose of streamlining the disclosure . This method of disclosure is not to be interpreted as limiting the claims . Thus , the following claims are hereby incorporated into the Detailed Description , with each claim standing on its own as a separate embodiment . As used herein , the terms " about , " " approximately , " and " substantially " may refer to values that are , for example , within ± 10 % of a given value or range of values . Also , the term " exemplary " is used herein to indicate an example of an embodiment or concept , and not necessarily the best or sole means of achieving or practicing the embodiment or concept .

THE FOLLOWING NUMBERED EXAMPLES ARE SPECIFIC EMBODIMENTS OF THE DISCLOSED SUBJECT - MATTER [ 00073 ] Example 1. In an embodiment , the disclosed subject - matter is a system to detect impurities in liquids . The system includes a liquid particle- detection system having an atomizer coupled fluidically to a plurality of operable valves and at least one particle counter . Each of the plurality of operable valves is to be coupled downstream from a separate one of a plurality of processing stages in an ultra - pure water - processing system . The atomizer is to produce a spray of liquid from a selected and opened one of the plurality of operable valves through which a water sample is provided . The at least one particle counter is arranged to provide at least one parameter , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled . [ 00074 ] Example 2. The system of Example 1 , further including a droplet separator fluidically coupled downstream from the atomizer and upstream of the at least one particle counter .

WO 2024/254132 PCT / US2024 / 0325 [ 00075 ] Example 3. The system of either Example 1 or Example 2 , further including a drier fluidically coupled downstream from the atomizer and upstream of the at least one particle counter . [ 00076 ] Example 4. The system of any one of the preceding Examples , further including a biological - component detection system . [ 00077 ] Example 5. The system of Example 4 , wherein the biological- component detection system is a fluorescence - based system . [ 00078 ] Example 6. The system of any one of the preceding Examples , wherein the system does not use reagents . [ 00079 ] Example 7. The system of any one of the preceding Examples , wherein the at least one particle counter is configured to detect a concentration of total organic carbon ( TOC ) levels from the water sample . [ 00080 ] Example 8. The system of any one of the preceding Examples , wherein the at least one particle counter is a condensation particle counter ( CPC ) . [ 00081 ] Example 9. The system of any one of the preceding Examples , wherein the at least one particle counter is a scanning - mobility particle - sizer ( SMPS ) having an integrated differential - mobility analyzer ( DMA ) . [ 00082 ] Example 10. The system of any one of the preceding Examples , further including a collection device , coupled fluidically downstream of the atomizer , to collect at least one component selected from droplets and particles , for at least one type of analysis selected from chemical analysis and biological analysis . [ 00083 ] Example 11. The system of Example 10 , wherein the collection . device comprises at least one device selected from an impaction plate and a filter . 26 WO 2024/254132 PCT / US2024 / 0325 [ 00084 ] Example 12. The system of any one of the preceding Examples , wherein the system is configured to detect impurities in liquids continuously . [ 00085 ] Example 13. In an embodiment , the disclosed subject - matter is a method for monitoring an ultra - pure water ( UPW ) system . The method includes selecting and opening one of a plurality of operable valves , where respective ones of each of the plurality of operable valves are coupled downstream from one of a plurality of processing stages within the UPW system ; obtaining a water sample from the selected one of the plurality of operable valves ; atomizing the sampled water ; and providing at least one parameter from the atomized water by a particle detector , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled during a time period in which the water sample is provided . [ 00086 ] Example 14. The method of Example 13 , further including using a biological - component detection system for monitoring for biological components within the sampled water . [ 00087 ] Example 15. The method of any either Example 13 or Example 14 , further including applying a pre - determined threshold of biological component counts to the biological - component detection system . [ 00088 ] Example 16. The method of any one of Example 13 through Example 15 , wherein the biological - component detection system is a fluorescence - based system . [ 00089 ] Example 17. The of any one of Example 13 through Example 16 , further including applying a pre - determined threshold to the biological- component detection system . [ 00090 ] Example 18. The method of any one of Example 13 through Example 17 , further including applying a pre - determined threshold of particle counts to the particle detector . 27 WO 2024/254132 PCT / US2024 / 0325 [ 00091 ] Example 19. The method of any one of Example 13 through Example 17 , further including detecting a concentration of total organic carbon ( TOC ) levels from the sampled water . [ 00092 ] Example 20. The method of any one of Example 13 through Example 19 , further including , based on a determination that at least one of the particle count and the particle concentration was detected , selecting and opening a different valve from the at least one of the plurality of operable valves to monitor one of the plurality of processing stages coupled upstream from the different valve within the UPW system ; obtaining a water sample from the different selected one of the at least one of the plurality of operable valves ; atomizing the sampled water obtained from the different valve ; and providing at least one parameter from the atomized water , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled during a time period in which the water sample is provided . [ 00093 ] Example 21. The method of any one of Example 13 through Example 20 , further including collecting onto a collection device , downstream of the atomization step , at least one component selected from droplets and particles , for at least one type of analysis selected from chemical analysis and biological analysis . [ 00094 ] Example 22. The method of Example 21 , wherein the collection device comprises at least one device selected from an impaction plate and a filter . [ 00095 ] Example 23. The method of any one of Example 13 through Example 22 , further including monitoring the ultra - pure water ( UPW ) system continuously . [ 00096 ] Example 24. In an embodiment , the disclosed subject - matter is a computer - readable medium containing instructions that , when executed by a 28 WO 2024/254132 PCT / US2024 / 0325 machine , cause the machine to perform operations for monitoring an ultra- pure water ( UPW ) system , where the operations include selecting and opening one of a plurality of operable valves , respective ones of each of the plurality of operable valves coupled downstream from one of a plurality of processing stages within the UPW system ; obtaining a water sample from the selected one of the plurality of operable valves ; atomizing the sampled water ; and providing at least one parameter from the atomized water by a particle detector , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled during a time period in which the water sample is provided . [ 00097 ] Example 25. The computer - readable medium of Example 24 , the operations further including applying a pre - determined threshold of particle counts to the particle detector . [ 00098 ] Example 26. The computer - readable medium of either Example or Example 25 , the operations further including detecting a concentration of total organic carbon ( TOC ) levels from the sampled water . [ 00099 ] Example 27. The computer - readable medium of any one of Example through Example 26 , the operations further including collecting onto a collection device , downstream of the atomization step , at least one component selected from droplets and particles , for at least one type of analysis selected from chemical analysis and biological analysis . [ 000100 ] Example 28. The computer - readable medium of Example 27 , wherein the collection device comprises at least one device selected from an impaction plate and a filter . [ 000101 ] Example 29. The computer - readable medium of any one of Example through Example 28 , further including monitoring the ultra - pure water ( UPW ) system continuously . 29

Claims (31)

CLAIMS What is claimed is :

1. A system to detect impurities in liquids , the system comprising : a liquid particle - detection system configured to operate in a substantially continuous manner to monitor a percentage of the liquid from one or more various sample points within the system , the liquid particle - detection system comprising : an atomizer coupled fluidically to a plurality of operable valves , each of the plurality of operable valves to be coupled downstream from a separate one of a plurality of processing stages in the system , the atomizer being configured to produce a spray of liquid from a selected and opened one of the plurality of operable valves in substantially real- time through which a liquid sample is provided ; and at least one particle counter , the at least one particle counter configured to provide at least one parameter , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled .

2. The system of claim 1 , further comprising a droplet separator fluidically coupled downstream from the atomizer and upstream of the at least one particle counter .

3. The system of claim 1 , further comprising a drier fluidically coupled downstream from the atomizer and upstream of the at least one particle counter . 30

4. The system of claim 1 , further comprising a biological - component detection system .

5. The system of claim 4 , wherein the biological - component detection system is a fluorescence - based system .

6. The system of claim 1 , wherein the system does not use reagents .

7. The system of claim 1 , wherein the at least one particle counter is configured to detect a concentration of total organic carbon ( TOC ) levels from the liquid sample .

8. The system of claim 1 , wherein the at least one particle counter is a condensation particle counter ( CPC ) .

9. The system of claim 1 , wherein the at least one particle counter is a scanning - mobility particle - sizer ( SMPS ) having an integrated differential - mobility analyzer ( DMA ) .

10. The system of claim 1 , further comprising a collection device , coupled fluidically downstream of the atomizer , to collect at least one component selected from droplets and particles , for at least one type of analysis selected from chemical analysis and biological analysis .

11. The system of claim 10 , wherein the collection device comprises at least one device selected from an impaction plate and a filter .

12. The system of claim 1 , wherein the system is configured to detect impurities in liquids continuously . 31

13. The system of claim 1 , wherein the system is an ultra - pure water ( UPW ) system and the liquid is water .

14. A method for monitoring liquid in a liquid - based system in a substantially continuous manner , the method comprising : selecting and opening one of a plurality of operable valves , respective ones of each of the plurality of operable valves coupled downstream from one of a plurality of processing stages within the liquid - based system ; obtaining a liquid sample from the selected one of the plurality of operable valves ; atomizing the sampled liquid in substantially real - time ; and providing at least one parameter from the atomized liquid by a particle detector , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled during a time period in which the liquid sample is provided .

15. The method of claim 14 , further comprising using a biological- component detection system for monitoring for biological components within the sampled liquid .

16. The method of claim 15 , further comprising applying a pre- determined threshold of biological component counts to the biological - component detection system .

17. The method of claim 15 , wherein the biological - component detection system is a fluorescence - based system . 32

18. The method of claim 15 , further comprising applying a pre- determined threshold to the biological - component detection system .

19. The method of claim 14 , further comprising applying a pre- determined threshold of particle counts to the particle detector .

20. The method of claim 14 , further comprising detecting a concentration of total organic carbon ( TOC ) levels from the sampled liquid .

21. The method of claim 14 , further comprising : based on a determination that at least one of the particle count and the particle concentration was detected : selecting and opening a different valve from the at least one of the plurality of operable valves to monitor one of the plurality of processing stages coupled upstream from the different valve within the liquid - based system ; obtaining a liquid sample from the different selected one of the at least one of the plurality of operable valves ; atomizing the sampled liquid obtained from the different valve ; and providing at least one parameter from the atomized liquid , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled during a time period in which the liquid sample is provided . 33

22. The method of claim 14 , further comprising collecting onto a collection device , downstream of the atomizing step , at least one component selected from droplets and particles , for at least one type of analysis selected from chemical analysis and biological analysis .

23. The method of claim 22 , wherein the collection device comprises at least one device selected from an impaction plate and a filter .

24. The method of claim 14 , further comprising monitoring the liquid- based system continuously .

25. The system of claim 14 , wherein the liquid - based system is an ultra - pure water ( UPW ) system and the liquid is water .

26. A computer - readable medium containing instructions that , when executed by a machine , cause the machine to perform operations for monitoring liquid from a liquid - based system in a substantially continuous manner , the operations comprising : selecting and opening one of a plurality of operable valves , respective ones of each of the plurality of operable valves coupled downstream from one of a plurality of processing stages within the liquid - based system ; obtaining a liquid sample from the selected one of the plurality of operable valves ; atomizing the sampled liquid in substantially real - time ; and providing at least one parameter from the atomized liquid by a particle detector , in substantially real - time , selected from a particle count and a particle concentration , from the processing stage to which the atomizer is coupled during a time period in which the liquid sample is provided . 34

27. The computer - readable medium of claim 26 , the operations further comprising applying a pre - determined threshold of particle counts to the particle detector .

28. The computer - readable medium of claim 26 , the operations further comprising detecting a concentration of total organic carbon ( TOC ) levels from the sampled liquid .

29. The computer - readable medium of claim 26 , the operations further comprising collecting onto a collection device , downstream of the atomizing step , at least one component selected from droplets and particles , for at least one type of analysis selected from chemical analysis and biological analysis .

30. The computer - readable medium of claim 29 , wherein the collection device comprises at least one device selected from an impaction plate and a filter .

31. The computer - readable medium of claim 26 , further comprising monitoring the liquid - based system continuously . 35