IL243166B2 - מודיפיקציה של התכונות האופטיות של הארת סריקת–שורה בהתאם לזוית האור לאורך ציר השורה - Google Patents

מודיפיקציה של התכונות האופטיות של הארת סריקת–שורה בהתאם לזוית האור לאורך ציר השורה

Info

Publication number
IL243166B2
IL243166B2 IL243166A IL24316615A IL243166B2 IL 243166 B2 IL243166 B2 IL 243166B2 IL 243166 A IL243166 A IL 243166A IL 24316615 A IL24316615 A IL 24316615A IL 243166 B2 IL243166 B2 IL 243166B2
Authority
IL
Israel
Prior art keywords
reflectance
beams
facets
beam splitter
color
Prior art date
Application number
IL243166A
Other languages
English (en)
Other versions
IL243166A0 (he
IL243166B1 (he
Inventor
Gordon Noam
Cohen Itay
Tzhori Amir
Original Assignee
Camtek Imaging Tech Suzhou Co Ltd
Cims Suzhou Co Ltd
Gordon Noam
Cohen Itay
Tzhori Amir
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Imaging Tech Suzhou Co Ltd, Cims Suzhou Co Ltd, Gordon Noam, Cohen Itay, Tzhori Amir filed Critical Camtek Imaging Tech Suzhou Co Ltd
Publication of IL243166A0 publication Critical patent/IL243166A0/he
Publication of IL243166B1 publication Critical patent/IL243166B1/he
Publication of IL243166B2 publication Critical patent/IL243166B2/he

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light

Landscapes

  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
IL243166A 2014-12-18 2015-12-16 מודיפיקציה של התכונות האופטיות של הארת סריקת–שורה בהתאם לזוית האור לאורך ציר השורה IL243166B2 (he)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201462093486P 2014-12-18 2014-12-18

Publications (3)

Publication Number Publication Date
IL243166A0 IL243166A0 (he) 2016-02-29
IL243166B1 IL243166B1 (he) 2023-06-01
IL243166B2 true IL243166B2 (he) 2023-10-01

Family

ID=57182155

Family Applications (1)

Application Number Title Priority Date Filing Date
IL243166A IL243166B2 (he) 2014-12-18 2015-12-16 מודיפיקציה של התכונות האופטיות של הארת סריקת–שורה בהתאם לזוית האור לאורך ציר השורה

Country Status (3)

Country Link
CN (1) CN205879177U (he)
IL (1) IL243166B2 (he)
TW (1) TWI700486B (he)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5749641B2 (ja) * 2008-04-04 2015-07-15 ナンダ テヒノロギーズ ゲーエムベーハー 光学検査システム及び方法
JP2012048026A (ja) * 2010-08-27 2012-03-08 Sony Corp 顕微鏡及びフィルタ挿入方法
JP2014038040A (ja) * 2012-08-17 2014-02-27 Kyoto Institute Of Technology 耐傷つき性評価方法及び評価装置
CN203490180U (zh) * 2013-09-13 2014-03-19 楚天科技股份有限公司 自动灯检机异物检测装置

Also Published As

Publication number Publication date
TW201629471A (zh) 2016-08-16
CN205879177U (zh) 2017-01-11
IL243166A0 (he) 2016-02-29
IL243166B1 (he) 2023-06-01
TWI700486B (zh) 2020-08-01

Similar Documents

Publication Publication Date Title
CN112602002B (zh) 对于基于平面透镜的ar/vr眼镜的透射改善
US7041998B2 (en) Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
TWI700487B (zh) 一種用於檢查物件的系統及方法
TW201416810A (zh) 離軸對準系統及對準方法
KR102663684B1 (ko) 표면 검사를 위한 이미징 시스템
TWI764269B (zh) 一種基於偏振特性的用於檢查物體的系統及方法
US20120008197A1 (en) Microscope, more particularly fluorescence microscope, dichroic beam splitter and use thereof
US9459460B2 (en) Optical image capturing module, aligning method, and observing method
KR20240069692A (ko) 표면 검사를 위한 이미징 시스템
CN205562358U (zh) 检验对象的系统
KR101211438B1 (ko) 결함 검사장치
JP2006313356A5 (he)
US9638644B2 (en) Multiple mode inspection system and method for evaluating a substrate by a multiple mode inspection system
WO2005103656A1 (en) Multiple surface viewer
JP2008076962A (ja) 光学検査装置
IL243166B2 (he) מודיפיקציה של התכונות האופטיות של הארת סריקת–שורה בהתאם לזוית האור לאורך ציר השורה
KR102773497B1 (ko) 디스플레이 장치의 검사 장치 및 디스플레이 장치의 검사 방법
JP7458617B1 (ja) 検査用照明装置及び照明光学系及び検査システム
JP3109307U (ja) 多面観察光学系
KR102737491B1 (ko) 검사장비의 광학계
WO2017104565A1 (ja) 光源装置および投影装置
CN206208195U (zh) 用于量测大尺寸对象的干涉仪
JP2023008727A (ja) 反射光弁別装置
KR101650319B1 (ko) 컬러 카메라를 이용한 두께 측정방법 및 두께 측정장치
JP2001228471A (ja) 反射型液晶表示装置の検査方法、補修方法および補修装置