IL174680A - Method of achieving a vacuum seal of a closure member to a planar ceramic surface - Google Patents
Method of achieving a vacuum seal of a closure member to a planar ceramic surfaceInfo
- Publication number
- IL174680A IL174680A IL174680A IL17468006A IL174680A IL 174680 A IL174680 A IL 174680A IL 174680 A IL174680 A IL 174680A IL 17468006 A IL17468006 A IL 17468006A IL 174680 A IL174680 A IL 174680A
- Authority
- IL
- Israel
- Prior art keywords
- achieving
- closure member
- vacuum seal
- ceramic surface
- planar ceramic
- Prior art date
Links
- 239000000919 ceramic Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/86—Vessels; Containers; Vacuum locks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/50—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output
- H01J31/505—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output flat tubes, e.g. proximity focusing tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2231/00—Cathode ray tubes or electron beam tubes
- H01J2231/50—Imaging and conversion tubes
- H01J2231/50057—Imaging and conversion tubes characterised by form of output stage
- H01J2231/50068—Electrical
- H01J2231/50073—Charge coupled device [CCD]
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/652,516 US6507147B1 (en) | 2000-08-31 | 2000-08-31 | Unitary vacuum tube incorporating high voltage isolation |
PCT/US2001/025447 WO2002019365A1 (en) | 2000-08-31 | 2001-08-15 | Vacuum tube housing comprising a plurality of intermediate planar plates having non-monotonically aperture arrangement |
Publications (2)
Publication Number | Publication Date |
---|---|
IL174680A0 IL174680A0 (en) | 2009-02-11 |
IL174680A true IL174680A (en) | 2010-12-30 |
Family
ID=24617106
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL15451701A IL154517A0 (en) | 2000-08-31 | 2001-08-15 | Vacuum tube housing comprising a plurality of intermediate planar plates having non-monotonically aperture arrangement |
IL154517A IL154517A (en) | 2000-08-31 | 2003-02-18 | Vacuum tube housing comprising a plurality of intermediate planar plates having non-monotonically aperture arrangement |
IL174681A IL174681A (en) | 2000-08-31 | 2006-03-30 | Method of manufacturing a packaged vacuum microelectronic device |
IL174680A IL174680A (en) | 2000-08-31 | 2006-03-30 | Method of achieving a vacuum seal of a closure member to a planar ceramic surface |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL15451701A IL154517A0 (en) | 2000-08-31 | 2001-08-15 | Vacuum tube housing comprising a plurality of intermediate planar plates having non-monotonically aperture arrangement |
IL154517A IL154517A (en) | 2000-08-31 | 2003-02-18 | Vacuum tube housing comprising a plurality of intermediate planar plates having non-monotonically aperture arrangement |
IL174681A IL174681A (en) | 2000-08-31 | 2006-03-30 | Method of manufacturing a packaged vacuum microelectronic device |
Country Status (6)
Country | Link |
---|---|
US (3) | US6507147B1 (en) |
EP (1) | EP1328957B1 (en) |
JP (1) | JP5025068B2 (en) |
CA (1) | CA2420653C (en) |
IL (4) | IL154517A0 (en) |
WO (1) | WO2002019365A1 (en) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040169771A1 (en) * | 2003-01-02 | 2004-09-02 | Washington Richard G | Thermally cooled imaging apparatus |
US6943425B2 (en) * | 2004-01-23 | 2005-09-13 | Intevac, Inc. | Wavelength extension for backthinned silicon image arrays |
US7012328B2 (en) * | 2004-05-14 | 2006-03-14 | Intevac, Inc. | Semiconductor die attachment for high vacuum tubes |
US7607560B2 (en) * | 2004-05-14 | 2009-10-27 | Intevac, Inc. | Semiconductor die attachment for high vacuum tubes |
US7020244B1 (en) | 2004-12-17 | 2006-03-28 | General Electric Company | Method and design for electrical stress mitigation in high voltage insulators in X-ray tubes |
US7482571B2 (en) * | 2005-08-01 | 2009-01-27 | Itt Manufacturing Enterprises, Inc. | Low cost planar image intensifier tube structure |
JP5033873B2 (en) * | 2006-06-07 | 2012-09-26 | エフ イー アイ カンパニ | Slider bearing for use with equipment having a vacuum chamber |
CN101461026B (en) * | 2006-06-07 | 2012-01-18 | Fei公司 | Slider bearing for use with an apparatus comprising a vacuum chamber |
DE102007012113B4 (en) * | 2007-03-13 | 2009-04-16 | Sortech Ag | Compact sorption refrigeration device |
US7615843B2 (en) * | 2007-05-01 | 2009-11-10 | Hynix Semiconductor Inc. | Guard ring device receiving different voltages for forming decoupling capacitor and semiconductor device having the same |
US8203438B2 (en) | 2008-07-29 | 2012-06-19 | Masimo Corporation | Alarm suspend system |
US8975668B2 (en) | 2011-10-28 | 2015-03-10 | Intevac, Inc. | Backside-thinned image sensor using Al2 O3 surface passivation |
US10197501B2 (en) | 2011-12-12 | 2019-02-05 | Kla-Tencor Corporation | Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors |
US8530760B2 (en) | 2012-01-09 | 2013-09-10 | Sri Hermetics, Inc. | Electronic device including indium gasket and related methods |
US9496425B2 (en) | 2012-04-10 | 2016-11-15 | Kla-Tencor Corporation | Back-illuminated sensor with boron layer |
US9601299B2 (en) | 2012-08-03 | 2017-03-21 | Kla-Tencor Corporation | Photocathode including silicon substrate with boron layer |
US9426400B2 (en) | 2012-12-10 | 2016-08-23 | Kla-Tencor Corporation | Method and apparatus for high speed acquisition of moving images using pulsed illumination |
US9478402B2 (en) | 2013-04-01 | 2016-10-25 | Kla-Tencor Corporation | Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor |
US9347890B2 (en) | 2013-12-19 | 2016-05-24 | Kla-Tencor Corporation | Low-noise sensor and an inspection system using a low-noise sensor |
US9748294B2 (en) | 2014-01-10 | 2017-08-29 | Hamamatsu Photonics K.K. | Anti-reflection layer for back-illuminated sensor |
US9410901B2 (en) | 2014-03-17 | 2016-08-09 | Kla-Tencor Corporation | Image sensor, an inspection system and a method of inspecting an article |
US9767986B2 (en) | 2014-08-29 | 2017-09-19 | Kla-Tencor Corporation | Scanning electron microscope and methods of inspecting and reviewing samples |
US9860466B2 (en) | 2015-05-14 | 2018-01-02 | Kla-Tencor Corporation | Sensor with electrically controllable aperture for inspection and metrology systems |
US10748730B2 (en) | 2015-05-21 | 2020-08-18 | Kla-Tencor Corporation | Photocathode including field emitter array on a silicon substrate with boron layer |
US9734977B2 (en) | 2015-07-16 | 2017-08-15 | Intevac, Inc. | Image intensifier with indexed compliant anode assembly |
US10462391B2 (en) | 2015-08-14 | 2019-10-29 | Kla-Tencor Corporation | Dark-field inspection using a low-noise sensor |
US10778925B2 (en) | 2016-04-06 | 2020-09-15 | Kla-Tencor Corporation | Multiple column per channel CCD sensor architecture for inspection and metrology |
US10313622B2 (en) | 2016-04-06 | 2019-06-04 | Kla-Tencor Corporation | Dual-column-parallel CCD sensor and inspection systems using a sensor |
US10584027B2 (en) | 2017-12-01 | 2020-03-10 | Elbit Systems Of America, Llc | Method for forming hermetic seals in MEMS devices |
US9969611B1 (en) | 2017-12-01 | 2018-05-15 | Eagle Technology, Llc | Structure for controlling flashover in MEMS devices |
EP3769327A1 (en) | 2018-03-19 | 2021-01-27 | Ricoh Company, Ltd. | Photoelectric conversion device, process cartridge, and image forming apparatus |
US11114489B2 (en) | 2018-06-18 | 2021-09-07 | Kla-Tencor Corporation | Back-illuminated sensor and a method of manufacturing a sensor |
US10943760B2 (en) | 2018-10-12 | 2021-03-09 | Kla Corporation | Electron gun and electron microscope |
US11114491B2 (en) | 2018-12-12 | 2021-09-07 | Kla Corporation | Back-illuminated sensor and a method of manufacturing a sensor |
CN110398168B (en) * | 2019-07-10 | 2024-03-22 | 中国科学院上海技术物理研究所 | Heat exchanger with observation window for 80K low temperature |
US11417492B2 (en) | 2019-09-26 | 2022-08-16 | Kla Corporation | Light modulated electron source |
US11848350B2 (en) | 2020-04-08 | 2023-12-19 | Kla Corporation | Back-illuminated sensor and a method of manufacturing a sensor using a silicon on insulator wafer |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1072323B (en) * | 1957-04-16 | |||
US3509430A (en) * | 1968-01-31 | 1970-04-28 | Micro Science Associates | Mount for electronic component |
US4044374A (en) * | 1976-01-19 | 1977-08-23 | Texas Instruments Incorporated | Semiconductor device header suitable for vacuum tube applications |
US4705917A (en) * | 1985-08-27 | 1987-11-10 | Hughes Aircraft Company | Microelectronic package |
JPH0753625B2 (en) * | 1987-10-12 | 1995-06-07 | 日本特殊陶業株式会社 | Metallized composition for ceramics |
DE4314336A1 (en) * | 1993-04-30 | 1994-11-03 | Siemens Ag | Flat-image intensifier |
US5455385A (en) * | 1993-06-28 | 1995-10-03 | Harris Corporation | Multilayer LTCC tub architecture for hermetically sealing semiconductor die, external electrical access for which is provided by way of sidewall recesses |
US5581151A (en) | 1993-07-30 | 1996-12-03 | Litton Systems, Inc. | Photomultiplier apparatus having a multi-layer unitary ceramic housing |
US5650662A (en) * | 1993-08-17 | 1997-07-22 | Edwards; Steven F. | Direct bonded heat spreader |
US5697825A (en) * | 1995-09-29 | 1997-12-16 | Micron Display Technology, Inc. | Method for evacuating and sealing field emission displays |
US5858145A (en) * | 1996-10-15 | 1999-01-12 | Sarnoff Corporation | Method to control cavity dimensions of fired multilayer circuit boards on a support |
US6008595A (en) * | 1997-04-21 | 1999-12-28 | Si Diamond Technology, Inc. | Field emission lamp structures |
US5897927A (en) * | 1997-06-30 | 1999-04-27 | Industrial Technology Research Institute | Seal for vacuum devices and methods for making same |
JP4098852B2 (en) * | 1997-07-24 | 2008-06-11 | 浜松ホトニクス株式会社 | Electron tube |
KR100494264B1 (en) * | 1997-11-19 | 2005-06-13 | 하마마츠 포토닉스 가부시키가이샤 | Photodetector and image pickup device employing it |
JP4173575B2 (en) * | 1998-01-16 | 2008-10-29 | 浜松ホトニクス株式会社 | Imaging device |
DE69941131D1 (en) * | 1999-01-21 | 2009-08-27 | Hamamatsu Photonics Kk | ELECTRON TUBE |
US6285018B1 (en) * | 1999-07-20 | 2001-09-04 | Intevac, Inc. | Electron bombarded active pixel sensor |
-
2000
- 2000-08-31 US US09/652,516 patent/US6507147B1/en not_active Expired - Lifetime
-
2001
- 2001-08-15 JP JP2002524174A patent/JP5025068B2/en not_active Expired - Fee Related
- 2001-08-15 CA CA2420653A patent/CA2420653C/en not_active Expired - Lifetime
- 2001-08-15 WO PCT/US2001/025447 patent/WO2002019365A1/en active Application Filing
- 2001-08-15 EP EP01963996.2A patent/EP1328957B1/en not_active Expired - Lifetime
- 2001-08-15 IL IL15451701A patent/IL154517A0/en active IP Right Grant
-
2003
- 2003-01-10 US US10/340,386 patent/US6837766B2/en not_active Expired - Lifetime
- 2003-02-18 IL IL154517A patent/IL154517A/en unknown
-
2004
- 2004-06-29 US US10/879,904 patent/US7325715B2/en not_active Expired - Lifetime
-
2006
- 2006-03-30 IL IL174681A patent/IL174681A/en active IP Right Grant
- 2006-03-30 IL IL174680A patent/IL174680A/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CA2420653A1 (en) | 2002-03-07 |
IL174681A (en) | 2011-12-29 |
CA2420653C (en) | 2011-05-03 |
US6507147B1 (en) | 2003-01-14 |
US20040232834A1 (en) | 2004-11-25 |
EP1328957A4 (en) | 2007-11-14 |
US7325715B2 (en) | 2008-02-05 |
US6837766B2 (en) | 2005-01-04 |
WO2002019365A1 (en) | 2002-03-07 |
EP1328957B1 (en) | 2019-01-30 |
EP1328957A1 (en) | 2003-07-23 |
IL174680A0 (en) | 2009-02-11 |
IL174681A0 (en) | 2006-08-20 |
JP5025068B2 (en) | 2012-09-12 |
IL154517A0 (en) | 2003-09-17 |
IL154517A (en) | 2007-07-24 |
JP2004508663A (en) | 2004-03-18 |
US20030137243A1 (en) | 2003-07-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed | ||
KB | Patent renewed |