IL243165B - בדיקה אופטית משופרת באמצעות קיטוב - Google Patents
בדיקה אופטית משופרת באמצעות קיטובInfo
- Publication number
- IL243165B IL243165B IL243165A IL24316515A IL243165B IL 243165 B IL243165 B IL 243165B IL 243165 A IL243165 A IL 243165A IL 24316515 A IL24316515 A IL 24316515A IL 243165 B IL243165 B IL 243165B
- Authority
- IL
- Israel
- Prior art keywords
- optical inspection
- polarization imaging
- enhanced optical
- enhanced
- polarization
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462093468P | 2014-12-18 | 2014-12-18 | |
US201462093462P | 2014-12-18 | 2014-12-18 | |
US201562119846P | 2015-02-24 | 2015-02-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
IL243165A0 IL243165A0 (he) | 2016-02-29 |
IL243165B true IL243165B (he) | 2021-09-30 |
Family
ID=56926433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL243165A IL243165B (he) | 2014-12-18 | 2015-12-16 | בדיקה אופטית משופרת באמצעות קיטוב |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN205593551U (he) |
IL (1) | IL243165B (he) |
TW (3) | TWI764269B (he) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11055836B2 (en) * | 2018-02-13 | 2021-07-06 | Camtek Ltd. | Optical contrast enhancement for defect inspection |
DE102019107174B4 (de) * | 2019-03-20 | 2020-12-24 | Thyssenkrupp Rasselstein Gmbh | Verfahren und Vorrichtung zur Inspektion der Oberfläche eines sich bewegenden Bands |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6809808B2 (en) * | 2002-03-22 | 2004-10-26 | Applied Materials, Inc. | Wafer defect detection system with traveling lens multi-beam scanner |
JP2007101401A (ja) * | 2005-10-05 | 2007-04-19 | Tokyo Seimitsu Co Ltd | 外観検査装置及び外観検査方法 |
TWI503520B (zh) * | 2011-01-19 | 2015-10-11 | Nova Measuring Instr Ltd | 光學系統及在三維構造中之量測方法 |
US8501503B2 (en) * | 2011-04-28 | 2013-08-06 | Nanda Technologies Gmbh | Methods of inspecting and manufacturing semiconductor wafers |
JP5584716B2 (ja) * | 2012-02-15 | 2014-09-03 | 住友化学株式会社 | 導光板の製造方法 |
CN203490180U (zh) * | 2013-09-13 | 2014-03-19 | 楚天科技股份有限公司 | 自动灯检机异物检测装置 |
-
2015
- 2015-12-16 IL IL243165A patent/IL243165B/he unknown
- 2015-12-17 TW TW109130719A patent/TWI764269B/zh active
- 2015-12-17 TW TW109130707A patent/TWI764268B/zh active
- 2015-12-17 TW TW104142465A patent/TWI707131B/zh active
- 2015-12-18 CN CN201521063855.5U patent/CN205593551U/zh active Active
Also Published As
Publication number | Publication date |
---|---|
TW202104873A (zh) | 2021-02-01 |
TW202100981A (zh) | 2021-01-01 |
IL243165A0 (he) | 2016-02-29 |
TW201629466A (zh) | 2016-08-16 |
TWI764269B (zh) | 2022-05-11 |
TWI707131B (zh) | 2020-10-11 |
CN205593551U (zh) | 2016-09-21 |
TWI764268B (zh) | 2022-05-11 |
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