IL243165B - בדיקה אופטית משופרת באמצעות קיטוב - Google Patents

בדיקה אופטית משופרת באמצעות קיטוב

Info

Publication number
IL243165B
IL243165B IL243165A IL24316515A IL243165B IL 243165 B IL243165 B IL 243165B IL 243165 A IL243165 A IL 243165A IL 24316515 A IL24316515 A IL 24316515A IL 243165 B IL243165 B IL 243165B
Authority
IL
Israel
Prior art keywords
optical inspection
polarization imaging
enhanced optical
enhanced
polarization
Prior art date
Application number
IL243165A
Other languages
English (en)
Other versions
IL243165A0 (he
Inventor
Gordon Noam
Cohen Itay
Tzhori Amir
Original Assignee
Camtek Imaging Tech Suzhou Co Ltd
Cims Suzhou Co Ltd
Gordon Noam
Cohen Itay
Tzhori Amir
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Imaging Tech Suzhou Co Ltd, Cims Suzhou Co Ltd, Gordon Noam, Cohen Itay, Tzhori Amir filed Critical Camtek Imaging Tech Suzhou Co Ltd
Publication of IL243165A0 publication Critical patent/IL243165A0/he
Publication of IL243165B publication Critical patent/IL243165B/he

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)
IL243165A 2014-12-18 2015-12-16 בדיקה אופטית משופרת באמצעות קיטוב IL243165B (he)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462093468P 2014-12-18 2014-12-18
US201462093462P 2014-12-18 2014-12-18
US201562119846P 2015-02-24 2015-02-24

Publications (2)

Publication Number Publication Date
IL243165A0 IL243165A0 (he) 2016-02-29
IL243165B true IL243165B (he) 2021-09-30

Family

ID=56926433

Family Applications (1)

Application Number Title Priority Date Filing Date
IL243165A IL243165B (he) 2014-12-18 2015-12-16 בדיקה אופטית משופרת באמצעות קיטוב

Country Status (3)

Country Link
CN (1) CN205593551U (he)
IL (1) IL243165B (he)
TW (3) TWI707131B (he)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11055836B2 (en) * 2018-02-13 2021-07-06 Camtek Ltd. Optical contrast enhancement for defect inspection
US10295476B1 (en) * 2018-08-14 2019-05-21 Applied Materials Israel Ltd. System and method for multiple mode inspection of a sample
DE102019107174B4 (de) * 2019-03-20 2020-12-24 Thyssenkrupp Rasselstein Gmbh Verfahren und Vorrichtung zur Inspektion der Oberfläche eines sich bewegenden Bands
CN119901756A (zh) * 2025-03-31 2025-04-29 深圳中科飞测科技股份有限公司 一种晶圆缺陷检测装置及控制方法
CN119880900A (zh) * 2025-03-31 2025-04-25 深圳中科飞测科技股份有限公司 一种半导体检测装置及其控制方法
CN119915740A (zh) * 2025-04-07 2025-05-02 上海中科飞测半导体科技有限公司 一种光学检测系统和光学检测设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6809808B2 (en) * 2002-03-22 2004-10-26 Applied Materials, Inc. Wafer defect detection system with traveling lens multi-beam scanner
JP2007101401A (ja) * 2005-10-05 2007-04-19 Tokyo Seimitsu Co Ltd 外観検査装置及び外観検査方法
TWI503520B (zh) * 2011-01-19 2015-10-11 諾發測量儀器股份有限公司 光學系統及在三維構造中之量測方法
US8501503B2 (en) * 2011-04-28 2013-08-06 Nanda Technologies Gmbh Methods of inspecting and manufacturing semiconductor wafers
JP5584716B2 (ja) * 2012-02-15 2014-09-03 住友化学株式会社 導光板の製造方法
CN203490180U (zh) * 2013-09-13 2014-03-19 楚天科技股份有限公司 自动灯检机异物检测装置

Also Published As

Publication number Publication date
TW202104873A (zh) 2021-02-01
IL243165A0 (he) 2016-02-29
TW202100981A (zh) 2021-01-01
TWI764269B (zh) 2022-05-11
CN205593551U (zh) 2016-09-21
TW201629466A (zh) 2016-08-16
TWI764268B (zh) 2022-05-11
TWI707131B (zh) 2020-10-11

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