IL255705B - Mems sensors with selectively adjusted damping of suspension - Google Patents
Mems sensors with selectively adjusted damping of suspensionInfo
- Publication number
- IL255705B IL255705B IL255705A IL25570517A IL255705B IL 255705 B IL255705 B IL 255705B IL 255705 A IL255705 A IL 255705A IL 25570517 A IL25570517 A IL 25570517A IL 255705 B IL255705 B IL 255705B
- Authority
- IL
- Israel
- Prior art keywords
- suspension
- selectively adjusted
- mems sensors
- adjusted damping
- damping
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
- B81C1/0038—Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0242—Gyroscopes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/04—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0181—Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662439242P | 2016-12-27 | 2016-12-27 | |
US15/643,174 US10822225B2 (en) | 2016-12-27 | 2017-07-06 | MEMS sensors with selectively adjusted damping of suspension |
Publications (2)
Publication Number | Publication Date |
---|---|
IL255705A0 IL255705A0 (en) | 2017-12-31 |
IL255705B true IL255705B (en) | 2021-07-29 |
Family
ID=60664714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL255705A IL255705B (en) | 2016-12-27 | 2017-11-15 | Mems sensors with selectively adjusted damping of suspension |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2558392B (en) |
IL (1) | IL255705B (en) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9817347D0 (en) * | 1998-08-11 | 1998-10-07 | British Aerospace | An angular rate sensor |
JP5054490B2 (en) * | 2007-11-20 | 2012-10-24 | シチズンホールディングス株式会社 | Vibrator and method for manufacturing the vibrator |
JP2013186029A (en) * | 2012-03-09 | 2013-09-19 | Seiko Epson Corp | Vibration piece, sensor unit, and electronic apparatus |
CN103245339B (en) * | 2012-02-14 | 2017-05-24 | 精工爱普生株式会社 | Vibrator element, sensor unit, and electronic device |
JP6078968B2 (en) * | 2012-03-29 | 2017-02-15 | セイコーエプソン株式会社 | Manufacturing method of vibrating piece |
JP2014021038A (en) * | 2012-07-23 | 2014-02-03 | Seiko Epson Corp | Vibration piece, manufacturing method of vibration piece, vibrator, electronic device, electronic equipment and mobile body |
JP2014092500A (en) * | 2012-11-06 | 2014-05-19 | Seiko Epson Corp | Vibration piece, vibrator, electronic device, electronic apparatus, and mobile body |
-
2017
- 2017-11-06 GB GB1718347.6A patent/GB2558392B/en active Active
- 2017-11-15 IL IL255705A patent/IL255705B/en unknown
Also Published As
Publication number | Publication date |
---|---|
GB2558392B (en) | 2021-08-04 |
GB2558392A (en) | 2018-07-11 |
IL255705A0 (en) | 2017-12-31 |
GB201718347D0 (en) | 2017-12-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK3703389T1 (en) | Vibration sensor with low-frequency roll-off response curve | |
ZA201903229B (en) | Suspension assembly | |
SG10201607048YA (en) | Mems loudspeaker with position sensor | |
IL266262B (en) | Vibration suspension system | |
EP3598147C0 (en) | Mechanical shock resistant mems accelerometer arrangement and associated method | |
IL253385A0 (en) | Acceleration sensor having spring force compensation | |
GB201704396D0 (en) | MEMS sensors | |
PL3710720T3 (en) | Suspension strut | |
EP3330165A4 (en) | Control device for shock absorber and suspension device | |
PL3578844T3 (en) | Mcpherson-strut-type suspension | |
GB2562676B (en) | Suspension control device | |
GB2546779B (en) | Suspension bridges | |
BR112017003866A2 (en) | vehicle suspension member | |
PL3251483T3 (en) | Suspension device | |
BR112017011896A2 (en) | suspension bracket | |
PL2910800T3 (en) | Attachment means for the suspension of sound absorbers and sound absorber system | |
GB2558392B (en) | MEMS Sensors with selectively adjusted damping of suspension | |
GB201614469D0 (en) | Shock Sensor | |
GB201612750D0 (en) | Suspension device | |
GB201613848D0 (en) | Semi-active suspension controls | |
GB201717413D0 (en) | Speaker suspension | |
GB2563378B (en) | Suspension device | |
GB201717439D0 (en) | Speaker suspension II | |
GB201718940D0 (en) | Suspension assembly | |
GB201714160D0 (en) | Suspension assembly |